Patent classifications
F
MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
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F16
ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
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F16K
VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
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99/00
Subject matter not provided for in other groups of this subclass
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F16K2099/0073
Fabrication methods specifically adapted for microvalves
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F16K2099/0074
using photolithography, e.g. etching
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