A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.

A valve comprises an orifice plate (1) having one or more orifices (4) through which a fluid may flow, and one or more piezo-electric elements (2). Each element (2) has a face positioned to contact the orifice plate at an orifice. Each element has a first state in which it abuts the plate to prevent flow of fluid through the associated orifice and a second state in which the face is spaced from the plate to allow flow through the associated orifice. A controller (50) selectively applies a first voltage to an elements to cause it to adopt the first state and applies a second voltage to the one or more elements to cause the elements to adopt the second state.

A microfabricated valve with no moving parts. In one embodiment, the valve includes a reservoir of a liquid that is in fluid communication with an outlet channel having a throat that is less than 100 microns wide. Preferably, the channel is an elongated slit. The configuration of channel is adapted and configured such that surface tension of the liquid prevents flow out of the channel. A heater increases the temperature of the meniscus of the fluid, until a portion of the fluid is ejected from the channel. The ejection of the fluid creates both a thrusting effect and a cooling effect.