A disc pump valve for controlling the flow of fluid through a disc pump includes a first plate having first plate apertures and a second plate having second plate apertures both extending generally perpendicular through the first plate and the second plate, respectively. The second plate apertures are substantially offset from the first plate apertures. The disc pump valve also includes a sidewall disposed between the first plate and second plate. A valve flap is disposed and moveable between the first plate and second plate. The valve flap includes flap apertures substantially offset from the first plate apertures and substantially aligned with the second plate apertures, and low-mass areas. The low-mass areas are offset from the first plate apertures and second plate apertures. The valve flap moves between the first plate and second plate in response to a change in direction of differential pressure of the fluid outside the valve.

Provided is a micro-valve having a laminate structure capable of improving sealing performance when a foreign substance is mixed. The micro-valve 10 has a laminate structure and includes a base layer 20 and a diaphragm layer 30. The base layer is formed with an inlet port 23 for introducing a gas into the micro-valve and an outlet port for allowing the gas to flow outside. The diaphragm layer is arranged to face the base layer. The diaphragm layer switches the flowing and blocking of the gas from the inlet port to the outlet port by elastic deformation thereof. The diaphragm layer has a configuration in which a plurality of deformation regions 33 and a plurality of rigid body regions 34 are alternately formed, the deformation region being elastically deformable in accordance with an inflow of a pneumatic fluid into the micro-valve. The diaphragm layer closes at least one of the inlet port and the outlet port by elastic deformation of at least a part of the plurality of deformation regions.

Disclosed is a bi-directional exhalation valve useful for many applications such as in CPAP devices. The exhalation valve includes a valve body having a center chamber, side chambers, and bidirectional ports coupled to the center chamber via passages and a mechanism that provides fluid ingress into the bi-directional valve in a first mode of operation or fluid egress from the bi-directional valve in a second mode of operation. Unidirectional ports are coupled to the plurality of bidirectional ports to provide providing fluid egress from the valve in the second mode of operation, and a unidirectional port provides fluid ingress into the bi-directional valve in the first mode of operation. A mechanism including a center paddle, side paddles, and a shaft are arranged in an elongated compartment of the valve body, such that the shaft is pivots and the central and side paddles open and close corresponding ones of the input and output ports.

A fluid control device (111) includes a valve section (12) and a blower section (13). The valve section (12) allows fluid to flow in one direction. The valve section (12) has the shape of a cylindrical container with a valve chamber (40) provided therein. The valve section (12) includes a top plate (21), a side-wall plate (22), a bottom plate (23), and a film (24). A plurality of ejection holes (41) and a plurality of auxiliary holes (49) arranged in a predetermined pattern are formed in a central region of the top plate (21). A plurality of communication holes (43) arranged in a predetermined pattern are formed in a central region of the bottom plate (23). A plurality of film holes (42) arranged in a predetermined pattern are formed in a central region of the film (24).

A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

A miniature fluid control device includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The gas inlet plate includes at least one inlet, at least one convergence channel and a central cavity. A convergence chamber is defined by the central cavity. The resonance plate has a central aperture. The piezoelectric actuator includes a suspension plate, an outer frame and a piezoelectric ceramic plate. A gap is formed between the resonance plate and the piezoelectric actuator to define a first chamber. When the piezoelectric actuator is driven and after the gas is fed into the miniature fluid control device through the inlet of the gas inlet plate, the gas is sequentially converged to the central cavity through the convergence channel, transferred through the central aperture of the resonance plate, introduced into the first chamber, transferred downwardly through the piezoelectric actuator, and exited from the miniature fluid control device.

A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

A miniature pneumatic device includes a miniature fluid control device and a miniature valve device. The miniature fluid control device includes a gas inlet plate, a resonance plate, a piezoelectric actuator and a gas collecting plate. A first chamber is formed between the resonance plate and the piezoelectric actuator. After a gas is fed into the gas inlet plate, the gas is transferred to the first chamber through the resonance plate and then transferred downwardly. Consequently, a pressure gradient is generated to continuously push the gas. The miniature valve device includes a valve plate and a gas outlet plate. After the gas is transferred from the miniature fluid control device to the miniature valve device, the valve opening of the valve plate is correspondingly opened or closed and the gas is transferred in one direction. Consequently, a pressure-collecting operation or a pressure-releasing operation is selectively performed.

A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

A piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The suspension plate is a square structure. The length of the suspension plate is in a range between 7.5 mm and 12 mm, and the suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The outer frame is arranged around the suspension plate. The at least one bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate. The piezoelectric ceramic plate is a square structure and has a length not larger than a length of the suspension plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration.