A manufacturing method of micro channel structure is disclosed and includes steps of: providing a substrate; depositing and etching to form a first insulation layer; depositing and etching to form a supporting layer; depositing and etching to form a valve layer; depositing and etching to form a second insulation layer; depositing and etching to form a vibration layer, a lower electrode layer and a piezoelectric actuating layer; providing a photoresist layer and depositing and etching to form a plurality of bonding pads; depositing and etching to from a mask layer; etching to form a first chamber; and etching to form a second chamber.

A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

A miniature fluid control device includes a piezoelectric actuator and a housing. The piezoelectric actuator comprises a suspension plate, an outer frame, at least one bracket and a piezoelectric ceramic plate. The piezoelectric ceramic plate is attached on a first surface of the suspension plate and has a length not larger than that of the suspension plate. The housing includes a gas collecting plate and a base. The gas collecting plate is a frame body with a sidewall and comprises a plurality of perforations. The base seals a bottom of the piezoelectric actuator and has a central aperture corresponding to the middle portion of the suspension plate. When the voltage is applied to the piezoelectric actuator, the suspension plate is permitted to undergo the curvy vibration, the fluid is transferred from the central aperture of the base to the gas-collecting chamber, and exited from the perforations.

A fluidic device comprises a first channel conduit, a valve apparatus, and an additional element adjacent to the first channel conduit. The first channel conduit transports fluid from a first fluid entrance to a fluid exit. In one embodiment, the additional element is a pump chamber that receives fluid from a second fluid entrance and pumps fluid into the first channel conduit in accordance with fluid pressure. Alternatively, the additional elements include a second channel conduit and a neck of the first channel conduit. The first channel conduit and the second channel conduit share a common wall. Fluid pressure in the first channel conduit controls a valve apparatus. The value apparatus controls a rate of fluid flow in the first channel conduit by deforming the common wall to change a cross-sectional area of the neck, which changes a rate of fluid flow in the second channel conduit.

An example fluidic micro electromechanical system may include a substrate and a first layer supported by the substrate. The first layer forms sides of a chamber, a passage through one of the sides and a chamber and a check valve leaf. The check valve leaf is pivotable about an axis nonparallel to the substrate to open and close the passage. The system may further include a second layer over the chamber, an opening into the chamber and a resistor supported within the chamber.

The present invention relates to microfluidic check valves, as well as fluidic cartridges including such check valves. In particular examples, the check valve includes a pre-stressed spring formed from a planar substrate. Various characteristics of the valves, such as size, profile, opening pressure, etc., can be tuned to provide desired performance when employed within a fluidic cartridge.

The invention relates to a method as well as a microdosing system for dosing an amount of fluid to be dispensed, wherein the microdosing system includes a micropump including an inlet and an outlet and configured to suck the fluid to be dispensed through the inlet and to dispense at least part of the fluid from the outlet. Further, the inventive microdosing system includes a first flow sensor arranged on the inlet side or the outlet side having an opening and a flow rate meter, wherein the flow rate meter is configured to determine the flow rate of the fluid passing through this opening. Additionally, the inventive microdosing system includes calibrators and/or fault detectors of the first flow sensor.

A piezoelectric actuator includes a suspension plate, a piezoelectric ceramic plate, an outer frame and a bracket. The suspension plate is permitted to undergo a curvy vibration from a middle portion to a periphery portion. The piezoelectric ceramic plate is attached on the suspension plate. When a voltage is applied to the piezoelectric ceramic plate, the suspension plate is driven to undergo the curvy vibration. The outer frame is arranged around the suspension plate. The bracket is connected between the suspension plate and the outer frame for elastically supporting the suspension plate, and includes an intermediate part formed in a vacant space between the suspension plate and the outer frame and in parallel with the outer frame and the suspension plate, a first connecting part arranged between the intermediate part and the suspension plate, and a second connecting part arranged between the intermediate part and the outer frame.

A fluid valve is provided that includes a first planar substrate having a smooth surface or a surface with features, an elastomer disposed on the first substrate, a second planar substrate disposed on another side of the elastomer, where the second substrate has a smooth surface or features, where the first and second substrate are more rigid than the elastomer, where the first substrate, the second substrate or the elastomer has a fluid channel, where the channel is open when the first or second substrate are in a first thermal state or a first compression state, where the channel is closed or partially closed when the first or second substrate are in a second thermal state or a second compression state, where the second thermal state is a different temperature than the first thermal state, where the second compression state is a different pressure than the first compression state.

A valve includes a first plate having a first vent hole; a second plate defining a valve chamber, which communicates with the first vent hole, between the second plate and the first plate, the second plate having a second vent hole that communicates with the valve chamber and that does not face the first vent hole; and a movable plate having a third vent hole that faces the second vent hole and disposed in the valve chamber such that the movable plate is movable between the first plate and the second plate. The second plate has an auxiliary hole that does not face the third vent hole in the movable plate, the auxiliary hole being surrounded by an edge portion that forms a first corner portion having a substantially convex rounded shape in front view of a principal surface of the second plate at a side facing the valve chamber.