A processing apparatus includes: a processing container configured to accommodate a substrate; a storage tank connected to the processing container via a gas supply pipe; a pressure sensor configured to detect a pressure in the storage tank; a valve provided in the gas supply pipe between the processing container and the storage tank; and a controller configured to control an opening degree of the valve based on the pressure in the storage tank detected by the pressure sensor. The controller is further configured to control the opening degree of the valve to make a drop amount of the pressure become equal to a set discharge pressure, the drop amount being calculated by subtracting the detection value of the pressure sensor in a state where the valve is opened, from the detection value of the pressure sensor before the valve is opened.

Disclosed is a paired compress gas energy power system and power method. The paired compress gas energy power system includes: a paired compress gas energy storage device having a high pressure air container and a low pressure air container, the high pressure air container is filled with a high pressure gas, the low pressure air container is filled with a low pressure gas; a paired compress gas energy engine, respectively connected to the low pressure air container and the high pressure air container; and a power device connected to the rotary shaft of the paired compress gas energy engine, the power device is driven by the paired compress gas energy engine. The invention converts the paired compress gas energy into the mechanical torque energy through the paired compress gas energy engine to drive the power device to work, or to drive the generator to generate electric energy

Disclosed is a paired air pressure energy production system and a production method thereof. The paired air pressure energy production system includes a paired air pressure energy storage device, a pneumatic compressor and a power device, The paired air pressure energy storage device includes a high pressure air container and a low pressure air container, the high pressure air container is filled with first gas, and the low pressure air container is filled with second gas; and the power device is connected with a rotating shaft of the pneumatic compressor and used for driving the rotating shaft of the pneumatic compressor to rotate. According to the invention energy in a natural environment is collected by the power device, and is converted into mechanism energy, so as to achieve the aim of producing paired air pressure energy.

The invention discloses a paired air pressure energy storage device, an inspection method and a balance detection mechanism thereof. The paired air pressure energy storage device includes an inner body and an outer body sleeved outside the inner body. The inner body is filled with a first gas. A cavity formed between the outer body and the inner body is filled with a second gas. There is a gas energy pressure difference between the first gas and the second gas. The gas energy pressure difference is relative pressure gas energy. The invention can store two gases with different pressure intensities, has a simple structure, is convenient for transportation, and is favorable for effective energy storage and long-term storage of gases.

A vacuum supply gas cylinder includes a cylinder body, a cylinder valve, a pipeline structure, a first check valve, a positive pressure regulating valve and a second check valve. The cylinder body includes an accommodating space and an opening. The cylinder valve closes the opening. The pipeline structure includes a first and second pipeline. The first check valve is one-way and disposed at the first pipeline. The first check valve has an opening pressure for a gas flow direction from the second end to the first end. The positive pressure regulating valve is disposed at the first pipeline and has an output pressure having a direction same as the gas flow direction from the second end to the first end. The second check valve is one-way and disposed at the first pipeline and is in the same direction as the flow direction of the input and stored gas.

A modified vacuum actuated valve assembly and sealing mechanism is provided for improved sub-atmospheric flow stability characterized by the absence of delivery pressure spikes and flow excursions. The valve assembly includes a non-stationary thermoplastic seat and a stabber. The stabber is characterized by a top portion having a circular periphery designed to mechanically engage and disengage with an inner sealing surface of the thermoplastic seat. The sealing surface is coined to eliminate surface irregularities contained therein, thereby producing a relatively smooth coined mating inner sealing surface for the circular top portion of the stabber. The valve assembly also includes a modified bellows capable of fine tuning the delivery pressure of the valve assembly.

A modified vacuum actuated valve assembly and sealing mechanism is provided for improved sub-atmospheric flow stability characterized by the absence of delivery pressure spikes and flow excursions. The valve assembly includes a non-stationary thermoplastic seat and a stabber. The stabber is characterized by a top portion having a circular periphery designed to mechanically engage and disengage with an inner sealing surface of the thermoplastic seat. The sealing surface is coined to eliminate surface irregularities contained therein, thereby producing a relatively smooth coined mating inner sealing surface for the circular top portion of the stabber. The valve assembly also includes a modified bellows capable of fine tuning the delivery pressure of the valve assembly.

A high pressure fluid storage system with at least one pressure sensing unitary device (PSUD) which can perform the function of a pressure regulator device. The PSUD can be manufactured as a single unitary construction, wherein both the housing body and the internal pressure regulating mechanism are made from a single unit, material, or both. The PSUD does not have any welded components, is not assembled from a plurality of separate components, or both.

A supply source for delivery of a CO-containing dopant gas composition is provided. The composition includes a controlled amount of a diluent gas mixture such as xenon and hydrogen, which are each provided at controlled volumetric ratios to ensure optimal carbon ion implantation performance. The composition can be packaged as a dopant gas kit consisting of a CO-containing supply source and a diluent mixture supply source. Alternatively, the composition can be pre-mixed and introduced from a single source that can be actuated in response to a sub-atmospheric condition achieved along the discharge flow path to allow a controlled flow of the dopant mixture from the interior volume of the device into an ion source apparatus.

A supply source for delivery of a CO-containing dopant gas composition is provided. The composition includes a controlled amount of a diluent gas mixture such as xenon and hydrogen, which are each provided at controlled volumetric ratios to ensure optimal carbon ion implantation performance. The composition can be packaged as a dopant gas kit consisting of a CO-containing supply source and a diluent mixture supply source. Alternatively, the composition can be pre-mixed and introduced from a single source that can be actuated in response to a sub-atmospheric condition achieved along the discharge flow path to allow a controlled flow of the dopant mixture from the interior volume of the device into an ion source apparatus.