A burner includes a flame sensor configured to detect at least one of permittivity, capacitance, or resistance across a flame region. The permittivity, capacitance, or resistance is used to determine the presence or absence of the flame in a combustion system. A combustion system supports a combustion reaction. The combustion system utilizes a combustion sensor, and optionally a plasma generator to stabilize the combustion reaction. A controller receives sensor signals from the combustion sensor and controls the plasma generator to stabilize the combustion reaction responsive to the sensor signals. The plasma generator stabilizes the combustion reaction by generating a plasma.

A method of operation of a burner system includes introducing a fuel stream into a perforated flame holder, combusting the fuel stream, with a majority of the combustion occurring between an input face and an output face of the flame holder, and producing a heat output from the combustion of at least 1.5 kBTU/H/in.sup.2.

A combustion system such as a furnace or boiler includes a non-planar perforated flame holder configured to hold a combustion reaction.

A combustion system such as a furnace or boiler includes a non-planar perforated flame holder configured to hold a combustion reaction.

The present disclosure generally relates to systems and methods for the combustive abatement of waste gas formed during the manufacture of semiconductor wafers. In particular, the systems described herein are capable of combusting air-polluting perfluorocarbons, including those having high greenhouse gas indexes such as hexafluoroethane (C.sub.2F.sub.6) and tetrafluoromethane (CF.sub.4), as well as particulate-forming silicon dioxide precursors, such as silane (SiH.sub.4) and tetraethoxysilane (Si(OC.sub.2H.sub.5).sub.4, abbreviated TEOS), with greater efficiency and lower energy usage than prior abatement systems. More particularly, and in one preferred embodiment, the present disclosure is directed to a waste gas abatement system that utilizes a combination of non-combustible and combustible gases (or gas mixtures) for thermal combustion, which are directed through multiple permeable interior surfaces of a reaction chamber, efficiently combusting waste gas and preventing undesirable accumulation of solid particulate matter on the chamber surfaces.

An oxygen generator with an oxygen-producing having a center bore, including: an impact-activated ignition mechanism, an end cover, a cylinder, a bell-shaped hood, a thermally insulating inner cylinder, an oxygen-producing column, a thermally insulating material, a support bowl, a gas purification material, a safety valve, an isolation net, an oxygen-discharging end cover and an oxygen-discharging joint. The cylinder is provided with the end cover at one end; the impact-activated ignition mechanism is fixed on the end cover; the oxygen-producing column is coaxially located with the cylinder, one end of the oxygen-producing column is connected to the impact-activated ignition mechanism, and the other end of the oxygen-producing column is connected to the support bowl; the support bowl is connected to the isolation net; the thermally insulating inner cylinder is arranged on the outside of the oxygen-producing column and the thermally insulating material.

A burner for implementing a partial oxidation, having at least two channels, more particularly having one central channel and at least one annular channel surrounding the central channel, through each of which a flow of fluid can be passed to implement the partial oxidation, there being an insulating element arranged on an inner face of a wall of at least one channel of the at least two channels at least along part of an axial length of this at least one channel.

A burner includes a flame sensor configured to detect at least one of permittivity, capacitance, or resistance across a flame region. The permittivity, capacitance, or resistance is used to determine the presence or absence of the flame in a combustion system. A combustion system supports a combustion reaction. The combustion system utilizes a combustion sensor, and optionally a plasma generator to stabilize the combustion reaction. A controller receives sensor signals from the combustion sensor and controls the plasma generator to stabilize the combustion reaction responsive to the sensor signals. The plasma generator stabilizes the combustion reaction by generating a plasma.

A tubular burner and methods of use in a furnace having reduced NO.sub.x emissions are provided. The tubular burner comprises a structural skeleton and a mesh screen disposed about the structural skeleton. The structural skeleton may be coupled to an air/fuel mixture source. The structural skeleton may comprise a hollow interior and a plurality of perforations to allow the air/fuel mixture to pass from the interior of the structural skeleton to the exterior. The burner systems may further comprise a plurality of holes spaced along and between the burners for cross-lighting of multiple burners using a single igniter.

A combustion system such as a furnace or boiler includes a non-planar perforated flame holder configured to hold a combustion reaction.