An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

Disclosed herein are embodiments of a flare control method and a flare apparatus for automatically controlling, in real-time, the flow of one or more of fuel, steam, and air to a flare. The disclosed embodiments advantageously allow for automated control over a wide spectrum of operating conditions, including emergency operations, and planned operations such as startup and shutdown.

A method for controlling the Btu content of a flare gas to combusted in a flare stack comprising a flare tip is provided. The method includes, introducing a first gas stream including nitrogen to be flared, the first gas stream having an initial Btu content, providing a supplemental fuel gas stream, and combining the first gas stream with the supplemental fuel gas stream, thereby obtaining a flare gas stream having a final Btu content measured at the flare tip.

A method for controlling the Btu content of a flare gas to combusted in a flare stack comprising a flare tip is provided. The method includes, introducing a first gas stream including nitrogen to be flared, the first gas stream having an initial Btu content, providing a supplemental fuel gas stream, and combining the first gas stream with the supplemental fuel gas stream, thereby obtaining a flare gas stream having a final Btu content measured at the flare tip.

The burner preferably exclusively burns substantially explosible solid fuels and preferably has instant ON-OFF thermostat control, wastes no energy preheating the enclosure or external air supply, achieves stable combustion the moment the powder-air mix is ignited in our burner, is used in the upward vertical mode except for oil burner retrofits, burns a solid fuel in a single-phase regime as if it were a vaporized liquid or gas, is designed to complete combustion within the burner housing itself rather than in a large, high temperature furnace enclosure which it feeds, has an ultra-short residence time requirement, is a recycle consuming burner with self-contained management of initially unburned particles, is much smaller, simpler and lower cost, has a wider dynamic range/turndown ratio, is more efficient in combustion completeness and thermal efficiency, and operates with air-fuel mix approximately at the flame speed.

An emission control flare stack for minimizing the formation of volatile organic compounds wherein the stack has a controller for operating a gas flow meter; a inlet gas regulator; an oxygen/air flow meter; an oxygen/air regulator; a burner with at least one igniter; a plurality of cooling and heating tubes; and a neutralization solution regulator. The controller receives data from a temperature sensor and an emissions sensor and is in communication with a network. The controller provides controlled burn and neutralization using air intake information and gas concentrations information and can transmit data to an administrative server, cloud computing processor, client devices or combinations thereof for continuous remote viewing of emissions using an executive dashboard.

A system and method for remote monitoring and control of landfill and recycling operations provide an intelligent centralized platform for remote, real-time industrial data gathering and process control for management of landfill and recycling operations such as leachate, gas, water and other liquids. The system and method can directly upload machine data (such as liquid volumes, flows, level, equipment runtime, sorter data, status, etc.) into a centralized platform. This data can be used for analytics and automation of processes and equipment control.

A system for flare combustion control includes a sound speed measurement device for measuring sound speed in a flare vent gas, and a flare combustion controller including a memory and a processor. The processor is configured to receive the measured sound speed and determine, based on the measured sound speed, a molecular weight of the flare vent gas. The processor is further configured to determine, based on the determined molecular weight, a net heating value of the flare vent gas, and adjust the net heating value of the flare vent gas by regulating an amount of a supplemental fuel gas in the flare vent gas.

A system and method for remote monitoring and control of landfill and recycling operations provide an intelligent centralized platform for remote, real-time industrial data gathering and process control for management of landfill and recycling operations such as leachate, gas, water and other liquids. The system and method can directly upload machine data (such as liquid volumes, flows, level, equipment runtime, sorter data, status, etc) into a centralized platform. This data can be used for analytics and automation of processes and equipment control.