Methods and systems for monitoring a flare burner with a camera. The methods and systems which may indicate to operators the presence or absence of one or more of smoke, flare flame, and steam plume and record those indications or measurements. Additionally, the methods and systems may confirm whether compliance with local regulations on visual emissions, smoke plume is achieved. The methods and systems automatically adjust the delivery rate of key inputs including measures assist fuel gas, purge gas, steam and/or air simultaneously to maintain or attain compliance with said local regulatory requirements. Also, methods for a machine learning process for using controller inputs to identify normal and abnormal flare states and provide visual indications and flare operation recommendations.

A portable flaring apparatus is disclosed. The flaring apparatus comprises a stack comprising multiple segments of varying diameters, which may be configured to be telescoped for transport. The flaring apparatus further comprises one or more inlets for the intake of gas, an arrester for suppressing flames and detonation within the flaring system, and a plurality of combustion tips for flaring gas. The components of the flaring apparatus may be affixed to a trailer platform for portability.

The present invention relates to a ducting system (100) for conveying a flow of a gaseous feed (110) comprising a combustible component from an inlet to at least one combustion module (12), the ducting system (100) utilising a combination of a sensor (C0) for measuring the concentration of the combustible component in the gaseous feed (110), a flame detector (F0, F1, F2, F3, . . . , Fn) a shut-off valve (6) and a flame arrestor (5) located in a flow path of the gaseous feed upstream of the shut-off valve (6) such that a measurement of a concentration of combustible material in the gaseous feed over a specified concentration by the sensor (CO) causes the shut-off valve (6) to be configured to the closed position for preventing flow of a gaseous feed comprising a combustible mixture of the combustible component from reaching an ignition source and/or detection of flame by the flame detector (F0, F1, F2, F3, . . . , Fn) causes shut-off valve (6) to be configured to the closed position for attenuating propagation of a flame towards the inlet.

The present subject matter provides a burner configured to burn a gas released from an instrument, for example a gas chromatography instrument, the burner comprising: a burning chamber; a gas inlet, configured to allow entry of the gas from the instrument into the burning chamber; an oxygen mix inlet, configured to allow entry of an oxygen mix into the burning chamber; a flammable gas inlet, configured to allow entry of a flammable gas into the burning chamber, and an igniter, capable of igniting gases in the burning chamber. A system for controlling the burning of a gas emitted from an instrument, a method for burning a gas emitted from an instrument, and a method for using a flammable gas as a carrier gas in a gas chromatography instrument, are also provided, as well as various embodiments thereof.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

Disclosed herein are systems, apparatuses, and methods for using a sensed combustion zone temperature to continuously control combustion of a first (main) gas within an enclosed combustor. The combustor is in fluid communication with a first gas line carrying the first gas, a second gas line independent of the first gas line carrying a second (assist) gas having a higher heating value than the first gas, and air dampers providing draft or assist air. The first gas may be vapors from a production source or tank. A computer control system monitors the combustion zone temperature of the enclosed combustor as sensed by a sensor in electronic communication with the computer control system and controls the combustion zone temperature by changing a condition of a first gas line valve of the first gas line, a second gas line valve of the second gas line, and the air dampers.

An exhaust gas treatment apparatus for treating an exhaust gas discharged from an EUV (Extreme Ultra Violet) exposure equipment by combustion treatment to make the exhaust gas harmless is disclosed. The exhaust gas treatment apparatus includes a cylindrical combustion chamber configured to combust a processing gas containing hydrogen, and a processing gas nozzle and an oxidizing gas nozzle provided on the combustion chamber and configured to blow the processing gas and an oxidizing gas, respectively, in a tangential direction to an inner circumferential surface of the combustion chamber, wherein the processing gas nozzle and the oxidizing gas nozzle are positioned in the same plane perpendicular to an axis of the combustion chamber.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.

An apparatus coupled to a chamber for processing extreme ultraviolet radiation includes a gas inlet configured to direct exhaust gases from the chamber into a combustion zone. The combustion zone is configured to flamelessly ignite the exhaust gases. An air inlet is configured to direct a mixture of air and a fuel into the combustion zone. A control valve is configured to change a volume of fluid exhausted from the combustion zone. A controller configured to control the control valve so as to prevent a pressure inside the combustion zone from exceeding a preset pressure value is provided.