A method and device for chemical destruction of at least one feed comprising at least one organic compound are provided. The device comprises at least one inductive plasma torch, means for introducing at least one plasma-forming gas into the torch, optionally when the plasma gas(es) comprise(s) no or little oxygen, means for bringing oxygen gas into the plasma or into the vicinity of the plasma, means for introducing the feed into the torch, a reaction enclosure capable of allowing thermal destruction of the gases flowing from the torch, a device allowing mixing of the gases flowing out of the reaction enclosure to be carried out, means for introducing air and/or oxygen gas into the mixing device, a device allowing recombination by cooling of at least one portion of the gases from the mixing device, the torch, the reaction enclosure, the mixing device and the recombination device being in fluidic communication.

An inlet assembly for an abatement apparatus includes an inlet nozzle defining a non-circular inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the abatement apparatus, at least one outlet aperture and a nozzle bore extending along a longitudinal axis between the non-circular inlet aperture and the outlet aperture for conveying the effluent gas stream from the non-circular inlet aperture to the outlet aperture for delivery to a treatment chamber of the abatement apparatus, the nozzle bore defining an inlet portion extending from the non-circular inlet aperture, a flow-dividing structure positioned downstream of the inlet portion and configured to separate the effluent gas stream into at least a pair of effluent gas streams and an outlet portion extending to the outlet aperture and configured to convey the pair of effluent gas streams to the treatment chamber of the abatement apparatus.

An apparatus for treatment of gaseous pollutants, the apparatus comprising a reaction portion and a passage. The reaction portion comprises a gas inlet unit, a reaction unit, a combustion unit and a cooling unit. The passage comprises a transverse section, a connection section and a straight section, the transverse section is provided with a top gas inlet in communication with the reaction portion and a lateral gas inlet, the connection section is connected between the transverse section and the straight section, the top gas inlet receives an effluent passing through the reaction portion and then flowing downwards, the lateral gas inlet receives a transverse air flow, and the effluent is driven by the transverse gas flow to form a cyclone and is discharged from an outlet of the straight section by means of the connection section.

An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition associated with the first abatement device, to run the second abatement device in the active mode. In this way, a first or primary abatement device is provided which treats the effluent stream and a second or back-up abatement device is provided, should the first abatement device malfunction. However, by only causing the second abatement device to operate in the active mode when the first abatement device malfunctions, significant energy savings can be made.

An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.

The invention relates to a method for the thermal disposal of pollutants in industrial gases, wherein, in order to generate a flame for burning the pollutants, a fuel gas and oxygen are fed into a combustion chamber (19) of a burner (1), where they are then ignited, wherein a diluent gas is fed in in order to reduce the calorific value of the gas mixture relative to the fuel gas, while the throughput of the diluent gas is regulated as a function of the composition of the industrial gas in order to adapt the gas mixture consisting of diluent gas and fuel gas. The invention also relates to a burner (1) for generating a flame (2) in a combustion chamber (19) for burning pollutants in an industrial gas, and to a waste-gas treatment device having at least one burner (1) arranged in a combustion chamber (19).

The present invention presents a burner for scrubbers equipped with the first nozzle that is in the shape of a pipe and that is equipped with the first main body, the second nozzle that is in the shape of a pipe and equipped with the second main body that is located to wrap the outer circumference of the aforementioned first main body, and the third nozzle that is in the shape of a pipe and that is equipped with the third main body located to wrap the outer circumference of the aforementioned second main body.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

A wet abatement system which can suppress the accumulation of foreign matters in a treatment gas line is proposed. There is provided a wet abatement system for detoxifying treatment gas by bringing the treatment gas into contact with liquid. The wet abatement system includes an inlet casing having an inlet port from which the treatment gas is let in and an outlet port provided below the inlet port and through which the treatment gas flows, and a liquid film forming device provided between the inlet port and the outlet port and configured to form a liquid film on an inner wall surface of the inlet casing. A heater configured to heat the inlet casing is embedded in an interior of a wall portion of the inlet casing, the wall portion constituting a portion situated above the liquid film forming device.

A process of making a fuel product from a non-combustible high protein organic material such as a biological by-product or waste material. The moisture content of the high protein organic material is mechanically reduced and dried to reduce the moisture content to less than ten percent (10%). The high protein organic material is pulverized to a particle size of less than about 2 mm. The high protein organic waste material is fed into a combustion chamber and separated during combustion such as by spraying of the high protein organic waste material within the combustion chamber. Temperature and nitrogenous hydrocarbon combustion reactions within the combustion chamber are also controlled by injection of steam within the combustion chamber. The concentration of protein thermal decomposition by-products, the temperature and/or pressure within the combustion chamber is also controlled to degrade hazardous polyfluoro compounds into less hazardous compounds.