The invention relates to a burner as well as to a waste gas treatment device for generating a flame for the combustion of process gas, especially of contaminants, in a combustion chamber, in each case having feed lines for a fuel gas and for an oxidizing agent so that they flow into a pre-mixing chamber, and having an ignition device for igniting the gas mixture contained in the pre-mixing chamber. According to the invention, a sensor for detecting and/or monitoring the flame is provided on the burner, especially at one end of the burner situated opposite from the pre-mixing chamber.

Described herein is a technique capable of improving an operation rate of an apparatus using a plurality of detoxification apparatuses by removing by-products adhered thereto. According to one aspect of the technique, a processing apparatus includes a controller configured to perform a process recipe of forming a film on a substrate, The controller performs: (a) when an operation state of the first detoxification apparatus is an operation-in-progress state, checking an operation state of the second detoxification apparatus; (b) when the operation state of the second detoxification apparatus is not a maintenance-in-progress state, starting an operation of the second detoxification apparatus and switching the operation state of the first detoxification apparatus to the maintenance-in-progress state; and (c) when the operation state of the second detoxification apparatus is the maintenance-in-progress state, continuing an operation of the first detoxification apparatus.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

A treatment apparatus for treating an effluent gas includes a combustion chamber; a burner; an inlet for receiving secondary combustion air; an exhaust gas outlet for outputting exhaust gases from the combustion chamber; and a heat exchanger. The heat exchanger is configured to exchange heat between a first fluid and a second fluid flowing through respective first and second fluid flow paths. The first fluid flow path is connected to the inlet and the second fluid flow path is connected to the outlet such that the exhaust gases received at the outlet flow into the second fluid flow path. The heat exchanger comprises a fluid flow communication path for providing a path for flow of a portion of the exhaust gases from the second fluid into the first fluid; and at least one inlet aperture for inputting the first fluid to the combustion chamber.

A powder removing apparatus according to an embodiment includes a first tank in which a powder produced by burning a process gas is collected; a duct with a hollow to which the powder is carried and to which a flow of a liquid is supplied, the duct that is connected to the first tank and that allows the powder to flow from the hollow into the first tank by the flow of the liquid; and a pump that supplies the liquid to the hollow.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

The invention provides a device and system for decomposing and oxidizing of gaseous pollutants. A novel reaction portion reduces particle formation in fluids during treatment, thereby improving the defect of particle accumulation in a reaction portion. Also, the system includes the device, wherein a modular design enables the system to have the advantage of easy repair and maintenance.

An oxidizer head assembly includes a head body defining an inlet flange, an outlet flange, and a wall, where the inlet flange, the outlet flange, and the wall define a cavity positioned between the inlet flange and the outlet flange, a plurality of nozzles extending through the cavity, a fuel inlet in communication with the plurality of nozzles, where a fuel passes through the fuel inlet and the plurality of nozzles, a shield gas inlet in communication with the cavity, and a porous diffuser plate extending across the outlet opening, the porous diffuser plate including apertures for the plurality of nozzles and a plurality of pores, where a shield gas passes through the shield gas inlet, through the cavity, and through the plurality of pores of the porous diffuser plate around the plurality of nozzles.

An inlet assembly for a burner includes an inlet nozzle defining an inlet aperture coupleable with an inlet conduit providing an effluent gas stream for treatment by the burner, a non-circular outlet aperture, and a nozzle bore extending along a longitudinal axis between the inlet aperture and the outlet aperture for conveying the effluent gas stream from the inlet aperture to the outlet aperture for delivery to the combustion chamber of the burner.