A method for controlling an air handler includes providing a temperature setpoint to a smart valve in fluid communication with one or more coils of the air handler, providing to the smart valve an air temperature of air conditioned by the air handler, and modulating a valve position of the smart valve using the temperature setpoint, and the air temperature.

The present invention relates to an integrated gas system for a substrate processing apparatus, the system including: a plurality of base blocks connected sequentially to one another to extend a gas supply flow passage passing through the interiors thereof to flow gas therealong, the gas supply flow passage having a gas inlet connected to one side surface of the first base block and a gas outlet connected to one side surface of the last base block; and a flow rate control unit disposed on the base blocks along the gas supply flow passage and having at least one of valves and a flow rate controller, wherein each base block has a first heater groove formed close to the gas supply flow passage on one side surface thereof.

The present invention relates to an integrated gas system for a substrate processing apparatus, the system including: a plurality of base blocks connected sequentially to one another to extend a gas supply flow passage passing through the interiors thereof to flow gas therealong, the gas supply flow passage having a gas inlet connected to one side surface of the first base block and a gas outlet connected to one side surface of the last base block; and a flow rate control unit disposed on the base blocks along the gas supply flow passage and having at least one of valves and a flow rate controller, wherein each base block has a first heater groove formed close to the gas supply flow passage on one side surface thereof.

A heater for heating air includes an inlet, an outlet, and an air duct between the inlet and the outlet. A fan and a heating element are positioned in the air duct. A first temperature sensor is positioned at or near the inlet and configured to measure a first temperature of ambient air at the inlet. A second temperature sensor in positioned in the air duct and configured to measure a second temperature of heated air flowing through the air duct. The heater is configured to control heating power and fan speed based on measurements taken by the first and second temperature sensors.

A heater for heating air includes an inlet, an outlet, and an air duct between the inlet and the outlet. A fan and a heating element are positioned in the air duct. A first temperature sensor is positioned at or near the inlet and configured to measure a first temperature of ambient air at the inlet. A second temperature sensor in positioned in the air duct and configured to measure a second temperature of heated air flowing through the air duct. The heater is configured to control heating power and fan speed based on measurements taken by the first and second temperature sensors.

A column-conditioning enclosure includes a column chamber adapted to hold one or more chromatography separation columns. A duct system provides an airflow path around the column chamber such that the one or more chromatography separation columns held within the column chamber are isolated from the airflow path. An air mover disposed in the airflow path generates a flow of air within the duct system. A heat exchanger system disposed in the airflow path near the air to exchange heat with the air as the air flows past the heat exchanger system. The air circulates through the duct system around the column chamber, convectively exchanging heat with the column chamber to produce a thermally conditioned environment for the one or more chromatography separation columns held within the column chamber.

A heat-pump circuit may include an indoor heat exchanger, an outdoor heat exchanger, a compressor adapted to circulate a working fluid between the indoor and outdoor heat exchangers, and an expansion device disposed between the indoor and outdoor heat exchangers. A monitor for the heat-pump system may include a return-air temperature sensor, a supply-air temperature sensor, and a processor. The return-air temperature sensor may be adapted to measure a first air temperature of air upstream of the indoor heat exchanger. The supply-air temperature sensor may be adapted to measure a second air temperature of air downstream of the indoor heat exchanger. The processor may be in communication with the return-air temperature sensor and the supply-air temperature sensor. The processor may be programmed to determine a working-fluid-charge condition of the heat-pump system based on the first and second air temperatures.

A method for remotely diagnosing an abnormality in a climate control device includes the following steps: (a) receiving, at a diagnostic device remote from the climate control device, a signal representing one or more operating parameters of the climate control device, (b) generating, at the diagnostic device, an operating state metric at least partially from the signal representing the one or more operating parameters, (c) comparing, at the remote diagnostic device, the operating state metric to a reference metric, and (d) diagnosing, at the remote diagnostic device, the abnormality in response to a difference between the operating state metric and the reference metric.

The present disclosure relates to an integrated modulating forced air electric heater with temperature control protection used to limit the electric heater output to protect the forced air electric heater components from overheating. The integrated modulating forced air electric heater with temperature control protection may be used to prevent the electronic heating element from overheating. The integrated modulating forced air electric heater with temperature control protection may also include protection to prevent a switch from overheating where the switch is used to switch power to the electric heating element.

The present disclosure relates to an integrated modulating forced air electric heater with temperature control protection used to limit the electric heater output to protect the forced air electric heater components from overheating. The integrated modulating forced air electric heater with temperature control protection may be used to prevent the electronic heating element from overheating. The integrated modulating forced air electric heater with temperature control protection may also include protection to prevent a switch from overheating where the switch is used to switch power to the electric heating element.