Under one aspect, a system is provided for rotating photovoltaic modules arranged in a row. The system can include an elongated structural member extending along and parallel to the row; protrusions coupled to the elongated structural member; an actuator; and drive mechanisms coupled to the photovoltaic modules. Actuation of the actuator can move the elongated structural member, the movement of the elongated structural member can move the protrusions, the movement of the protrusions can move the drive mechanisms, and the movement of the drive mechanisms can rotate the photovoltaic modules.

A method for fabricating a self-aligned via structure includes forming a tri-layer mask on an ILD layer over a lower metal wiring layer, the tri-layer mask includes first and second insulating layers and a metal layer in between the insulating layers; defining a trench pattern through the first insulating layer and metal layer, the trench pattern having a first width; defining a first via pattern in a lithographic mask over the trench pattern, the first via pattern having a second width that is larger than the first width; growing a metal capping layer on an exposed sidewall of the trench pattern to decrease the first width to a third width that defines a second via pattern; transferring the trench pattern into the ILD layer to form a trench; and transferring the second via pattern through the ILD layer and into the metal wiring layer to form a via.

Solar parking module with integrated Electric Vehicle charging station that, within the same structure, combines energy capture, storage and supply for electric vehicles or for the grid. Each module has an oscillating, counterweighted photovoltaic roof supported by bolts resting on the apexes of three semi-elliptical arches that serve as pillars. The spans of the arches accommodate and protect the energy supply points, accumulators and counterweights that serve as stops for the angle of oscillation of the roof. The roof is fastened on three frames, which are counterweighted, capable of oscillating at the same time by means of linear actuators, enabling the roof to track east to west. Between rows of panels is a trough for protection and for water runoff, which leaves a hollow space for ventilation of the panels. Parking can be expanded by means of lining up modules, without changing the equal distance between the pillars.

A method for fabricating a self-aligned via structure includes forming a tri-layer mask on an ILD layer over a lower metal wiring layer, the tri-layer mask includes first and second insulating layers and a metal layer in between the insulating layers; defining a trench pattern through the first insulating layer and metal layer, the trench pattern having a first width; defining a first via pattern in a lithographic mask over the trench pattern, the first via pattern having a second width that is larger than the first width; growing a metal capping layer on an exposed sidewall of the trench pattern to decrease the first width to a third width that defines a second via pattern; transferring the trench pattern into the ILD layer to form a trench; and transferring the second via pattern through the ILD layer and into the metal wiring layer to form a via.

A solar energy storage and generation system includes a housing mounted on a base, a solar collector installed inside the housing, at least one lens installed on the upper surface of the housing, and multiple liquid-level counterbalance devices installed separately at different corner positions inside the housing. The base includes a multi-axis adjustment device positioned corresponding to the center of gravity of the counterweights in the housing. By installing the liquid-level counterbalance devices inside the housing and the multi-axis adjustment device, the upper surface of the housing can be adjusted to face the direction of the sun, thereby achieving a sun-tracking effect.