A cryocooler includes a displacer that includes a lid portion and a main body portion, a displacer drive shaft that includes a collar portion held between the lid portion and the main body portion, and a buffer that is disposed in a clearance between the collar portion and the lid portion or between the collar portion and the main body portion and includes a soft material and a hard material disposed on an opposite side to the collar portion with respect to the soft material.

A thermoacoustic refrigeration assembly includes a resonating tube having a first end and a second end; a first mechanical oscillator at the first end; a second mechanical oscillator at the second end; and a thermoacoustic stack sandwich disposed along a length of the resonating tube through which gas travels. The stack sandwich includes a first outboard heat exchanger on a first side of the stack sandwich facing the first mechanical oscillator, a second outboard heat exchanger on a second side of the stack sandwich facing the second mechanical oscillator, and a center heat exchanger disposed between the first outboard heat exchanger and the second outboard heat exchanger.

A cryocooler includes a compressor, an expander, a gas line that allows a working gas to be circulated between the compressor and the expander and includes a high pressure line through which the working gas is supplied from the compressor to the expander and a low pressure line through which the working gas is collected from the expander to the compressor, a bypass line that connects the high pressure line to the low pressure line such that the working gas bypasses the expander and returns from the high pressure line to the low pressure line, and a bypass flow rate control unit that controls a flow rate of the working gas flowing in the bypass line to provide pressure control of the gas line. The bypass line includes a variable flow rate bypass and a fixed flow rate bypass.

A cryogenic cooling system (10) comprising a cryostat (12), a two-stage cryogenic cold head (24) and at least one thermal connection member (136; 236; 336; 436) that is configured to provide at least a portion of a heat transfer path (138; 238; 338; 438) from the second stage member (30) to the first stage member (26) of the two-stage cryogenic cold head (24). The heat transfer path (138; 238; 338; 438) is arranged outside the cold head (24). A thermal resistance of the provided at least portion of the heat transfer path (138; 238; 338; 438) at the second cryogenic temperature is larger than a thermal resistance of the provided at least portion of the heat transfer path (138; 238; 338; 438) at the first cryogenic temperature.

A cryocooler includes a compressor, an expander that includes a motor and is driven by the motor, an inverter that controls an operation frequency of the motor, a high pressure line that connects the compressor to the expander such that a working gas is supplied from the compressor to the expander, a low pressure line that connects the compressor to the expander such that a working gas is collected from the expander to the compressor, a pressure measurement unit that is configured to measure pressures of the high pressure line and the low pressure line or to measure a differential pressure between the high pressure line and the low pressure line, and a controller that compares the differential pressure to a target pressure and controls the inverter such that the operation frequency of the motor is increased when the differential pressure exceeds the target pressure.

Provided is a method of disassembling a cold head provided with a displacer that extends in an axial direction, a cylinder that accommodates the displacer, and a displacer drive unit that is fastened to the cylinder and is connected to the displacer such that the displacer is driven in the axial direction, the method including mounting a lifting-up jig onto the displacer drive unit, unfastening the displacer drive unit and the cylinder from each other, and operating the lifting-up jig such that the displacer drive unit is lifted up from the cylinder together with the displacer.

There is provided a method of reducing noise in a cryogenic cooling system associated with a mechanical refrigerator forming part of said cooling system. The method comprises: monitoring vibrations in the cooling system during operation of the mechanical refrigerator; and modulating an operating frequency of the mechanical refrigerator based on the monitored vibrations so as to reduce the amplitude of said vibrations. This allows noise within the cooling system to be reduced.

An apparatus is provided. The apparatus comprises a processing chamber. A substrate support is within the processing chamber, wherein the substrate support is in thermal contact with a substrate. A cooling system cools the substrate support. The cooling system comprises a first refrigeration system. The first refrigeration system comprises a first refrigerant inlet for receiving the first refrigerant from a first refrigerant source outside of the refrigeration system, wherein the first refrigerant is at a first pressure, a first throttle, wherein the first throttle allows a controlled expansion of the first refrigerant, wherein the expansion of the first refrigerant cools the first refrigerant, a first heat transfer system, for absorbing heat and transferring heat to the cooled first refrigerant, and a first refrigerant return for directing the first refrigerant from the first refrigeration system at a second pressure away from the first refrigeration system.

A cryogenic device includes: a hermetic container; a cryocooler including a mounting portion mounted on the container, a connecting part extending from the mounting portion into the container in an axial direction of the cryocooler, and a cooling stage attached to the connecting part and disposed in the container; and a member to be cooled that is disposed in the container with a gap, which is configured to allow heat to be exchanged, between the cooling stage and the member. The cooling stage includes a cold fin extending in a direction perpendicular to the axial direction. A fin receiving groove recessed in the direction perpendicular to the axial direction is formed in the member to be cooled and extends in the axial direction, and the member to be cooled receives the cold fin in the fin receiving groove with the gap.

A Gifford-McMahon (GM) type double-inlet pulse tube system providing cooling at cryogenic temperatures is provided. The system has a co-axial double-inlet valve that includes a base having an adjustable port, a fixed needle partially engaged in one end of the adjustable port, an adjustable needle partially engaged in another end of said adjustable port, and a body for housing the base, the fixed needle and the adjustable needle. The base is configured to be adjustable along an axial direction. The adjustable needle is arranged co-axially with the fixed needle. The adjustable port and the adjustable needle are configured to control an alternating current (AC) flow and a direct current (DC) flow between the stem port and the end port and to produce the DC flow in either direction between the stem port and the end port.