A discrete zone energy transmission system is provided. The system includes an object treatment area, an array of energy transmission elements configured to direct energy toward predetermined zones in the treatment area, a sensor configured to detect a presence and a location of an object in the treatment area, and a controller in communication with the array of energy transmission elements and the sensor. The controller is configured to receive presence and location data from the sensor, assign the data to the predetermined zones, and control an operation of the array of energy transmission elements to selectively radiate energy from the array of energy transmission elements only toward a select number of zones in the object treatment area based on the presence and location data, thereby selectively radiating the energy from the array of energy transmission elements only toward the object in the treatment area.

A cleaning apparatus, method, and dry chamber are provided for cleaning a wafer carrier that holds wafers as part of a semiconductor fabrication process. The cleaning apparatus includes a wet chamber that receives the wafer carrier to be washed and a reservoir in fluid communication with the wet chamber. The reservoir stores a cleaning liquid that is introduced to the wafer carrier within the wet chamber during a washing operation, and a dry chamber is spaced apart from the wet chamber. The dry chamber receives the wafer carrier after the wafer carrier is washed in the wet chamber and holds the wafer carrier during a drying operation. A transport system transports the wafer carrier between the wet chamber and the dry chamber during a cleaning process.

A cleaning apparatus, method, and dry chamber are provided for cleaning a wafer carrier that holds wafers as part of a semiconductor fabrication process. The cleaning apparatus includes a wet chamber that receives the wafer carrier to be washed and a reservoir in fluid communication with the wet chamber. The reservoir stores a cleaning liquid that is introduced to the wafer carrier within the wet chamber during a washing operation, and a dry chamber is spaced apart from the wet chamber. The dry chamber receives the wafer carrier after the wafer carrier is washed in the wet chamber and holds the wafer carrier during a drying operation. A transport system transports the wafer carrier between the wet chamber and the dry chamber during a cleaning process.

A drying apparatus based on peristaltic propelling, including a heat supply module, a drying chamber and a conveying device. The conveying device is arranged in the drying chamber. The drying chamber is provided with a heat source inlet, a heat source outlet, a feeding port and a discharging port. A heat output point of the heat supply module is arranged at the heat source inlet and is configured to provide heat to the drying chamber. The conveying device is configured to provide a platform for laying and propelling a material. The conveying device includes a platform formed by alternate stacking of at least two grid groups. A gap is provided between two adjacent grids. The gap is kept unobstructed and the material is flipped when the material is propelled forward. The gap formed between the adjacent movable grids facilitates improving the fluidity of the air, enhancing the drying efficiency.

A drying apparatus based on peristaltic propelling, including a heat supply module, a drying chamber and a conveying device. The conveying device is arranged in the drying chamber. The drying chamber is provided with a heat source inlet, a heat source outlet, a feeding port and a discharging port. A heat output point of the heat supply module is arranged at the heat source inlet and is configured to provide heat to the drying chamber. The conveying device is configured to provide a platform for laying and propelling a material. The conveying device includes a platform formed by alternate stacking of at least two grid groups. A gap is provided between two adjacent grids. The gap is kept unobstructed and the material is flipped when the material is propelled forward. The gap formed between the adjacent movable grids facilitates improving the fluidity of the air, enhancing the drying efficiency.

Provided are an air nozzle and a coater. The air nozzle includes an air outlet chamber, an air return chamber, and an infrared light assembly, where the air outlet chamber includes an air outlet panel, the air outlet panel facing a substrate to be treated; the air return chamber is provided with an air return panel on a side facing the substrate, the air return panel being provided with a plurality of punch holes for communication with the air return chamber; the air outlet panel is configured to convey a medium inside the air outlet chamber to outside the air nozzle, and the medium enters the air return chamber through the air return panel after passing through the substrate; and the infrared light assembly is provided on a path of the medium entering the air return chamber.

Provided are an air nozzle and a coater. The air nozzle includes an air outlet chamber, an air return chamber, and an infrared light assembly, where the air outlet chamber includes an air outlet panel, the air outlet panel facing a substrate to be treated; the air return chamber is provided with an air return panel on a side facing the substrate, the air return panel being provided with a plurality of punch holes for communication with the air return chamber; the air outlet panel is configured to convey a medium inside the air outlet chamber to outside the air nozzle, and the medium enters the air return chamber through the air return panel after passing through the substrate; and the infrared light assembly is provided on a path of the medium entering the air return chamber.

Near InfraRed NIR technology, including NIR cameras and detectors, and machine learning methods and systems, including one or more Machine Learning (ML) based moisture level detection models, are used to accurately identify moisture content and the specific locations of the moisture on an entire surface of a veneer sheet or other wood product and provide moisture level prediction data for the veneer sheet or other wood product. Based on the moisture level prediction data for a given wood product, one or more actions are taken with respect to wood product to ensure the wood product is put to the most efficient, effective, and valuable use.

Near InfraRed NIR technology, including NIR cameras and detectors, and one or more visual cameras are used to generate superimposed image data representing a visual/NIR composite image of wood product and correlating moisture levels with physical features of the surfaces of the wood product. By analyzing the visual/NIR composite image represented by superimposed image data, moisture pockets near an open physical feature that, absent the presence open physical feature would be a problem, can be identified and ignored. Based on the identified moisture levels at various locations in a given wood product, and the proximity of physical features to the identified moisture locations, one or more actions are taken with respect to wood product to ensure the wood product is put to the most efficient, effective, and valuable use.

The present invention provides a conveyor belt tracking system for a dryer having a web of a mesh material having a protrusion extending along the length proximal one lateral edge and above a flat surface and a first generally cylindrical roller having a three-tiered slot for receiving the protrusion and two flanking shallow tracks for receiving base flanges.