A substrate processing apparatus includes a substrate rotating unit 11 configured to hold and rotate a substrate 3; a processing liquid supplying unit 13 configured to supply a processing liquid to the substrate; and a replacement liquid supplying unit 14 configured to supply, to the substrate, a replacement liquid with which the processing liquid supplied from the processing liquid supplying unit is replaced. While the replacement liquid supplying unit 14 supplies the replacement liquid to the substrate, the processing liquid supplying unit 13 supplies the processing liquid to a position on the substrate positioned at an outer peripheral side thereof than a supply position of the replacement liquid to form a liquid film of the processing liquid. It is possible to maintain a state in which the entire surface of the substrate is covered with the liquid film without increasing consumption amount of the replacement liquid.

Various embodiments of methods and devices for drying coated stents in an oven are described herein.

A dehydrating apparatus suitable for dehydrating food and other biomass products comprises a dehydrating chamber, a vacuum assembly, a magnetron assembly, an infrared heating assembly, a heated air circulation assembly, and a controller. The magnetron assembly is electromagnetically coupled to the dehydrating chamber and is operable to transmit microwave energy into the dehydrating chamber. The vacuum assembly is fluidly coupled to the dehydrating chamber and is operable to reduce the air pressure within the dehydrating chamber. The infrared heating assembly is thermally coupled to the dehydrating chamber and is operable to radiate infrared energy into the dehydrating chamber. The heated air circulation assembly is fluidly coupled to the dehydrating chamber and is operable to circulate heated air within the dehydrating chamber. The controller is communicative with and programmed to operate the magnetron assembly, vacuum assembly, infrared heating assembly and heated air circulation assembly to first reduce pressure within the chamber, then simultaneously transmit microwave energy, radiate infrared energy, and circulate heated air inside the dehydrating chamber upon specific dried product drying procedure.