A continuous-flow dryer for drying a material by hot air is provided with a first and a second section, through which the material flows successively in a transport direction. It includes a fresh air supply device, an exhaust air recirculation device for removing exhaust air and for recirculating exhaust air as supply air, and a heat exchanger, through which fresh air and exhaust air are led, for transferring waste heat of the exhaust air into the fresh air. With the exhaust air recirculation device a first part of the exhaust air is removed from the first section and recirculated directly into the first section. Furthermore, a second part of the exhaust air is removed from the first section, led through the heat exchanger, and recirculated as supply air into the first section. The fresh air supply device supplies fresh air as supply air into the second section.

A continuous-flow dryer for drying a material by means of hot air is provided with a fresh air supply device for supplying fresh air as supply air, an exhaust air recirculation device for removing exhaust air and for recirculating exhaust air as supply air, and a heat exchanger, through which fresh air on the one hand and exhaust air on the other hand are led, for transferring waste heat of the exhaust air into the fresh air. According to the invention, the removed exhaust air is supplied at the bottom into the heat exchanger.

A continuous-flow dryer for drying a material by means of hot air is provided with a fresh air supply device for supplying fresh air as supply air, an exhaust air recirculation device for removing exhaust air and for recirculating exhaust air as supply air, and a heat exchanger, through which fresh air on the one hand and exhaust air on the other hand are led, for transferring waste heat of the exhaust air into the fresh air. According to the invention, the removed exhaust air is supplied at the bottom into the heat exchanger.

The present invention relates to an electrode mounting unit comprising: a mounting member comprising a horizontal plate, a vertical plate disposed on a top surface of the horizontal plate, and a shaft which is fixed to the vertical plate and into which an electrode roll is fitted to be mounted; and an unwinding prevention member disposed between the electrode wound around the electrode roll and the horizontal plate to support the electrode wound around the electrode roll so as to prevent the electrode wound around the electrode roll from being unwound.

The present invention relates to an electrode mounting unit comprising: a mounting member comprising a horizontal plate, a vertical plate disposed on a top surface of the horizontal plate, and a shaft which is fixed to the vertical plate and into which an electrode roll is fitted to be mounted; and an unwinding prevention member disposed between the electrode wound around the electrode roll and the horizontal plate to support the electrode wound around the electrode roll so as to prevent the electrode wound around the electrode roll from being unwound.

An improved ventilated locker includes a pair of sidewalls and a a back wall connecting the sidewalls. A plurality of compartments is defined between the sidewalls, including at least an upper compartment and a lower compartment. A plenum is disposed adjacent the back wall, the plenum configured for connection to an existing HVAC system. At least one ventilation grille is carried by the back wall in fluid communication with at least one of the plurality of compartments and with the plenum. At least one circulation fan is disposed in one of the plurality of compartments to circulate air from the ventilation grilles through the plurality of compartments.

An improved ventilated locker includes a pair of sidewalls and a a back wall connecting the sidewalls. A plurality of compartments is defined between the sidewalls, including at least an upper compartment and a lower compartment. A plenum is disposed adjacent the back wall, the plenum configured for connection to an existing HVAC system. At least one ventilation grille is carried by the back wall in fluid communication with at least one of the plurality of compartments and with the plenum. At least one circulation fan is disposed in one of the plurality of compartments to circulate air from the ventilation grilles through the plurality of compartments.

The present invention provides a drying device and a drying method using the same. The drying device comprises a drying portion and a carrying portion, the carrying portion is used for carrying a substrate formed with a film layer to be dried, and the drying portion is arranged to face the film layer to be dried so as to dry the film layer to be dried.

The present invention provides a drying device and a drying method using the same. The drying device comprises a drying portion and a carrying portion, the carrying portion is used for carrying a substrate formed with a film layer to be dried, and the drying portion is arranged to face the film layer to be dried so as to dry the film layer to be dried.

Methods and apparatus for cleaning tooling parts in a substrate processing tool are provided herein. In some embodiments, a method of cleaning tooling parts in a substrate processing tool includes placing one or more dirty tools on a holder in a bonding chamber of a multi-chamber processing tool; transferring the holder from the bonding chamber to a cleaning chamber of the multi-chamber processing tool; cleaning the one or more dirty tools in the cleaning chamber to produce one or more cleaned tools; inspecting the one or more cleaned tools in an inspection chamber of the multi-chamber processing tool; and transferring the one or more cleaned tools to the bonding chamber