A blank heating device having a heating furnace is provided and includes a plurality of heating members that heat a blank and a support fixture disposed within the heating furnace to support the blank. Further a transporting component is disposed beneath the support fixture and integrally displaces the support fixture and the blank to increase heating density of the blank. Consequently, a divisional heating occurs based on a size of the blank, which is a material for hot stamping, to improve heating density of the blank. Accordingly, marketability of a material is improved and a preheating time and heat loss is minimized. As a result, work convenience is improved and a consumption amount of energy is reduced.

A multi-chamber furnace for processing at least 100 substrates is provided. Reactor housings define a plurality of laterally spaced reactor chambers that are individually configured to accommodate up to about 50 substrates. Substrate holders correspond to the reactor chambers, and are configured to support and vertically stack substrates arranged in the corresponding reactor chambers. Heaters correspond to the reactor chambers and are configured to heat the corresponding reactor chambers. A method for batch processing substrates using the multi-chamber furnace is also provided.

A multi-chamber furnace for processing at least 100 substrates is provided. Reactor housings define a plurality of laterally spaced reactor chambers that are individually configured to accommodate up to about 50 substrates. Substrate holders correspond to the reactor chambers, and are configured to support and vertically stack substrates arranged in the corresponding reactor chambers. Heaters correspond to the reactor chambers and are configured to heat the corresponding reactor chambers. A method for batch processing substrates using the multi-chamber furnace is also provided.