The present invention generally describes apparatuses and methods used to perform an annealing process on desired regions of a substrate. In one embodiment, pulses of electromagnetic energy are delivered to a substrate using a flash lamp or laser apparatus. The pulses may be from about 1 nsec to about 10 msec long, and each pulse has less energy than that required to melt the substrate material. The interval between pulses is generally long enough to allow the energy imparted by each pulse to dissipate completely. Thus, each pulse completes a micro-anneal cycle. The pulses may be delivered to the entire substrate at once, or to portions of the substrate at a time. Further embodiments provide an apparatus for powering a radiation assembly, and apparatuses for detecting the effect of pulses on a substrate.

Systems and methods are provided for a high performance heater. In an embodiment, the high performance heater comprises a first stackable tray comprising a first alignment pin that insulates a first heating element disposed in the first stackable tray; a second stackable tray comprising a second alignment pin that insulates a second heating element disposed in the second stackable tray, wherein a top of the first alignment pin fits in to a cut out of a bottom of the second alignment pin when the first and second stackable trays are stacked, and wherein the first and second stackable trays comprise one or more materials, an outer diameter and an inner diameter, and wherein an area between the outer diameter and the inner diameter of the stackable trays comprises at least one cut out portion that allows expansion of the material(s) when the high performance heater is at high temperatures.

Systems and methods are provided for a high performance heater. In an embodiment, the high performance heater comprises a first stackable tray comprising a first alignment pin that insulates a first heating element disposed in the first stackable tray; a second stackable tray comprising a second alignment pin that insulates a second heating element disposed in the second stackable tray, wherein a top of the first alignment pin fits in to a cut out of a bottom of the second alignment pin when the first and second stackable trays are stacked, and wherein the first and second stackable trays comprise one or more materials, an outer diameter and an inner diameter, and wherein an area between the outer diameter and the inner diameter of the stackable trays comprises at least one cut out portion that allows expansion of the material(s) when the high performance heater is at high temperatures.

A process for producing high-purity magnesium by means of distillation at reduced pressure, characterized in that, the high-purity magnesium condenses in the liquid state, whereby the starting material in the form of a magnesium-containing melt is present together with the upper region of a condensation vessel in the upper region of a retort, whereby the retort consist of a material that releases no volatile impurities into the magnesium steam, whereby the upper region of the retort is brought to a temperature above the boiling point of magnesium, within the limits of two level lines, and is then held constant, such that steam rises from the boiling magnesium-containing metal melt and fills the interior of the upper region of the retort, whereby the steam infiltrating the upper region of the condensation vessel condenses below the lower level line and collects as high-purity melt in the lower region of the condensation vessel, and whereby in order to prevent contaminated melt that drops from the region above the upper level line from reaching the opening of the condensation vessel, this is protected by a cover, which conveys the impure magnesium back again into the melt.

A process for producing high-purity magnesium by means of distillation at reduced pressure, characterized in that, the high-purity magnesium condenses in the liquid state, whereby the starting material in the form of a magnesium-containing melt is present together with the upper region of a condensation vessel in the upper region of a retort, whereby the retort consist of a material that releases no volatile impurities into the magnesium steam, whereby the upper region of the retort is brought to a temperature above the boiling point of magnesium, within the limits of two level lines, and is then held constant, such that steam rises from the boiling magnesium-containing metal melt and fills the interior of the upper region of the retort, whereby the steam infiltrating the upper region of the condensation vessel condenses below the lower level line and collects as high-purity melt in the lower region of the condensation vessel, and whereby in order to prevent contaminated melt that drops from the region above the upper level line from reaching the opening of the condensation vessel, this is protected by a cover, which conveys the impure magnesium back again into the melt.

A device for tempering an object includes a chamber for receiving the object, wherein the chamber is surrounded by a chamber casing, a base element and a cover element, a heating element, a rotor for circulating a first gas, wherein the rotor is arranged in the chamber, and a rotor drive with which the rotor is made to rotate. The heating element is formed by the rotor with the rotor drive.

A device for tempering an object includes a chamber for receiving the object, wherein the chamber is surrounded by a chamber casing, a base element and a cover element, a heating element, a rotor for circulating a first gas, wherein the rotor is arranged in the chamber, and a rotor drive with which the rotor is made to rotate. The heating element is formed by the rotor with the rotor drive.

An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. At least the transparent plate positioned between the infrared heating elements and the underside of a wafer is mounted for rotation with the spin chuck. Alternatively, the transparent plate is part of a housing that encloses the infrared heating elements and that rotates with the spin chuck as the heating elements are stationary relative thereto.

An apparatus for treating a disc-shaped article comprises a spin chuck and at least three individually controllable infrared heating elements. The infrared heating elements are mounted in a stationary manner with respect to rotation of said spin chuck. At least the transparent plate positioned between the infrared heating elements and the underside of a wafer is mounted for rotation with the spin chuck. Alternatively, the transparent plate is part of a housing that encloses the infrared heating elements and that rotates with the spin chuck as the heating elements are stationary relative thereto.

A process for producing high-purity magnesium by distillation at reduced pressure, which includes providing an apparatus having a retort formed from a material inert with respect to magnesium and an upper region defined by two vertically spaced level lines, a condensation vessel having a lower region and an upper region extending into the upper region of the retort, wherein the retort and condensation vessel are coupled to one another by an opening arranged in the upper region of the condensation vessel; providing a magnesium-containing metal melt to the retort at a level below the gap; and heating and maintaining the upper region of the retort at a temperature above the boiling point of magnesium to fill the retort with steam, thereby delivering a high purity melt into the condensation vessel via the opening.