A sintering furnace can include an outer shell defining an internal volume a reactive agent inlet configured to introduce a reactive agent into the internal volume; an insulation chamber within the outer shell; and a retort configured to retain an object. A method of operating a sintering furnace can include sintering a part precursor within a retort arranged within a chamber, wherein the chamber defines an intermediate volume between the retort and the chamber, wherein a sintering byproduct is oxidized within the intermediate volume.

Systems and methods for thermally processing composite components are provided. In one exemplary aspect, a system includes a thermal system, a mover device, and a control system. The system also includes a plurality of vessels in which one or more components may be placed. The vessels are similarly shaped and configured. A vessel containing the one or more components therein may be mounted into a chamber defined by the thermal system during thermal processing. The thermal system and vessels include features that allow components to be thermally processed, e.g., compacted, burnt-out, and densified via a melt-infiltration process, a polymer impregnation and pyrolyzing process, or a chemical vapor infiltration process. utilizing the same thermal system and common vessel design. The control system may control the thermal system and mover device to automate thermal processing of the composite components.

An apparatus for treating a substrate are provided. The apparatus includes a chamber having a treatment space therein, a substrate support unit to support the substrate in the treatment space, and a heater unit to heat the substrate supported by the substrate support unit. The substrate support unit includes a support plate having a seating surface, a support protrusion provided to protrude from the seating plate and to directly support the substrate, and a sensor provided to the support protrusion to measure a temperature of the substrate.

Systems and methods for thermally processing composite components are provided. In one exemplary aspect, a system includes a thermal system, a mover device, and a control system. The system also includes a plurality of vessels in which one or more components may be placed. The vessels are similarly shaped and configured. A vessel containing the one or more components therein may be mounted into a chamber defined by the thermal system during thermal processing. The thermal system and vessels include features that allow components to be thermally processed, e.g., compacted, burnt-out, and densified via a melt-infiltration process, a polymer impregnation and pyrolyzing process, or a chemical vapor infiltration process. utilizing the same thermal system and common vessel design. The control system may control the thermal system and mover device to automate thermal processing of the composite components.

A sintering furnace can include an outer shell defining an internal volume a reactive agent inlet configured to introduce a reactive agent into the internal volume; an insulation chamber within the outer shell; and a retort configured to retain an object. A method of operating a sintering furnace can include sintering a part precursor within a retort arranged within a chamber, wherein the chamber defines an intermediate volume between the retort and the chamber, wherein a sintering byproduct is oxidized within the intermediate volume.

A sintering furnace can include an outer shell defining an internal volume a reactive agent inlet configured to introduce a reactive agent into the internal volume; an insulation chamber within the outer shell; and a retort configured to retain an object. A method of operating a sintering furnace can include sintering a part precursor within a retort arranged within a chamber, wherein the chamber defines an intermediate volume between the retort and the chamber, wherein a sintering byproduct is oxidized within the intermediate volume.

A low thermal conductivity fixed thermocouple with a heat sink package specifically designed for electrically heated vacuum furnaces having an overall cylindrical hot zone diameter of 36 inches or less, and preferably containing all metal reflective radiation shields or graphite felt insulation packages that experience high conductive losses in the low temperature ranges during vacuum heating which result in large discrepancies between the furnace temperature readings and the actual workload temperature.

A low thermal conductivity fixed thermocouple with a heat sink package specifically designed for electrically heated vacuum furnaces having an overall cylindrical hot zone diameter of 36 inches or less, and preferably containing all metal reflective radiation shields or graphite felt insulation packages that experience high conductive losses in the low temperature ranges during vacuum heating which result in large discrepancies between the furnace temperature readings and the actual workload temperature.

A heating furnace includes: a heating furnace main body that includes an accommodation chamber capable of accommodating a heating target object; a heat source capable of heating an inside of the accommodation chamber to an annealing point; a gas supply source that is arranged outside the heating furnace main body; and a pipeline that includes a pipeline main body that is arranged inside the accommodation chamber, and that is heated by the heat source, the pipeline main body being configured to retain a gas supplied from the gas supply source and heat the gas to the annealing point, and a discharge outlet that is formed on an end portion of the pipeline main body, and that is opened inside the accommodation chamber, the discharge outlet being configured to discharge the gas that is heated to the annealing point, to the inside of the accommodation chamber.

A heating furnace includes: a heating furnace main body that includes an accommodation chamber capable of accommodating a heating target object; a heat source capable of heating an inside of the accommodation chamber to an annealing point; a gas supply source that is arranged outside the heating furnace main body; and a pipeline that includes a pipeline main body that is arranged inside the accommodation chamber, and that is heated by the heat source, the pipeline main body being configured to retain a gas supplied from the gas supply source and heat the gas to the annealing point, and a discharge outlet that is formed on an end portion of the pipeline main body, and that is opened inside the accommodation chamber, the discharge outlet being configured to discharge the gas that is heated to the annealing point, to the inside of the accommodation chamber.