A method for the recrystallisation annealing of a non-grain-oriented electric strip (2) in a continuous annealing and coating line (1) is presented. Therein, the electric strip (2) is heated in an induction furnace (5) to a temperature of at least 680° C. at a heating rate of at least 80 K/s and then, in an optional second continuous furnace (8), to a temperature of at least 820° C. at a heating rate of at most 20 K/s. The electric strip (2) is initially heated before the induction furnace (5) via a first continuous furnace (3) to a temperature of at least 300° C. at a heating rate of at most 60 K/s.

Embodiments of the disclosure relate to an apparatus and method for annealing one or more semiconductor substrates. In one embodiment, a processing chamber is disclosed. The processing chamber includes a chamber body enclosing an internal volume, a substrate support disposed in the internal volume and configured to support a substrate during processing, a gas panel configured to provide a processing fluid into the internal volume, and a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid. The temperature-controlled fluid circuit includes a gas conduit fluidly coupled to a port on the chamber body at a first end and to the gas panel at a second end.

Embodiments of the disclosure relate to an apparatus and method for annealing one or more semiconductor substrates. In one embodiment, a processing chamber is disclosed. The processing chamber includes a chamber body enclosing an internal volume, a substrate support disposed in the internal volume and configured to support a substrate during processing, a gas panel configured to provide a processing fluid into the internal volume, and a temperature-controlled fluid circuit configured to maintain the processing fluid at a temperature above a condensation point of the processing fluid. The temperature-controlled fluid circuit includes a gas conduit fluidly coupled to a port on the chamber body at a first end and to the gas panel at a second end.

The invention relates to a device for heat treatment of a product, including: an enclosure comprising a casing made of refractory material; a screw mounted to turn in the casing about a geometric axis of rotation in order to move the product between an inlet of the casing and an outlet of the casing, the screw furthermore forming a heating means for heat treatment of the product by supplying electricity to the screw. According to the invention, the device comprises at least one heating element for heating the casing in operation, the heating element being arranged inside at least one of the walls of the casing. The invention also relates to a corresponding method.

The invention relates to a device for heat treatment of a product, including: an enclosure comprising a casing made of refractory material; a screw mounted to turn in the casing about a geometric axis of rotation in order to move the product between an inlet of the casing and an outlet of the casing, the screw furthermore forming a heating means for heat treatment of the product by supplying electricity to the screw. According to the invention, the device comprises at least one heating element for heating the casing in operation, the heating element being arranged inside at least one of the walls of the casing. The invention also relates to a corresponding method.

Provide is an annealing furnace, a method of constructing the annealing furnace, and a structure for prefabrication which make it possible to use a prefabricated construction method for the annealing furnace even in a long length. The annealing furnace includes a case, and plural rows of rolls at the top and the bottom of the inside of the case, the rolls being configured to convey a steel strip. The annealing furnace includes: horizontally parting faces where a body of the furnace can be horizontally divided, wherein each of horizontally parted sections parted by the horizontally parting faces further has vertically parting faces where the horizontally parted sections can be divided in a direction vertical to a longitudinal direction of the body.

A vertical-type firing apparatus for a positive electrode material for a secondary battery, for vertically moving and firing the positive electrode material for the secondary battery, comprises: a vertical-type firing furnace including an exhaust part, an air supply part, and a firing space positioned between the exhaust part and the air supply part; and a heater for heating the firing space of the vertical-type firing furnace, wherein the firing space includes a temperature-raising space, a cooling space, and a temperature-maintaining space located between the temperature-raising space and the cooling space, and the temperature of the temperature-maintaining space is higher than the temperature of the temperature-raising space and the temperature of the cooling space.

A vertical-type firing apparatus for a positive electrode material for a secondary battery, for vertically moving and firing the positive electrode material for the secondary battery, comprises: a vertical-type firing furnace including an exhaust part, an air supply part, and a firing space positioned between the exhaust part and the air supply part; and a heater for heating the firing space of the vertical-type firing furnace, wherein the firing space includes a temperature-raising space, a cooling space, and a temperature-maintaining space located between the temperature-raising space and the cooling space, and the temperature of the temperature-maintaining space is higher than the temperature of the temperature-raising space and the temperature of the cooling space.

An apparatus for calcining a secondary battery cathode material includes: a calcination furnace including an inner space that includes a temperature rising space, a temperature maintaining space, and a cooling space, which sequentially communicate; a plurality of rollers for transferring a sagger, in which a cathode material is accommodated, from the temperature rising space to the cooling space via the temperature maintaining space; a plurality of heaters arranged along the inner space; a plurality of gas feeding parts for feeding gas to the inner space; and a plurality of exhaust parts for exhausting gas from the inner space, wherein the cross-sectional area of the temperature maintaining space is smaller than the cross-sectional area of the temperature rising space and the cross-sectional area of the cooling space.

An apparatus for calcining a secondary battery cathode material includes: a calcination furnace including an inner space that includes a temperature rising space, a temperature maintaining space, and a cooling space, which sequentially communicate; a plurality of rollers for transferring a sagger, in which a cathode material is accommodated, from the temperature rising space to the cooling space via the temperature maintaining space; a plurality of heaters arranged along the inner space; a plurality of gas feeding parts for feeding gas to the inner space; and a plurality of exhaust parts for exhausting gas from the inner space, wherein the cross-sectional area of the temperature maintaining space is smaller than the cross-sectional area of the temperature rising space and the cross-sectional area of the cooling space.