The invention relates to a furnace for the treatment of material, in particular for the oxidative treatment of fiber material, in particular for producing carbon fibers, comprising a housing (12) having, a housing inner space (14), which is gas-tight with the exceptions of passage areas (18, 20) for the fibers (22), In the housing hiller space (14) of the housing (12), a process chamber (28) is located. A hot working atmosphere (40) can be generated by means of an atmosphere device (42). The atmosphere device (42) comprises a flow system (46) having flow channels (48), which are arranged in the housing inner space (14) each defining, one flow chamber (50), and are provided with flow passages such that the respective flow chambers (50) are fluidically connected to the process chamber (28) in such a way that hot working atmosphere (40) can he delivered to the process chamber (28) in at least one main flow direction (44) and can be discharged from the process chamber (28). A revision system (72) is provided, through which flow chambers (50) of flow channels (48) are accessible through the housing (12).

A multi-chamber type heating unit to heat a blank includes: a lower housing unit; an intermediate housing unit installed in an upper portion of the lower housing unit; and an upper housing unit installed in an upper portion of the intermediate housing unit. A plurality of intermediate housings are stacked to form the intermediate housing unit, and a heating unit to heat a blank is installed in each of the intermediate housings. Moreover, the intermediate housings are formed in the shape in which upper and lower portions thereof are opened, and an opening is formed in the front for a door to be inserted thereinto, and door sealing units provided on the intermediate housing portion and provided to seal the door when the door is closed.

A process chamber for carrying out thermal processes in the manufacture of an electronic assembly with at least one opening for moving in and/or removing the electronic assembly; a supply of a protective gas; a controllable protection device arranged at the opening to reduce escape of the protective gas from the process chamber; and a control that can control the protection device such that, when the electronic assembly passes through the opening, an opening cross section of the opening is provided, which corresponds to the cross section of the electronic assembly.

Provided is a multi-chamber type heating unit which occupies a small installation space and can effectively perform a heating process of a blank. The multi-chamber type heating unit to heat a blank comprises: a lower housing unit; an intermediate housing unit installed in an upper portion of the lower housing unit; and an upper housing unit installed in an upper portion of the intermediate housing unit. A plurality of intermediate housings are stacked to form the intermediate housing unit, and a heating unit to heat a blank is installed in each of the intermediate housings. Moreover, the intermediate housings are formed in the shape in which upper and lower portions thereof are opened, and an opening is formed in the front for a door to be inserted thereinto.

In a door structure of a heat treatment furnace performing a heat treatment of a workpiece, there are provided: a first opening member and a second opening member in which workpiece passing ports where the transferred workpiece passes are formed; and a sheet shutter, the sheet shutter is provided with a winding portion and a shutter portion, the shutter portion is disposed between the first opening member and the second opening member, the shutter portion is provided with a first sheet portion which covers the workpiece passing port of the first opening member and a second sheet portion which covers the workpiece passing port of the second opening member at a time that the shutter portion is closed, and it is configured that a gas storage portion is formed between the first opening member and the second opening member at the time that the shutter portion is closed.

The present invention provides an electric furnace including: a cylindrical furnace wall; a furnace cover that is provided at an upper end of the furnace wall; and a furnace bottom that is provided at a lower end of the furnace wall and includes a deep bottom portion and a shallow bottom portion as a region having a height of 150 mm to 500 mm from a deepest point of the deep bottom portion, in which a slag pouring port into which molten slag or a solidified slag lump is capable of being poured from a slag transport container directly or through a tilting trough is provided, the slag pouring port overlaps the shallow bottom portion in a plan view, and the area ratio of the shallow bottom portion to the furnace bottom in a plan view is 5% to 40%.

A system and/or method for heat treatment of substrates. The system includes a housing that defines a heating chamber and a door assembly that encloses an opening of the heating chamber. The door assembly may be opened and closed. When opened, the door assembly defines a loading slot for loading substrates into and unloading substrates from the heating chamber. The door assembly is coupled to a first actuator and a control unit is coupled to the actuator to move the door assembly between a plurality of loading positions. The system may also include a loading assembly mounted to the door assembly to facilitate insertion and removal of substrates from the heating chamber.

A process chamber for carrying out thermal processes in the manufacture of an electronic assembly with at least one opening for moving in and/or removing the electronic assembly; a supply of a protective gas; a controllable protection device arranged at the opening to reduce escape of the protective gas from the process chamber; and a control that can control the protection device such that, when the electronic assembly passes through the opening, an opening cross section of the opening is provided, which corresponds to the cross section of the electronic assembly.

The analyzer of the present invention is specifically adapted to provide moisture determinations for foods and other agricultural material. It allows the operator to introduce a precise weight of sample into a crucible in a closed furnace in a controlled environment through an access port in the furnace cover. The access port in the cover can be tapered to allow easy access to an underlying aligned crucible and allow an operator to add and remove sample material from the crucible until a precise desired sample weight is reached as measured by a balance within the furnace. The access port is enclosed by an insulated cover after the samples are sequentially placed in the crucibles.

Batch furnace assembly for processing wafers, comprising a process chamber housing defining a process chamber and having a process chamber opening, a wafer boat housing defining a water boat chamber, a door assembly, a differential pressure sensor, and a controller. The door assembly has a closed position in which it closes off the process chamber opening. The door assembly defines in a closed position a door assembly chamber having a purge gas inlet for supplying purge gas to the door assembly chamber for gas sealingly separating the process chamber from the wafer boat chamber. The differential pressure sensor assembly fluidly connects to the door assembly chamber and is configured to determine a pressure difference between a pressure in the door assembly chamber and a reference pressure in a reference pressure chamber. The controller is configured to establish whether the pressure difference is in a desired pressure range.