The present disclosure is related to a method of producing a fired ceramic article. The method may include: heating a ceramic green body in a kiln, and controlling oxygen concentration in the kiln such that the oxygen concentration swings during the heating of the ceramic green body.

A method of manufacture for a carbon/carbon part including a method to remove contamination from an intermediate product of the carbon/carbon part and furnace utilizing a gaseous reducing agent hydrogen gas to reduce the contaminates, thereby causing the contaminates to transition to a gaseous state at relatively lower temperatures. A method to remove contamination from an intermediate product of the carbon/carbon part and furnace utilizing hydrogen gas to reduce the contaminates, thereby causing the contaminates to transition to a gaseous state at relatively lower temperatures.

A method of making a hot surface igniter is described. A silicon carbide composition that includes both fines fraction and a coarse fraction is sintered in a nitrogen and argon reducing atmosphere in a manner that controls the incorporation of nitrogen with in the lattice of recrystallized silicon carbide. The controlled incorporation of nitrogen in the lattice provides enhanced control over heating and electrical properties, while simultaneously achieving a lower surface area fully recrystallized structure for oxidation resistance and long service life.

In an aspect, a method of manufacturing a high purity copper-based alloy comprises providing in a melting furnace a feedstock and melting the feedstock. The method additionally includes bubbling an inert gas into the molten copper-based alloy to form the high purity copper-based alloy. Aspects are also directed to an apparatus and a method of fabricating an apparatus for manufacturing the high purity copper-based alloy.

A method of manufacture for a carbon/carbon part including a method to remove contamination from an intermediate product of the carbon/carbon part and furnace utilizing a gaseous reducing agent hydrogen gas to reduce the contaminates, thereby causing the contaminates to transition to a gaseous state at relatively lower temperatures. A method to remove contamination from an intermediate product of the carbon/carbon part and furnace utilizing hydrogen gas to reduce the contaminates, thereby causing the contaminates to transition to a gaseous state at relatively lower temperatures.

In a known method for treating pourable, inorganic grain, a heated rotary tube is used that rotates about an axis of rotation and surrounds a treatment chamber that is divided into a plurality of treatment zones by means of separating elements. The grain is supplied to the treatment chamber at a grain inlet side and is transported, in a grain transport direction, to a grain outlet side and is exposed to a treatment gas in the process. In order, proceeding herefrom, to allow for reliable and reproducible thermal treatment of pourable inorganic grain, in particular SiO.sub.2 grain in the rotary kiln, in a manner having low and effective consumption of treatment gas, it is proposed for spent treatment gas to be suctioned out of a reaction zone of the treatment chamber, by a gas manifold that rotates about the longitudinal axis thereof.

A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.

A conveying system (1) for conveying a material along a conveying path. The system (1) includes a system housing (3) having a conveying chamber (5), in which the conveying path is arranged, and having at least one secondary chamber (6 to 8), which is connected to the conveying chamber (5) by at least one passage opening and has a fluid atmosphere that is physically and/or chemically different from the fluid atmosphere in the conveying chamber (5). The at least one passage opening (9, 10) and the fluid atmospheres in the conveying chamber (5) and the at least one secondary chamber (6 to 8) set a defined fluid flow in the system housing (3).

A substrate processing apparatus includes: a carrier storage rack configured to place and store a carrier that accommodates a substrate; a gas supply configured to supply an inert gas into the carrier placed on the carrier storage rack; and a controller configured to control whether to supply the inert gas into the carrier based on at least one of carrier information and substrate information.

A process chamber system adapted for both vacuum process steps and steps at pressures higher than atmospheric pressure. The chamber door may utilize a double door seal which allows for high vacuum in the gap between the seals such that the sealing force provided by the high vacuum in the seal gap is higher than the opposing forces due to the pressure inside the chamber and the weight of the components.