Glass melting furnaces include a melting vessel that includes a floor, a feeding mechanism configured to feed raw materials into the melting vessel, a heating mechanism configured to convert raw materials fed into the melting vessel into molten glass, and a cooling mechanism extending within the floor and configured to flow a cooling fluid therethrough.

A heat exchange module installed to be in constant communication with a high-pressure vessel forming a heating space (S2) under high-temperature and high-pressure process conditions, comprises: a main body unit (500) forming a heat exchange space (S4) therein; a flow path forming unit (600) provided to form a flow path in which exhaust gas discharged from the high-pressure vessel flows within the heat exchange space (S4); and a heat medium piping unit (700), at least a portion of which is installed within the heat exchange space (S4), with a heat medium flowing therein for direct or indirect heat exchange with the exhaust gas.

Proposed are a chilling unit, a heat treatment apparatus including same, and a heat treatment method. More particularly, proposed is a technology capable of rapidly and effectively lowering the temperature of a heating plate by bringing a heat exchange medium of a chilling unit into contact with the heating plate and then circulating a refrigerant after performing a heat treatment process of a substrate through a heat treatment apparatus.