A combustion system includes a perforated flame holder positioned within a combustion volume, a nozzle configured to emit a fuel stream toward the perforated flame holder, an oxidant source configured to introduce an oxidizer fluid into the combustion volume, and a flue gas recirculation (FGR) channel having a first end in fluid communication with the combustion volume downstream of the perforated flame holder and a second end in fluid communication with the oxidant source. A controller is configured to hold a combustion parameter within a selected range of values by regulating a quantity of flue gas flowing in the FGR channel.

Extreme-temperature valves that can be used in the production of activated carbon. An exemplary system includes a kiln reactor having an exhaust port, a thermal oxidizer having an input port, and a valve. The kiln reactor outputs exhaust gasses through the exhaust port. The thermal oxidizer includes an input port. The valve is connected between the exhaust port and the input port. The valve includes packing material that is at least partially thermally isolated from the exhaust gasses.

The invention relates to a tunnel oven for baking food product, said tunnel oven comprises: a tunnel oven entrance, a tunnel oven exit and a baking zone inside said tunnel oven, a transport device configured for transporting food products through the tunnel oven entrance, the backing zone and the tunnel oven exit, a heating source arranged in the baking zone, a pretreatment zone, arranged between the baking zone and the tunnel oven entrance, which comprises an injector configured for injecting a pretreatment agent into the pretreatment zone, an air exhaust for extracting air from the baking zone, comprises a flow regulator and a sensor for detecting the presence and/or an amount of pretreatment agent in the air exhaust, and a control device configured for controlling the flow regulator in the air exhaust to reduce the rate of air extraction when an amount of pretreatment agent is detected by the sensor.

A gas management assembly for a substrate processing apparatus includes: an exhaust module including a basic exhaust line that is formed to exhaust a chamber gas containing a process gas supplied to a chamber of the substrate processing apparatus to a discharge system; a recovery connection module including a recovery exhaust line that is branched from the basic exhaust line and formed to exhaust the chamber gas to a recovery system; and a control module configured to perform automatic switching of an exhaust path of the chamber gas from one of the basic exhaust line and the recovery exhaust line to the other based on at least one of an operation mode of the substrate processing apparatus, a pressure of the chamber, or a pressure of the recovery exhaust line.