A radiator of the thermosiphon type comprising a collector situated in the lowest part of the radiator, and adapted to contain an intermediate vector fluid, an external heat source, placed within the collector, wherein the intermediate vector fluid is adapted to evaporate on contact with a hot surface of the external heat source, at least one vertical tube containing therein one or more channels (4) connected to the collector and communicating with the same, characterized in that said collector and said channels are dimensioned so that each section thereof crossed by the intermediate vector fluid, excluding the thickness of the liquid film of moisture, has the smallest linear direction which is twice bigger than the diameter db of an intermediate fluid vapor bubble which, during operation, detaches itself from the hot surface of the external source during boiling of the intermediate fluid.

The invention relates to a cooling apparatus comprising a base plate for receiving a heat load from an electric component, an evaporator, a condenser, and a connecting piece for passing fluid from the evaporator to the condenser. In order to efficiently fill the evaporator, the cooling apparatus is provided with a pump for pumping fluid from the condenser to the evaporator.

A heating module for a substrate processing chamber includes heating lamps coupled to a reflector plate and a heat exchanger. The heat exchanger cools a gas within the heating module. A fan within the heating module circulates the gas through apertures in the reflector plate to cool the heating bulbs. The gas is cooled by the heat exchanger, and is recirculated. One or more shrouds directs the gas as the gas is being circulated.

A radiator includes a substrate cavity group and a cavity fin array Each cavity fin in the cavity fin array is communicated with a refrigerant air inlet channel of the substrate cavity group; and an inner wall of each cavity fin is provided with a flow guide wall having a preset incline angle structure. Hence, after a liquid working medium absorbs the heat generated by a heat source and is vaporized, the vaporized liquid working medium can pass through the refrigerant air inlet channel into an inner cavity of a cavity fin so as to perform heat exchange, and the use of a plurality of cavity fins can increase the area of heat exchange, thereby achieving efficient heat dissipation for a heat source.