There is provided a cryopump including a cryocooler, a cryopanel that is cooled by the cryocooler, a cryopump container that includes a container body, which accommodates the cryopanel, and a cryocooler accommodating tube of which one end is coupled to the container body and the other end is fixed to the cryocooler and into which the cryocooler is inserted, a vent valve for exhausting a fluid from the cryopump container, a first exhaust passage that includes a first exhaust port provided in the container body, is disposed outside the cryopump container, and connects the first exhaust port to the vent valve, and a second exhaust passage that includes a second exhaust port provided in the cryocooler accommodating tube, connects the second exhaust port to the vent valve, and merges with the first exhaust passage between the first exhaust port and the vent valve.

A displacer assembly includes a first displacer including a first displacer lower lid portion and extending along a displacer center axis, a second displacer including a second displacer upper lid portion and disposed so that the second displacer upper lid portion is adjacent to the first displacer lower lid portion along the displacer center axis, and a cross-shaped connector including a first connector pin and a second connector pin, and connecting the second displacer upper lid portion to the first displacer lower lid portion so that the second displacer is inclinable forward, rearward, rightward, and leftward with respect to the first displacer.

Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.

A cryopump includes: a first-stage target temperature selection unit which includes a normal target temperature for a normal mode of maintaining each of a first stage cryopanel and a second stage cryopanel at an extremely low temperature region, and a cool-down target temperature lower than the normal target temperature, for a cool-down mode of cooling each of the first stage cryopanel and the second stage cryopanel from room temperature to the extremely low temperature region, and selects the normal target temperature as a first-stage target temperature in a case where a current operation mode is the normal mode, and at least temporarily selects the cool-down target temperature as the first-stage target temperature in a case where the current operation mode is the cool-down mode; and a first-stage temperature control unit which controls a first-stage cryopanel temperature according to the selected first-stage target temperature.

A cryopump system includes a plurality of cryopumps, each cryopump including a rough valve connecting the cryopump to a common rough pump and a pressure sensor measuring a pressure in the cryopump, and a controller that controls, for each cryopump, the rough valve based on a measured pressure from the pressure sensor such that the cryopump is decompressed to a first reference pressure by the common rough pump and thereafter a vacuum is maintained in the cryopump, and the cryopump is further decompressed to a second reference pressure lower than the first reference pressure by the common rough pump. The controller is configured to, based on the measured pressure from the pressure sensor of a first cryopump, open the rough valve of a second cryopump such that the second cryopump is decompressed to the first reference pressure while the vacuum is maintained in the first cryopump.

A cryopump includes a cryopump container, a pressure sensor that measures a pressure in the cryopump container and generates time-series pressure data indicating the measured pressure, a vent valve that is provided on the cryopump container, is electrically operable to open and close, and is capable of being mechanically opened by a differential pressure between inside and outside the cryopump container, and a controller that, during cryopump regeneration, detects stabilization of the measured pressure based on the time-series pressure data from the pressure sensor and controls the vent valve to open upon detection of the stabilization of the measured pressure.

A cryopump includes a cryopump flange for attachment to the flange on a gate valve, and an annular baffle that axially extends toward the gate valve from the cryopump flange such that the annular baffle forms an annular orifice in association with a valve plate component of the gate valve. The annular orifice may be defined between an upper surface of the annular baffle and the valve plate.

A cryopump includes an accommodation space for a condensed layer of gas, a first-stage cryopanel having an inner surface of the first-stage cryopanel disposed so as to surround the accommodation space, and a second-stage cryopanel disposed so as to be surrounded by the inner surface of the first-stage cryopanel together with the accommodation space. A first-stage heat load is incident on the inner surface of the first-stage cryopanel from outside the cryopump through an intake port, and the gas enters the accommodation space from outside the cryopump. The first-stage cryopanel is cooled to a temperature higher than a condensation temperature of the gas, the second-stage cryopanel is cooled to a temperature of the condensation temperature or less, and the condensed layer is deposited. The cryopump monitors the amount of condensed gas in the accommodation space based on a change in the first-stage heat load.

A method of monitoring the performance of a cryopump, the circuitry for monitoring the performance and the cryopump are disclosed. The method comprises: following completion of a regeneration cycle controlling said cryopump to perform a predetermined test routine for testing a performance of said cryopump under predetermined conditions; monitoring said cryopump during said predetermined test routine to collect data indicative of said performance of said cryopump; storing data collected during said monitoring.

A cryopump includes a cryopanel, and an adsorption area provided on the cryopanel and capable of adsorbing a non-condensable gas, in which the adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof. The adsorption area includes a non-combustible adsorbent containing silica gel as a main component thereof.