Disclosed herein is a cleaner having an improved structure configured to improve the cleaning performance. The cleaner comprises a suction unit provided inside a body. The suction unit includes an impeller configured to suction air by rotating about a shaft, and a diffuser configured to guide air discharged from the impeller. The impeller includes a hub, and a blade disposed on the hub, and provided with a leading edge disposed in an upstream side in a direction in which air introduced into the suction unit flows, and a trailing edge disposed in a downstream side in the direction in which the air introduced into the suction unit flows. The leading edge of the blade forms an inclination of 60 degrees or more and 80 degrees or less with respect to an axial direction.

A turbo molecular pump including multiple stages. At least one of the multiple stages of the rotor blades and the multiple stages of the stator blades is configured to satisfy any one of a first condition of Xout<Xc and Xin<Xc, a second condition of α.Math.Xc≥Xin>Xc>Xout where α=1.04, or a third condition of Xin<Xc<Xout≤β.Math.Xc where β=1.04. Xout, Xc and Xin being an inter-blade distance dived by a blade length, at an outer-diameter-side end portion, at an inner-diameter-side portion, and at an intermediate position of each blade, respectively.

A system comprises: a vacuum chamber disposed within a housing and having a vacuum port; a vacuum pump within the housing and having a gas inlet port that is fluidically coupled to the vacuum port; and a fluid circuit that comprises: one or more fluidic tubing lines, channels or conduits in thermal contact with a housing of the vacuum pump; a liquid pump fluidically coupled to an inlet of the one or more fluidic tubing lines, channels or conduits; and a heat exchanger having a heat exchanger inlet and a heat exchanger outlet, wherein the heat exchanger inlet is fluidically coupled to an outlet of the one or more fluidic tubing lines, channels or conduits and the heat exchanger outlet is fluidically coupled to the liquid pump. The fluid circuit may also include a portion that is in thermal contact with the vacuum chamber.

A flywheel device that includes a housing that surrounds a vacuum chamber, a flywheel rotor within the vacuum chamber, which rotates during normal operation of the flywheel, thus agitating residual gasses, an exhaust chamber that receives the exhaust gases from the vacuum chamber, and an annular shaped stationary element, within the vacuum chamber that includes scroll channels where some of the scroll channels have an intake port on an inner diameter of the stationary element and some of the scroll channels have an intake port on an outer diameter of the stationary element, and the scroll channels enable gasses to flow from the vacuum chamber, through the scroll channels, into the exhaust chamber.

A vacuum pump generally comprises a low pressure portion and a high pressure portion separated by a gas impermeable partition. Gas molecules exit the low pressure portion through an opening in the partition and passively impinge on a featureless rotatable surface in the high pressure portion. A drive rotates the rotatable surface with tangential velocity in the supersonic range at multiple times the most probable velocity of the impinging gas molecules. Impinging gas molecules are ejected outwardly from the periphery of the rotatable surface generating a substantial net outward flow of gas and reducing the pressure in the low pressure portion. The vacuum pump is effective to reduce the pressure in the low pressure portion to a target minimum pressure without using seals to prevent gas molecules from leaking back to the low pressure portion and without using blades or vanes to actively impact the gas molecules.

A drag pump for pumping gas and a set of vacuum pumps including the drag pump are disclosed. The drag pump comprises: a rotor configured to rotate within a stator component and to drive a gas to be pumped from a gas inlet to a gas outlet; magnetic bearings for rotatably mounting the rotor within the pump; wherein at least a portion of the rotor and stator component configured to contact the gas to be pumped are configured for operation at temperatures above 130° C.

A vacuum pump and a sensor target are provided that are inexpensive and widen the linearity range of the sensor sensitivity as compared to a configuration in which a ferromagnetic material is used for the sensor target of a displacement sensor, and also reduce the possibility of touch down even when a disturbance occurs. An axial displacement sensor 109 includes a shaft 109A, which is extended through and fixed to the central section of a holder 5 holding an axial electromagnet 106, and a bobbin 109B, which is coupled to the upper end of the shaft 109A and around which a coil 7 is wound. A shaft end portion 113B, which has the shape of a small-diameter column, projects from the lower end of a rotor shaft 113 and is separated from the coil 7 by a gap 2. An external thread is formed on the outer circumference of the shaft end portion 113B so that a nut 19, which has an internal thread on the inner side, is engaged with the shaft end portion 113B. The area where the internal thread is formed does not extend over the entire thickness of the nut 19 and extends only partially. That is, the nut 19 has a threaded hole 19A opening only at the upper end. The nut 19 is made of a single material of low-carbon steel.

An electromagnet unit, a magnetic bearing device, and a vacuum pump with which displacement of a rotating body in a radial direction can be detected with precision. An upper electromagnet unit includes: radial electromagnets for supporting a rotor in a radial direction without contact; radial sensors for detecting displacement of the rotor in the radial direction; and a core around which coils are wound. Two radial electromagnets that are adjacent to each other in a circumferential direction of the core are disposed such that adjacent magnetic poles belonging respectively to the two radial electromagnets are homopolar, and a low magnetic flux interference region is formed between the two radial electromagnets. Each of the radial sensors is disposed in the low magnetic flux interference region.

A high-vacuum pump comprises a plurality of pumping stages, each comprising a plurality of mutually cooperating elements, including at least one rotating rotor element and one stationary stator element. At least one of the elements of at least one of the pumping stages is made of a plastic material reinforced with short fibres, dispersed in chaotic and substantially random manner inside the matrix of plastic material. Use of a plastic material reinforced with short fibres allows making the at least one element by injection molding and allows manufacturing the vacuum pump with considerably reduced production costs if compared to the conventional vacuum pumps.

A vacuum rotor system is provided comprising a hollow rotor with a rotor jacket that is open at both ends perpendicular to the axis of rotation and with at least two hubs that are connected to the inside of the rotor jacket and that are suitably mounted in appropriate bearings so that the rotor can rotate. A machine housing that encloses the rotor and that has at least one gas outlet opening to discharge gases from the machine housing. A vacuum system that is connected to the gas outlet opening and that has at least one forepump for generating a fore-vacuum pressure in the machine housing. At least one first gas removal device with a gas pick-up opening is arranged in the machine housing between the hub and the appertaining open end of the rotor jacket.