A vacuum pump has, in at least either a stator disc to be disposed or a rotating disc to be disposed, a Siegbahn type molecular pump portion in which a spiral-shaped groove with a ridge portion and a root portion is engraved (disposed), and is structured to ensure high conductance at a returning flow channel formed at the outer periphery (outside) of the Siegbahn type molecular pump portion. This structure is created by a communicating portion (a groove portion, a slit) formed on each rotating disc, or an oblique plate disposed on the stator disc and the communicating portion formed on the rotating disc. The communicating portion, groove portion, and slit are configured to have concave shapes, a concave portion is provided by engraving a groove radially inward from an outer diameter portion (toward a side of a shaft of the vacuum pump) in the rotating disc (or stator disc).

A flywheel device that includes a housing that surrounds a vacuum chamber, a flywheel rotor within the vacuum chamber, which rotates during normal operation of the flywheel, thus agitating residual gasses, an exhaust chamber that receives the exhaust gases from the vacuum chamber, and an annular shaped stationary element, within the vacuum chamber that includes scroll channels where some of the scroll channels have an intake port on an inner diameter of the stationary element and some of the scroll channels have an intake port on an outer diameter of the stationary element, and the scroll channels enable gasses to flow from the vacuum chamber, through the scroll channels, into the exhaust chamber.

A vacuum pump with abatement function which can prevent contamination of a process chamber without allowing products generated by exhaust gas treatment to flow back to the process chamber, and can reduce the amount of gas to be treated without allowing a purge gas and a diluent gas to be contained in an exhaust gas, and thus can achieve energy saving by reducing the amount of energy required for the exhaust gas treatment in an abatement part is disclosed. The vacuum pump with abatement function includes a vacuum pump to which at least one abatement part for treating an exhaust gas is attached. The vacuum pump comprises a dry vacuum pump having a main pump capable of evacuating gas from an atmospheric pressure and a booster pump for increasing an evacuation speed of the main pump, and the at least one abatement part for treating the exhaust gas is connected between the main pump and the booster pump.

A fan motor comprises a motor mount, a motor part accommodated in an inner space of the motor mount, and an impeller disposed above the motor mount. The motor mount defines: an air discharge opening configured to discharge air discharged from the impeller to an outer space of the motor mount; a cooling flow path outlet disposed at the upper side of the motor mount at a position between the impeller and the air discharge opening; and a first cooling flow path inlet disposed at a position below the air discharge opening and the cooling flow path outlet. The fan motor further includes a guide that is configured to direct, to an upward direction, at least a portion of air that is discharged through the air discharge opening and introduced to the inner space through the first cooling flow path inlet.

A pump unit includes a pump housing having a valve assembly positioned on a wall thereof and adapted to be coupled to an inflatable device, and an air control assembly that is housed inside the pump housing. The air control assembly includes an impeller section that houses an impeller, and has an air inlet and an air outlet. The air control assembly further includes a motor housing that houses a motor, the motor housing having an air vent that communicates the interior of the motor housing with the air inlet and the air outlet, and a vent opening that communicates the interior of the motor housing to the environment. The air outlet is aligned with the valve assembly when the pump unit is operated in the inflation mode, and the air inlet is aligned with the valve assembly when the pump unit is operated in the deflation mode.

A turbomolecular pump is provided. In one arrangement, a stator stack and rotor stack have corresponding conical or frustum shapes that allow for adjusting the clearance between the stator vanes and rotor vanes of the pump to provide adjustable compression ratios and/or to adjust clearances. In another arrangement, the actuator or drive mechanism of the pump is formed from coils attached to the upper stage of rotor vanes which are controlled to interact with a plurality of stationary magnets attached to the housing of the pump to rotate the stator stack. In another arrangement, a control system of the pump utilizes the coils of the rotor drive to dynamically balance the pump during operation.

A fan assembly for a robot vacuum cleaner and a robot vacuum cleaner are provided. The fan assembly includes an electric motor, a stator impeller, a rotor impeller and a fan cover. The stator impeller defines a shaft hole, the electric motor is mounted on a side of the stator impeller, and an output shaft of the electric motor passes through the shaft hole. The fan cover is mounted on another side of the stator impeller, and an end surface of the fan cover away from the stator impeller defines an air inlet. The rotor impeller is mounted to the output shaft of the electric motor and located between the fan cover and the stator impeller.

The present invention provides an energy-efficient method and apparatus that can achieve exhaust gas abatement with a minimum use of diluent nitrogen gas. More specifically, the present invention is directed to a method and apparatus for exhaust gas abatement under reduced pressure, in which an exhaust gas supplied from an exhaust gas source via a vacuum pump is decomposed by heat of a high-temperature plasma under a reduced pressure.

To Provide a vacuum pump having a high exhausting ability and low power consumption. In the a vacuum pump according to the present invention, an outer diameter of a spiral plate disposed on a downstream side is set smaller than an outer diameter of a spiral plate disposed on an upstream side. Specifically, a stepped portion is provided by setting a blade length of the spiral plate disposed on the downstream side shorter than a blade length of the spiral plate disposed on the upstream side. In addition, in a spacer provided in the stepped portion, a relief formation portion is provided to allow a contact surface in contact with an upstream spacer (i.e., spacer opposed to the spiral plate having the unreduced outer diameter) and a contact surface in contact with a downstream spacer (i.e., spacer opposed to the spiral plate having the reduced outer diameter) in the stepped portion to have an equal inner diameter. This configuration allows the vacuum pump having a high exhausting ability and low power consumption to be provided.

A motor assembly includes an impeller inside a motor assembly housing, a motor including a rotor including a rotor shaft rotatable with the impeller and a pair of stators disposed facing each other across the rotor while electromagnetically interacting with the rotor to rotate the rotor shaft, and a motor housing inside the motor assembly housing that fixes the pair of stators relative to the rotor.