A vacuum pump which can prevent lowering of an exhaust performance of the vacuum pump, even if a linked-type thread groove spacer is fastened by a fixing bolt, is provided.

The linked-type thread groove spacer according to an embodiment of the present invention includes a structure for linking a Siegbahn pump portion and a thread-groove pump portion. When this linked-type thread groove spacer is to be fastened, a countersunk hole is provided in advance in an exhaust channel portion, and the linked-type thread groove spacer is fastened to a base by a fixing bolt. As a result, a head part of the fixing bolt does not protrude to the exhaust channel, and the head part of the fixing bolt does not make resistance against an exhaust gas. Thus, lowering of the exhaust performance of the vacuum pump can be suppressed.

Bobbins of an annular electromagnet each have a bobbin body that has a coil wire wound around an outer periphery thereof and is attached to a respective tooth of an annular stator core by having the corresponding tooth inserted therethrough. A first flange portion in a rectangular hallow shape is provided on an end surface of the bobbin body near the center of the annular stator core and a second flange portion in a rectangular hallow shape is provided on the other end surface of the bobbin body. A coil winding amount increasing means is formed at least on the first flange portion or the second flange portion and increases the amount of winding of the coil wire wound around the bobbin body.

To provide a vacuum pump that is capable of efficiently cooling gas and requires less maintenance. The vacuum pump includes: a main body casing having an inlet portion and an outlet portion for gas; a turbomolecular pump mechanism portion in which a stator blade and a rotor blade are formed; a thread groove pump mechanism portion provided at a downstream side of the turbomolecular pump mechanism portion; a cooling trap portion that cools the gas led out from the turbomolecular pump mechanism portion and causes the gas to flow out to a side of the thread groove pump mechanism portion; and a partition wall that guides the gas led out from the turbomolecular pump mechanism portion to the cooling trap portion.

A turbo-molecular pump comprises multiple stages of rotor blades and multiple stages of stator blades. When m is a positive real number equal to or less than a total number of stages of the rotor blades and greater than one and K is a natural number which is not a multiple of m in a case where m is a natural number and is a natural number in a case where m is not the natural number, the multiple stages of the rotor blades include a rotor blade at an inter-blade angle α1, and a rotor blade of which reference position is phase-shifted from a reference position of the rotor blade at the inter-blade angle α1 by an angle α1.Math.K/m.

An oil feed assembly for a vacuum pump comprises: an oil feeder located for feeding oil to one side of a bearing of the vacuum pump; an oil sump located on the one side of the bearing and configured to receive excess oil from the oil feeder; and a venting bypass conduit fluidly coupled with the oil sump and with another side of the bearing, the venting bypass conduit having an inlet located at an elevated position above a floor of the oil sump and configured to convey gas from the oil sump to the another side of the bearing. In this way, the venting bypass conduit provides an alternative path which allows gas within the oil sump to escape during pump-down while preventing oil within the oil sump from escaping with the gas travelling through the venting bypass conduit.

A rotation mechanism (20) of a vacuum pump (100) includes a magnetic bearing unit (21) having a first outer diameter (91), the magnetic bearing unit (21) being operable as a first radial magnetic bearing (40), and a motor unit (22) provided on a side of a second end (11b) of a rotary shaft (11) relative to the magnetic bearing unit, the motor unit (22) having a second outer diameter (92) larger than the first outer diameter, the motor unit (22) being operable as both a motor (30) and a second radial magnetic bearing (50).

A processing chamber and method of etching a semi-conductor substrate are presented. The processing chamber is symmetric, with the centerlines of a chuck and stem of a stage to retain a semi-conductor substrate aligned with a centerline of a passage in a core of a pump used to evacuate the processing chamber and with a center-line of a gas port through which gas is introduced to the processing chamber. The stem extends through the passage and a spiral groove is formed in the passage in only one of the stem or an inner surface of the core to provide pumping action to counter back streaming of the gas from an exhaust of the pump in an intermediate and viscous flow regime inside a gap between the stem and the core.

To provide a vacuum pump which separates and constructs an inlet port flange and a casing (outer cylinder) as two components to reduce weight while retaining required strength and which is consequently capable of reducing manufacturing cost. In a vacuum pump, an inlet port flange and a casing (outer cylinder) are separated from each other and constructed as different members. The inlet port flange uses stainless steel as a material thereof and the casing (outer cylinder) use aluminum as a material thereof. The components are fastened to each other by bolts and sealed by an O-ring in order to maintain a vacuum property during assembly of the vacuum pump. Accordingly, a weight of the vacuum pump can be reduced while maintaining strength of the inlet port flange.

An analysis device of a vacuum pump discharging gas from a vacuum container in which a process for a target object is performed, comprises: an information generation section configured to generate information on a load on the vacuum pump due to an accumulated substance based on an integrated value of a physical quantity regarding rotary drive of a rotor of the vacuum pump in at least part of a period of the process.

A vacuum pump comprises: a rotor; a stator; a rolling bearing configured to support a rotor shaft provided at the rotor; and a vibration sensor configured to detect vibration of the rolling bearing.