A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.

A rotor of a vacuum pump has first and second cylindrical bodies and a connecting portion for connecting the end portions of the cylindrical bodies together. The first cylindrical body has a plurality of rotor blades on an outer circumferential surface thereof, and configures a blade exhaust portion when the rotor blades are arranged along an axial center of the vacuum pump alternately with a plurality of stator blades. The second cylindrical body configures a threaded groove exhaust portion when a threaded groove exhaust flow passage is formed at least on an inner circumference of the second cylindrical body. In this rotor, a balancing portion for the rotor is provided on an inner circumferential surface of the first cylindrical body or the connecting portion, and mass adding means is provided in the balancing portion.

Provided is a vacuum pump suitable for preventing the backflow of a particle from the vacuum pump toward a vacuum chamber. The vacuum pump includes a turbomolecular pump portion exhausting gas molecules by a rotor blade and a stator blade, and a thread groove pump portion provided downstream of the turbomolecular pump portion and exhausting the gas molecules by a thread groove flow path formed by a cylindrical rotary component (cylindrical portion) and a cylindrical stator component (thread groove pump portion stator) provided on an outer periphery of the cylindrical rotary component, wherein a bounce back prevention means for preventing a particle from bouncing from the thread groove pump portion back toward the turbomolecular pump portion is provided downstream of the turbomolecular pump portion.

An apparatus for kinetic energy storage includes an electrical machine operable at least in one of motor mode and generator mode, and at least one energy recovery system for an intermediate storage of a produced kinetic energy and which converts the kinetic energy into an electrical energy, with, the at least one energy recovery system having at least one flywheel body formed as a rotor, and a stator and with at least one of the rotor and the stator being formed as at least one vacuum pump stage.

A vacuum pump lubricant supply system has a lubricant reservoir and a wicking element. The body portion has opposed major surfaces and a finger. The lubricant reservoir has a major surface engaging one of the opposed major surfaces of the body portion so that lubricant can migrate through the engaging major surfaces into the body portion. The finger projects from the body portion to engage a lubricant transfer device provided on a rotor shaft so that lubricant can wick from the body portion to the lubricant transfer device via the finger. The body portion has an edge provided with a cut-out so that the major surface of the body portion that engages the major surface of the lubricant container has a total surface area that is less than the total surface area of the major surface of the lubricant container.

A vacuum pump includes a pump inlet, a pump outlet, a rotor rotatable about an axis of rotation, at least one process gas pump stage for conveying a process gas present at the pump inlet from the pump inlet to the pump outlet, a motor space, and a drive motor which is arranged in the motor space, is configured for rotationally driving the rotor and which has a motor stator, wherein at least one gas path is provided for the process gas from the pump inlet to the pump outlet which leads through the motor space and which leads at least sectionally along the motor stator or through the motor stator.

A vacuum pump and a vacuum pump rotor blade that can effectively limit deposition of reaction products are provided. The vacuum pump includes a rotating shaft held rotationally, a drive mechanism for the rotating shaft, a first rotor blade made of a first material, a second rotor blade made of a second material having higher heat resistance than the first material, and disposed further toward a downstream side than the first rotor blade, and a casing enclosing the rotating shaft, the first rotor blade, and the second rotor blade. The second rotor blade is disposed, via a heat insulating portion, on the first rotor blade.

A turbo-molecular pump comprises a rotor having rotor blades and a cylindrical section; stationary blades; a plurality of spacers; a stator arranged with a gap from the cylindrical section, a base; a spacer cooling section arranged between a lowest spacer of the stacked spacers and the base, the spacer cooling section having a first flow passage through which coolant flows; a heater for heating the stator; a temperature sensor for detecting a temperature of the stator; a base cooling section for cooling the base, the base cooling section having a second flow passage connected in series to the first flow passage; and a temperature controller for controlling circulation of coolant to the first flow passage and the second flow passage connected in series and energization of the heater to maintain the temperature of the stator at a predetermined temperature.

One or more through-holes communicating with one or more of the plurality of screw grooves are formed at the cylindrical stator, a total of circumferential dimensions of the one or more through-holes formed at the cylindrical stator is set at equal to or greater than a circumferential dimension of an outer peripheral surface region of the cylindrical stator facing the second suction port, and a gas path through which inflow gas through the second suction port is guided to a screw groove is provided, the one or more through-holes penetrating through the screw groove and the screw groove being apart from the region facing the second suction port.

A vacuum pump having excellent exhaust performance is provided. The vacuum pump includes a Siegbahn type exhaust mechanism portion 201 in which a Siegbahn spiral groove portion 262 is provided in at least either rotating discs 220a to 220c or stator discs 219a and 219b, and a Holweck type exhaust mechanism portion 301 in which a thread groove 131a is provided in at least either a cylindrical portion 102d of a rotating body 103 or a threaded spacer 131, and the Holweck type exhaust mechanism portion 301 is located on the downstream side of the Siegbahn type exhaust mechanism portion 201. The Holweck type exhaust mechanism portion 301 has a flow passage depth that is continuously constant at a predetermined depth H2, and the Siegbahn type exhaust mechanism portion 201 includes a region that is continuously constant at the predetermined depth H2 from a predetermined position.