A vacuum pump includes a housing having a suction port, a rotor housed in the housing and rotationally driven to suck gas through the suction port and pump the gas, and a lid member that covers a recess of the rotor. The lid member has a cone shape having a vertex on a side close to the suction port and having a bottom on a side close to the rotor. The generatrix of the cone shape includes a first curved portion having such a curve that an angle between a tangent to the generatrix and a gas flow direction increases from a vicinity of the vertex to a vicinity of the bottom.

To reduce deformation of a stator in an upper-lower direction. A vacuum pump includes a rotor housed in a housing and rotationally driven, plural stages of rotor blades provided in the rotor, and plural stages of stators, each of which is disposed between adjacent ones of the plural stages of rotor blades. The stator has an inner peripheral rib, an outer peripheral rib, and a stator blade connecting the inner peripheral rib and the outer peripheral rib, and is housed in the housing in a state of the outer peripheral rib being sandwiched between spacers. At least part of the outer peripheral rib of the stator is provided with a deformable portion configured to allow deformation of the inner peripheral rib and/or the stator blade in a radial direction.

A vacuum pump, which prevents adhesion of products even when a rotating body is stopped, by heating the rotating body using an alternating current (AC) magnetic field. Two heating electromagnets are disposed facing each other across a rotating body. The heating electromagnets receive a supply of AC electric current from a heating electric power source. Excitation of the heating from this AC electric current generates an AC magnetic field. The generated AC magnetic field intersects with the rotating body. Eddy current is generated around the intersecting AC magnetic field. The rotating body is heated by this eddy current. This heating enables deposition of products to be prevented even further, and realize improved pump operation efficiency.

To obtain a vacuum pump which appropriately performs temperature management of a gas flow path and reduces restrictions on a gas flow rate attributable to the temperature management. A cooling tube performs temperature adjustment of a gas flow path. A first temperature sensor is arranged at a position closer to the gas flow path than the cooling tube, a second temperature sensor is arranged at a position closer to the cooling tube than the gas flow path, and a control apparatus controls, based on a sensor signal of the first temperature sensor and a sensor signal of the second temperature sensor, (an on-off valve of) the cooling tube so that a temperature of the gas flow path approaches a predetermined gas flow path target temperature.

A method of setting up an electrical motor speed control in a fluidic system including a turbomachine, an electric motor having a number p of pole pairs rotating the turbomachine, a variable speed drive controlling the speed of the electric motor, a sensor measuring a parameter H, Q of the turbomachine, and a system controller receiving the sensor's measurements and controlling the operation of the fluidic system. The method includes driving the electric motor at a predetermined electrical frequency, Fe, such that the turbomachine rotates with a controlled rotational speed N, determining the point of intersection of the system curve of the fluidic system and of the performance curve of the turbomachine to obtain the turbomachine's nominal operating point, and thus the nominal value, Hn, Qn, of the turbomachine parameter, measuring, with the sensor, the current value, H, Q of the turbomachine parameter, calculating the controlled rotational speed N by inputting, into the Affinity Laws, the determined nominal value, Hn, Qn, the measured current value, H, Q, and the known nominal rotational speed, Nn, of the turbomachine, determining the number p of pole pairs of the electric motor based on the ratio of the electrical frequency Fe and the calculated controlled rotational speed N, and adapting the setup of the variable speed drive to match the determined number p of pole pairs.

Vacuum pump, in particular a turbomolecular vacuum pump, comprising a housing and a rotor shaft disposed in the housing and rotatably supported by at least on permanent magnet bearing. Therein, the magnet bearing is arranged at one end of the rotor shaft and wherein the magnet bearing comprises a static bearing element and a rotated bearing element radially arranged next to each other. An eddy current damper is provided having a conductive disk connected to the static bearing element.

To reduce deformation of a stator in an upper-lower direction. A vacuum pump includes a rotor housed in a housing and rotationally driven, plural stages of rotor blades provided in the rotor, and plural stages of stators, each of which is disposed between adjacent ones of the plural stages of rotor blades. The stator has an inner peripheral rib, an outer peripheral rib, and a stator blade connecting the inner peripheral rib and the outer peripheral rib, and is housed in the housing in a state of the outer peripheral rib being sandwiched between spacers. At least part of the outer peripheral rib of the stator is provided with a deformable portion configured to allow deformation of the inner peripheral rib and/or the stator blade in a radial direction.

A support structure for a rotor shaft of a turbomolecular pump, comprising a central section for coupling to the rotor shaft of the turbomolecular pump, the central section having a centre point through which a rotation axis of the rotor shaft passes when the rotor shaft is coupled to the central section, and a leg extending from the central section, wherein the leg is for coupling the central section to a housing of the turbomolecular pump, wherein the leg extends tangentially relative to the central section.