A rotary machine includes a first impeller which rotates about an axis integrally with a rotating shaft, and a casing which covers the rotating shaft and the first impeller. The first impeller includes a circular-disk-shaped first disk part centered on the axis, a plurality of blade parts which extend from a surface facing a first side of the first disk part in an axial direction toward the first side in the axial direction and disposed at intervals in a circumferential direction, and an extension shaft which extends from a surface facing a second side of the first disk part in the axial direction toward the second side in the axial direction centered on the axis. An end portion of the extension shaft on the second side in the axial direction is connectable to an end portion of the rotating shaft on the first side in the axial direction.

A compressor system includes a gas compressor with dry gas seals about a driveshaft. The compressor system also includes a fugitive gas system having a gas conduit in fluid communication with a collection cavity in a collector coupled to the gas compressor to receive fugitive gas leaked through a pressurized gas leakage path. The fugitive gas system may be structured for flaring the gas, and includes a pressure control system with an accumulator tank, and a vent line for venting gas pressure and having a backpressure regulator therein. Fugitive combustible gas is conveyed through a flow restriction orifice downstream of the compressor.

The present disclosure includes sealing systems comprising a secondary seal with one or more of a knife edge seal and a discourager. The secondary seal may act to isolate an interface between an inner and outer shaft and a bearing compartment. The inner and outer shafts may be high pressure compressor and low pressure turbine shafts, respectively.

A turbo-molecular pump comprises: a shaft to be rotatably driven by a motor; a pump rotor; multiple bolts penetrating the pump rotor from a pump suction port side to fasten the pump rotor to a pump suction port side end portion of the shaft; and a seal member configured to seal a clearance between fastening surfaces of the pump rotor and the shaft or a clearance between each bolt and the pump rotor.

A housing of a fluid energy machine which extends along a longitudinal axis, includes a housing casing which extends axially, a housing cover for closing off a housing opening axially on the face side of the housing casing, an annular insert which extends in the housing in a circumferential direction and which bears against the housing casing and against the housing cover, a first seal between the housing cover and the housing casing. To save radial installation space, a second seal is between the housing casing and the annular insert, and a third seal is between the housing cover and the annular insert.

The present invention provides a vacuum pump that prevents invasion of foreign matter, such as rust and particles caused by a process gas, during the process of manufacturing a semiconductor wafer, and a flexible cover and a rotor that are used in the vacuum pump. A vacuum pump has a casing that has a gas inlet port and a gas outlet port, a rotor that has a recessed portion opened toward the gas inlet port and is fastened to a rotor shaft by a bolt disposed in the recessed portion. The recessed portion is provided with a flexible cover that has an outer peripheral portion supported on an end surface of the rotor that opposes the gas inlet port, and a central portion caved in the recessed portion of the rotor, the flexible cover covering the recessed portion by elastically deforming into a convex shape toward the recessed portion.

The shaft seal arrangement for a rotating turbomachine shaft having a rotation axis, comprises a rotor part and a stationary part. A dry gas seal is further provided, in combination with a cooling fluid volume arranged for receiving a cooling fluid and in heat exchange relationship with the dry gas seal. A venting arrangement collectively vents exhaust cooling fluid and dry sealing gas from the shaft seal arrangement.

A bearing structure includes: a shaft; an oil-impregnated bearing that supports the shaft to be rotatable and includes a first sintered metal material having a first density; a bearing holder that supports an outer circumferential surface of the oil-impregnated bearing; and a seal member that is provided at an opening of the bearing holder, wherein the shaft is provided with an annular groove having a side surface portion that has an outer diameter that decreases as the side surface portion separates away from one end surface of the oil-impregnated bearing, and wherein the seal member includes a second sintered metal material having a second density that is lower than the first density of the first sintered metal material.

A shaft seal structure including a housing having an insertion hole through which a shaft can be inserted, a cylindrical thin plate that is flexible and placed in the insertion hole, and a support arranged between the housing and the thin plate. The support elastically supports the thin plate. The thin plate has an inner peripheral surface facing an outer peripheral surface of the shaft with a gap formed between the inner peripheral surface and the shaft. The support prevents a fluid from flowing in a direction along the shaft.

A sealing device includes: a sealing body that seals a gap between a rotor and the sealing body; a fastening bolt that fixes the sealing body to a stator; and a bolt sealing part that seals a gap around the fastening bolt. The sealing body includes: a facing surface that faces a fixing surface of the stator facing in an axial direction; and a body through-hole that penetrates the sealing body and opens on the facing surface. The bolt sealing part is disposed in a gap between a head portion and the inner peripheral surface of the body through-hole, or between the fixing surface and the facing surface.