Provided is a rotation drive device that has a wide rotary driving range, e.g. a rotary driving range of 0°-180°. Disclosed is a rotation drive device comprising a crank member rotatable about a crank axis, a first cylinder having a first piston and rotatable about a first cylinder rotation axis, and a second cylinder having a second piston and rotatable about a second cylinder rotation axis. The crank member and the first piston are coupled for rotation about a first piston rotation axis spaced from the crank axis. The crank member and the first piston are coupled for rotation about a second piston rotation axis spaced from the crank axis.

A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).

The subject matter of this specification can be embodied in, among other things, a controller apparatus that includes a digital controller configured to provide a digital position signal based on a setpoint and a differential analog feedback signal, and a converter circuit configured to provide a differential analog electrohydraulic servo valve position control signal based on the digital position signal, and provide the differential analog feedback signal based on the differential analog electrohydraulic servo valve position control signal.

A torque motor for use in a servovalve wherein only two holes must be provided through each of the pole pieces in order to assemble the torque motor together. The torque motor comprises first and second opposing pole pieces, first and second permanent magnets positioned between the first and second pole pieces; an armature comprising a magnetic plate and a flapper, the magnetic plate being positioned between the first and second permanent magnets, the flapper being connected at one end to the magnetic plate; and further comprising: first and second fastening means each extending through the first pole piece, the armature and the second pole piece to thereby fasten the torque motor together.

A torque motor for use in a servovalve wherein only two holes must be provided through each of the pole pieces in order to assemble the torque motor together. The torque motor comprises first and second opposing pole pieces, first and second permanent magnets positioned between the first and second pole pieces; an armature comprising a magnetic plate and a flapper, the magnetic plate being positioned between the first and second permanent magnets, the flapper being connected at one end to the magnetic plate; and further comprising: first and second fastening means each extending through the first pole piece, the armature and the second pole piece to thereby fasten the torque motor together.

The invention relates to a method for generating a control variable trajectory for an actuator so as to influence an input variable of a system, wherein a set point is supplied to the output variable of the system of a trajectory planning procedure, which from the set point generates a trajectory of constrained input values for a filter integrator chain and a trajectory of flat desired states, wherein the trajectory of constrained input values and the trajectory of flat desired states are supplied to a flatness-based feedforward control procedure that generates therefrom the control variable trajectory for the actuator, wherein in the trajectory planning procedure so as to generate the trajectory of constrained input values at least one constraint is applied in dependence upon the trajectory of flat desired states.

A servo valve unit capable of precisely controlling the position of a pneumatic cylinder that does not require a servo amplifier and a small sized and/or high durability servo valve unit are disclosed. The servo valve unit comprises a unit body having a first end portion and a second end portion, a first valve portion, a second valve portion, a first seal member that opens and closes the first valve portion, a second seal member that opens and closes the second valve portion, a first drive mechanism that drives the first seal member by a first electric pulse, a second seal member that drives the second seal member by a second electric pulse, a supply flow path that extends between the first end and the first valve, an exhaust flow path that extends between the second end and the second valve, a common flow path connected to the supply flow path and the exhaust flow path via the first valve portion and the second valve portion, and a drive flow path connected to the pneumatic actuator. The first drive mechanism and the second drive mechanism are arranged in a drive mechanism arrangement portion located between the first end portion and the second end portion. The drive air flow path can branch from a branch portion located between the drive mechanism arrangement portion and the first end portion and extends to the first end portion. Alternatively drive air flow path can branch from the common flow path from a branch portion located between the drive mechanism arrangement portion and the second end portion and extends to the second end portion.

A servo valve unit capable of precisely controlling the position of a pneumatic cylinder that does not require a servo amplifier and a small sized and/or high durability servo valve unit are disclosed. The servo valve unit comprises a unit body having a first end portion and a second end portion, a first valve portion, a second valve portion, a first seal member that opens and closes the first valve portion, a second seal member that opens and closes the second valve portion, a first drive mechanism that drives the first seal member by a first electric pulse, a second seal member that drives the second seal member by a second electric pulse, a supply flow path that extends between the first end and the first valve, an exhaust flow path that extends between the second end and the second valve, a common flow path connected to the supply flow path and the exhaust flow path via the first valve portion and the second valve portion, and a drive flow path connected to the pneumatic actuator. The first drive mechanism and the second drive mechanism are arranged in a drive mechanism arrangement portion located between the first end portion and the second end portion. The drive air flow path can branch from a branch portion located between the drive mechanism arrangement portion and the first end portion and extends to the first end portion. Alternatively drive air flow path can branch from the common flow path from a branch portion located between the drive mechanism arrangement portion and the second end portion and extends to the second end portion.

A method for controlling movement of a movably mounted body (14) of a mechanical system (2, 56, 62). The mechanical system (2, 6, 62) includes a drive unit (4, 64), which is operated by a medium, and also a control valve (20, 22). The movably mounted body (14) is driven by the drive unit (4, 64). A drive movement of the drive unit (4, 64) is controlled with the aid of the control valve (20, 22). In order to avoid or reduce excitation of undesired vibrations in the mechanical system (2, 56, 62), it is proposed that the control valve (20, 22) be actuated using a control signal (u(t)) which comprises a first and also a further switching pulse (S.sub.1, S.sub.3) each having a prespecified pulse duration. The pulse duration of the first switching pulse (S.sub.1) is equal to the pulse duration of the further switching pulse (S.sub.3). A time difference (Δt.sub.1-3) between the start of the first pulse (S.sub.1) and the start of the further switching pulse (S.sub.3) is matched to a natural period duration of the mechanical system (2, 56, 62).

A method for controlling movement of a movably mounted body (14) of a mechanical system (2, 56, 62). The mechanical system (2, 6, 62) includes a drive unit (4, 64), which is operated by a medium, and also a control valve (20, 22). The movably mounted body (14) is driven by the drive unit (4, 64). A drive movement of the drive unit (4, 64) is controlled with the aid of the control valve (20, 22). In order to avoid or reduce excitation of undesired vibrations in the mechanical system (2, 56, 62), it is proposed that the control valve (20, 22) be actuated using a control signal (u(t)) which comprises a first and also a further switching pulse (S.sub.1, S.sub.3) each having a prespecified pulse duration. The pulse duration of the first switching pulse (S.sub.1) is equal to the pulse duration of the further switching pulse (S.sub.3). A time difference (Δt.sub.1-3) between the start of the first pulse (S.sub.1) and the start of the further switching pulse (S.sub.3) is matched to a natural period duration of the mechanical system (2, 56, 62).