A hydraulic stage includes a hydraulic element located between and sealing a first and second chamber, wherein the first chamber comprises at least one aperture through which fluid is arranged to flow into or out of the first chamber; and at least one piezoelectric element which is positioned adjacent to the at least one aperture and is arranged to deform in response to an applied potential difference such that it blocks or obstructs the at least one aperture to a varying degree according to the level of deformation, so as to control fluid flow into or out of the first chamber. The level of deformation of the piezoelectric element thus reduces or increases an effective size of the inlet or outlet aperture to which it is adjacent, restricting or permitting an increase in fluid flow accordingly.

An example robot includes a hydraulic actuator cylinder controlling motion of a member of the robot. The hydraulic actuator cylinder comprises a piston, a first chamber, and a second chamber. A valve system controls hydraulic fluid flow between a hydraulic supply line of pressurized hydraulic fluid, the first and second chambers, and a return line. A controller may provide a first signal to the valve system so as to begin moving the piston based on a trajectory comprising moving in a forward direction, stopping, and moving in a reverse direction. The controller may provide a second signal to the valve system so as to cause the piston to override the trajectory as it moves in the forward direction and stop at a given position, and then provide a third signal to the valve system so as to resume moving the piston in the reverse direction based on the trajectory.

An example robot includes a hydraulic actuator cylinder controlling motion of a member of the robot. The hydraulic actuator cylinder comprises a piston, a first chamber, and a second chamber. A valve system controls hydraulic fluid flow between a hydraulic supply line of pressurized hydraulic fluid, the first and second chambers, and a return line. A controller may provide a first signal to the valve system so as to begin moving the piston based on a trajectory comprising moving in a forward direction, stopping, and moving in a reverse direction. The controller may provide a second signal to the valve system so as to cause the piston to override the trajectory as it moves in the forward direction and stop at a given position, and then provide a third signal to the valve system so as to resume moving the piston in the reverse direction based on the trajectory.

The disclosed apparatus, systems and methods relate to a hydraulic control system, comprising, the control system having a control unit configured to be in operational communication with a plurality of gauge wheel assemblies, a plurality of cylinders in operational communication with the plurality of gauge wheel assemblies, and a plurality of position sensors in operational communication with the plurality of cylinders, wherein the control unit comprises a feedback position command loop configured to calculate cylinder position error and issue valve commands.

In some applications, a piston of a hydraulic actuator may move at high speeds, and large undesired forces may be generated if the piston reaches an end-stop of the hydraulic actuator at a high speed. The undesired forces may, for example, cause mechanical damage in the hydraulic actuator. A controller may receive information indicative of the piston reaching a first position at a first threshold distance from the end-stop, and, in response, may modify a signal to a valve assembly controlling flow of hydraulic fluid to and from the hydraulic actuator. Further, the controller may receive information indicative of the piston reaching a second position at a second threshold distance closer to the end-stop of the hydraulic actuator, and, in response, the controller may further modify the signal to the valve assembly so as to apply a force on the piston in a away from the end-stop.

In some applications, a piston of a hydraulic actuator may move at high speeds, and large undesired forces may be generated if the piston reaches an end-stop of the hydraulic actuator at a high speed. The undesired forces may, for example, cause mechanical damage in the hydraulic actuator. A controller may receive information indicative of the piston reaching a first position at a first threshold distance from the end-stop, and, in response, may modify a signal to a valve assembly controlling flow of hydraulic fluid to and from the hydraulic actuator. Further, the controller may receive information indicative of the piston reaching a second position at a second threshold distance closer to the end-stop of the hydraulic actuator, and, in response, the controller may further modify the signal to the valve assembly so as to apply a force on the piston in a away from the end-stop.

A stage assembly (10) includes a stage (14), and a fluid actuator assembly (24) that moves the stage (14). The fluid actuator assembly (24) includes a piston housing (32) that defines a piston chamber (34); (ii) a piston (36) that separates the piston chamber (34) into a first chamber (34A) and a second chamber (34B); (iii) a supply valve (38C) that controls the flow of the working fluid (40) into the first chamber (34A); and (iv) an exhaust valve (38D) that controls the flow of the working fluid (40) out of the first chamber (34A). The supply valve (38C) has a supply orifice (250G) having a supply orifice area, and the exhaust valve (38D) has an exhaust orifice (352G) having an exhaust orifice area. Moreover, the supply orifice area is different from the exhaust orifice area. Further multiple valves of different sizes can be used in combination for the supply and exhaust for each chamber (34A), (34B).

The invention relates to a method for generating a control variable trajectory for an actuator so as to influence an input variable of a system, wherein a set point is supplied to the output variable of the system of a trajectory planning procedure, which from the set point generates a trajectory of constrained input values for a filter integrator chain and a trajectory of flat desired states, wherein the trajectory of constrained input values and the trajectory of flat desired states are supplied to a flatness-based feedforward control procedure that generates therefrom the control variable trajectory for the actuator, wherein in the trajectory planning procedure so as to generate the trajectory of constrained input values at least one constraint is applied in dependence upon the trajectory of flat desired states.

An electropneumatic positioner for a pneumatic actuator to operate a control device of a processing plant can include two modular pneumatic slots and a pneumatic control output. The two modular pneumatic slots can engage with a respective modular pneumatic component. The two pneumatic slots and the pneumatic components can be modularly matched to one another such that their respective pneumatic interfaces merge into one another when a pneumatic slot is engaged. The pneumatic control output can output a pneumatic control pressure signal to the pneumatic actuator. The two modular pneumatic slots and the pneumatic control output can form a pneumatic series connection.

An electropneumatic positioner for a pneumatic actuator to operate a control device of a processing plant can include two modular pneumatic slots and a pneumatic control output. The two modular pneumatic slots can engage with a respective modular pneumatic component. The two pneumatic slots and the pneumatic components can be modularly matched to one another such that their respective pneumatic interfaces merge into one another when a pneumatic slot is engaged. The pneumatic control output can output a pneumatic control pressure signal to the pneumatic actuator. The two modular pneumatic slots and the pneumatic control output can form a pneumatic series connection.