A turbomachine includes a compressor section, a turbine section, and a rotary component. The rotary component is attached to and rotatable with a portion of at least one of the compressor section and the turbine section. The turbomachine additionally includes a seal having a gas bearing. The gas bearing defines an inner surface along a radial direction of the turbomachine, a high pressure end, and a low pressure end. The gas bearing supports the rotary component and also prevents an airflow from the high pressure end to the low pressure end between the rotary component and the inner surface of the gas bearing.

Embodiments of a stage for a turbomachine have been provided herein. In some embodiments, a stage for a turbomachine may include a bearing having a housing, the bearing defining an interior cavity; an outer ring disposed radially outward from the housing; and a plurality of airfoils disposed between the housing of the bearing and the outer ring.

A support table, a method of loading a substrate, a lithographic apparatus and a method of manufacturing a device using a lithographic apparatus are disclosed. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a bottom surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localized build-up of pressure within the recess. The localized build-up of pressure provides a localized gas cushioning effect during the lowering of the substrate,

A motor according to an embodiment of the present invention includes a rotary shaft; a rotor mounted on the rotary shaft; a stator surrounding an outer periphery of the rotor; an impeller mounted on the rotary shaft to be spaced apart from the rotor; a bearing housing positioned between the impeller and the rotor and formed with a through-hole through which the rotary shaft passes; and a gas bearing disposed in the bearing housing, wherein a thickness of the gas bearing is equal to or greater than 50% of a gap between an inner surface of the bearing housing and an outer peripheral surface of the rotary shaft and is equal to or less than 0.3 mm.

A support table for a lithographic apparatus, a method of loading a substrate, a lithographic apparatus and a method for manufacturing a device using a lithographic apparatus. In one arrangement, a support table is configured to support a substrate. The support table has a base surface. The base surface faces a surface of the substrate when the substrate is supported by the support table. One or more gas cushion members are provided above the base surface. Each of the gas cushion members includes a recess. The recess is shaped and configured such that a lowering of the substrate into a position on the support table at which the substrate is supported by the support table causes a localised build-up of pressure within the recess. The localized build-up of pressure provides a localised gas cushioning effect during the lowering of the substrate.

A turbomachine includes a compressor section, a turbine section, and a rotary component. The rotary component is attached to and rotatable with a portion of at least one of the compressor section and the turbine section. The turbomachine additionally includes a seal having a gas bearing. The gas bearing defines an inner surface along a radial direction of the turbomachine, a high pressure end, and a low pressure end. The gas bearing supports the rotary component and also prevents an airflow from the high pressure end to the low pressure end between the rotary component and the inner surface of the gas bearing.

A linear compressor includes a linear motor including a mover that reciprocates with respect to a stator; a compression unit configured to define a compression space in a cylinder while a piston connected to the mover reciprocates in the cylinder; a frame disposed outside of the cylinder; a plurality of discharge covers that define discharge spaces sequentially receiving refrigerant discharged from the compression space; and a gas bearing configured to guide part of refrigerant accommodated in a discharge any one of the plurality of discharge covers to lubricate between the cylinder and the piston with the refrigerant. The discharge cover structure is configured to restrict heat transfer between the discharge covers and the frame.

A turbomachine includes a rotating group with a turbine wheel. The turbomachine also includes a housing that houses the rotating group, wherein the housing defines a turbine outlet passage for exhaust from the turbine wheel. The turbine outlet passage is directed in a downstream direction along an axis of the turbine outlet passage. The turbomachine includes an air bearing system with at least one bearing component that supports the rotating group for rotation relative to the housing. The air bearing system includes a bearing cooling path that is fluidly connected to the at least one bearing component and that has a bearing air line outlet. The bearing air line outlet is fluidly connected to the turbine outlet passage and is directed in the downstream direction along the axis.

A circumferential seal assembly capable of separating a gas into two separate flow paths before communication between a rotatable runner and a pair of seal rings is presented. The seal assembly includes an annular seal housing, a pair of annular seal rings, a rotatable runner, and a plurality of groove structures. The seal housing is interposed between a pair of compartments. The seal rings are separately disposed within the seal housing and separately disposed around the rotatable runner. The groove structures are disposed along an outer annular surface of the rotatable runner. A gas is communicable onto the groove structures. Each groove structure includes at least two hydrodynamic grooves that separate and communicate the gas onto the seal rings. Each groove includes steps whereby the depth of at least one adjoining step decreases in the direction opposite to rotation with or without the depth of another adjoining steps increasing in the direction opposite to rotation.

A circumferential seal assembly suitable for forming a thin film between a rotatable runner and a sealing ring is presented. The assembly includes an annular seal housing, a rotatable runner, an annular seal ring, and a plurality of groove structures. Each groove structure includes a groove and an optional feed groove. The groove includes at least two adjoining steps defined by base walls arranged to decrease depthwise. Two adjoining base walls are disposed about a base shoulder. Each base shoulder locally redirects a longitudinal flow to form an outward radial flow in the direction of the annular seal ring. The base walls are bounded by and intersect a pair of side walls. A side wall includes at least one side shoulder which narrows the groove widthwise and locally redirects the longitudinal flow to form a lateral flow in the direction of the other side wall. Outward and lateral flows separately or in combination enhance stiffness of a thin-film layer between the annular seal ring and the rotatable runner.