Patent classifications
F16F15/0232
Vibration isolator, lithographic apparatus and device manufacturing method
The invention relates to a vibration isolator, comprising: a base; a coupling element to be coupled to a vibration sensitive object; a decoupling mass; a first vibration isolator part arranged between the base and the decoupling mass; and a second vibration isolator part arranged between the decoupling mass and the coupling element, and wherein at least one of the first and second vibration isolator part comprises a pneumatic isolator.
STATIONARY VIBRATION ISOLATION SYSTEM AND CONTROL METHOD THEREOF
A stationary vibration isolation system including a plurality of isolators by way of which a load which is mounted in a vibration isolated manner is supported. The vibration isolation system includes a plurality of actuators by way of which vibrations of the load are actively countered. Each isolator respectively has its own separate control unit with a digital-analog converter for controlling the actuators.
VIBRATING MACHINE WITH A BEARING DEVICE AND METHOD OF OPERATING A VIBRATING MACHINE
A vibrating machine including a first machine part that vibrates in operation, a second machine part connected to an installation area of the vibrating machine, and a vibratory drive. A resilient bearing is arranged between the machine parts and has at least one air spring per support point and at least one compressed air reservoir fluidically connected to the air spring. A throttle is switched intermediate the air spring and the compressed air reservoir. The first machine part bearing has a resonant or natural frequency lower than an operating frequency of the vibrating machine. The bearing system has a frequency-dependent lower stiffness level with high damping at low frequencies, an upper stiffness level with low damping at higher frequencies, and a transition zone at an intermediate transitional frequency. The throttle is dimensioned such that the transitional frequency is close to, preferably slightly above, the resonant or natural frequency.
NON-METALLIC ORIFICE PLATE
An orifice plate includes a wear-resistant inner diameter surface, an outer diameter surface, a first side surface extending between the wear-resistant inner diameter surface and the outer diameter surface, and a second side surface extending between the wear-resistant inner diameter surface and the outer diameter surface, the second side surface disposed opposite the orifice plate from the first side surface. The orifice plate may comprise a body portion comprising a first material. The wear-resistant inner diameter surface may comprise a second, wear-resistant material.
NON-METALLIC ORIFICE PLATE WITH METALLIC WEAR INSERT
An orifice plate may include a body portion comprised of a non-metallic material, and a metallic wear insert, wherein the metallic wear insert defines an inner diameter surface of the orifice plate and the body portion defines an outer diameter surface of the orifice plate.
Vehicle with pneumatically suspended operator compartment
An overland vehicle is provided which includes a chassis with a roll-over protection structure, a powertrain configured to generate power to drive the overland vehicle, a first suspension system configured as a chassis to ground suspension system, and an operator compartment. The vehicle may also include a second suspension system configured to pneumatically suspend the operator compartment within the chassis, where the second suspension system includes a plurality of pneumatic couplers, including at least a first pneumatic coupler suspending the operator compartment to the chassis along a first vector extending in a first direction, and a second countering pneumatic coupler suspending the operator compartment to the chassis along a second vector extending in a second direction, where the second direction is generally opposite the first direction. In another embodiment, the second suspension system may include a plurality of spaced apart pneumatic couplers, including at least a first pneumatic coupler suspending the operator compartment to a first side of the chassis, and a second pneumatic coupler suspending the operator compartment to a second side of the chassis.
FLUID-CONTROLLED SPRING/DAMPER SYSTEM
A vehicle is provided with a vehicle frame or sub-frame structure and at least one of a body structure and engine structure or a plurality of suspension components mounted to the vehicle frame or sub-frame structure and a plurality of fluid-controlled spring/dampers supporting the least one of a body structure and engine structure or a plurality of suspension components to the vehicle frame of sub-frame structure, the plurality of fluid-controlled spring/dampers being connected to a single central pump.
Active vibration isolator
An active vibration isolator including a movable stage provides good vibration isolation performance. An active vibration isolator includes: a stage moving under thrust to position a mounted object; a vibration isolation table supporting the stage; a servo valve imparting, to the vibration isolation table, a control force that reduces vibrations of the vibration isolation table; a position/thrust obtaining unit obtaining a position of the stage on a movement track and the thrust actually applied to the stage with movement of the stage; and a vibration control FF control unit performing feed-forward control of the servo valve, based on what is obtained by the position/thrust obtaining unit, to allow the servo valve to generate a control force commensurate with vibrations of the vibration isolation table caused by the movement of the stage.
COMBINED AIR SPRING SYSTEM
A combined air spring system includes an upper cover plate, an air bag, an upper end plate and a lower end plate. An outer periphery of the upper cover plate is connected with an outer periphery of the upper end plate through the air bag. A low-position sand clock elastomer is connected between the upper end plate and the lower end plate . A pressing plate is installed at a bottom portion of the upper cover plate, and a high-position elastomer is connected between the upper cover plate and the pressing plate. A limiting table is arranged at a bottom portion of the pressing plate. A limiting groove is formed in a top face of the upper end plate. The limiting table is located in the limiting groove in a deflated state.
EMERGENCY AIR SPRING ASSEMBLY
An emergency air spring assembly includes an upper cover plate, an air bag, an upper end plate and a lower end plate. An outer periphery of the upper end plate is connected with an outer periphery of the lower end plate through the air bag. An hourglass elastomer is connected between the upper cover plate and the upper end plate. A plurality of steel springs are arranged between the upper cover plate and the upper end plate in a circumferential direction of the sand clock elastomer in a pressing mode.