A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

A cooled isolation valve includes a valve body, a stationary element coupled to the valve body, and a movable closure element movable with respect to the stationary element between a closed position in which the movable closure element and the stationary element are brought together and an open position. One of the movable closure element and the stationary element includes a sealing element. In the closed position of the movable closure element, the sealing element provides a seal between the movable closure element and the stationary element. A fluid channel is formed in contact with the movable closure element and movable with the movable closure element with respect to the stationary element, such that a fluid in the fluid channel effects heat transfer in the movable closure element. A bellows of the isolation valve can include a metallic substrate with a ceramic coating.

This invention relates to a cartridge structure (100, 200, 300) designed for generation of hydrogen gas by means of generating hydrogen using hydride solutions (sodium hydride, lithium borohydride, potassium borohydride, ammonium borane, etc.) in presence of a catalyser. The objective of this invention is to provide a cartridge structure (100, 200, 300) designed for generation of hydrogen gas by means of generating hydrogen using continuously fed hydride solutions in presence of a catalyser.

A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.

A vacuum pumping line plasma source is provided. The plasma source includes a body defining a generally cylindrical interior volume extending along a central longitudinal axis. The body has an input port for coupling to an input pumping line, an output port for coupling to an output pumping line, and an interior surface disposed about the generally cylindrical interior volume. The plasma source also includes a supply electrode disposed adjacent to a return electrode, and a barrier dielectric member, a least a portion of which is positioned between the supply electrode and the return electrode. The plasma source further includes a dielectric barrier discharge structure formed from the supply electrode, the return electrode, and the barrier dielectric member. The dielectric barrier discharge structure is adapted to generate a plasma in the generally cylindrical interior volume.

A valve flap device for opening and closing a bypass valve of a turbocharger is provided. The valve flap device includes a valve spindle, a flap support arranged on the valve spindle and having a through aperture, a cover disk in the form of a circular ring, and a valve flap arranged on a support lower side of the flap support on the support lower side. The valve flap includes a flap plate and a flap support pin arranged on the flap plate rear side and is passed through the through aperture of the flap support and is firmly connected to the cover disk. A spring element is installed in the spring gap under a preload. A centering device, provided on the support upper side, is arranged concentrically with the central axis of the through aperture and keeps the spring element in a centered position relative to the central axis.

A valve flap device for opening and closing a bypass valve of a turbocharger is provided. The valve flap device includes a valve spindle, a flap support arranged on the valve spindle and having a through aperture, a cover disk in the form of a circular ring, and a valve flap arranged on a support lower side of the flap support on the support lower side. The valve flap includes a flap plate and a flap support pin arranged on the flap plate rear side and is passed through the through aperture of the flap support and is firmly connected to the cover disk. A spring element is installed in the spring gap under a preload. A centering device, provided on the support upper side, is arranged concentrically with the central axis of the through aperture and keeps the spring element in a centered position relative to the central axis.

The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.

The invention relates to a vacuum process system for an evacuable vacuum process volume, a vacuum valve, a peripheral unit having a closed-loop and open-loop control unit. The vacuum valve includes a valve seat, with a valve opening and a first sealing surface; a valve closure, with a second sealing surface and a drive unit coupled to the valve closure. The valve closure can be varied to provide different valve opening states. The closed-loop and open-loop control unit can perform multiple execution of a process cycle with control of the peripheral unit at least in part to execute a control cycle providing a deliberate variation or setting of the valve opening state by controlling the drive unit on the basis of a currently determined controlled variable for a process parameter and on the basis of a target variable and can be performed with a certain temporal relation.

An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).