An assembly, including a first chamber (1) and at least one second chamber (2) and at least one pivoting drive (3) for pivoting a pivoting object (4) of the assembly, wherein the pivoting object (4) is arranged in the first chamber (1) and at least one intermediate wall (5) is arranged between the first chamber (1) and the second chamber (2). A transmission body (6), which is annular at least in some sections, can be rotated about an axis of rotation (7) by the pivoting drive (3) and is fed through at least one feed-through opening (8), preferably two feed-through openings (8), in the intermediate wall (5).

The present invention relates generally to a pendulum valve that is installed in a connection pipe connecting a vacuum pump between the chamber of a dry etching apparatus and the vacuum pump in the etching line of a semiconductor manufacturing process and adjusts the amount of gas, and more particularly to a pendulum valve that includes a fixed housing configured such that a shaft coupled to a valve gate for adjusting the amount of gas is closely fixed to a valve housing through an O-ring and a rotation shaft (an internal shaft) coupled to the inside of the fixed housing, so that only the rotation shaft separate from the value housing is rotated by using a lip seal as a rotation axis, thereby suppressing the discharge of unnecessary particles and hardened substances while maintaining the sealing characteristics of the pendulum valve.

The present invention relates generally to a pendulum valve that is installed in a connection pipe connecting a vacuum pump between the chamber of a dry etching apparatus and the vacuum pump in the etching line of a semiconductor manufacturing process and adjusts the amount of gas, and more particularly to a pendulum valve that includes a fixed housing configured such that a shaft coupled to a valve gate for adjusting the amount of gas is closely fixed to a valve housing through an O-ring and a rotation shaft (an internal shaft) coupled to the inside of the fixed housing, so that only the rotation shaft separate from the value housing is rotated by using a lip seal as a rotation axis, thereby suppressing the discharge of unnecessary particles and hardened substances while maintaining the sealing characteristics of the pendulum valve.

A valve is provided for use with liquid chromatography where liquid is provided to the chromatographic analysis equipment at more than one pressure, including up to ultra-high pressures. High and higher pressure operation are provided by application of force by an internal spring while avoiding wear of components by permitting higher pressure operation by mechanical engagement of an internal element to cause the internal spring to increase the force applied to the rotor, without the addition of external additional loading in the high pressure operation.

A valve is provided for use with liquid chromatography where liquid is provided to the chromatographic analysis equipment at more than one pressure, including up to ultra-high pressures. High and higher pressure operation are provided by application of force by an internal spring while avoiding wear of components by permitting higher pressure operation by mechanical engagement of an internal element to cause the internal spring to increase the force applied to the rotor, without the addition of external additional loading in the high pressure operation.

A valve may be utilized in a high-performance chromatography system for separating components of a sample liquid introduced into a mobile phase. The valve has a first valve element and a second valve element. By a movement of one valve element relative to the other, a first effective surface of the first valve element is brought into connection with a second effective surface of the second valve element, and a flow path may be produced or suppressed. The second valve element has an elastic region to compensate for an axial angle between the first valve element and the second valve element, such that the first effective surface and the second effective surface may be oriented parallel to each other. This may favorably influence a fluidic leak tightness and/or longevity of the valve.

Flow modulator (10) for a fluid like combustion gas, comprising: a housing (11), a modulator body (14) positioned with the housing (11), and a valve body (18) positioned with the housing (11). The modulator body (14) has a flow channel (15) and an opening (16) providing together a flow passage (17) for the fluid. The valve body (18) is provided by a foil element (19), wherein the foil element (19) has an opening (20) for the fluid, wherein the foil element (19) is rotatable relative to the modulator body (14) to modulate the flow of the fluid by adjusting an overlap between the opening (20) of the valve body (18) and the flow passage (17) of the modulator body (14), and wherein the foil element (19) is positioned up-stream of the modulator body (14) such that an inlet pressure of the fluid presses the foil element (19) against the modulator body (14) thereby providing a sealing level between the foil element (19) and the modulator body (14).

Disclosed is a vacuum valve having at least one acoustic sensor, the acoustic sensor being designed such that information can be generated by the acoustic sensor via a structure-borne sound wave, as a measuring signal, impacting on at least one component of the vacuum valve.

Pivoting valve to regulate the flow of a fluid that comprises: a body including an inlet hole and an outlet hole for the fluid flow path, a fluid flow path shutter element mounted pivotable on a rotary axis of the valve body to be able to rotate from an open position to a closed position of the fluid flow path, characterised in that it includes a tubular element to channel the flow of fluid inside the valve body, the tubular element being interposed between the inlet and outlet holes, and mounted linearly displaceable, in such a way that it can be moved from the outlet hole to the inlet hole when the shutter element is in an open position.

Pivoting valve to regulate the flow of a fluid that comprises: a body including an inlet hole and an outlet hole for the fluid flow path, a fluid flow path shutter element mounted pivotable on a rotary axis of the valve body to be able to rotate from an open position to a closed position of the fluid flow path, characterised in that it includes a tubular element to channel the flow of fluid inside the valve body, the tubular element being interposed between the inlet and outlet holes, and mounted linearly displaceable, in such a way that it can be moved from the outlet hole to the inlet hole when the shutter element is in an open position.