Provided is a flow rate regulating device including a valve body section having a flat valve body surface; a main body section including a valve chamber, an inflow channel, an outflow channel, and a communication channel; a valve seat section having a flat valve seat surface provided around an inflow opening; a regulation mechanism that moves the valve body section along an axis to regulate a distance between the valve body surface and the valve seat surface; and a control unit that controls the regulation mechanism so that the valve body section moves in a movement range in which the valve body surface and the valve seat surface maintain a non-contact state, wherein a channel cross-sectional area of the communication channel is smaller than each of a channel cross-sectional area of the inflow channel and a channel cross-sectional area of the outflow channel.

A diaphragm valve for gas analysis applications is provided. The valve includes a valve cap provided with a plurality of process conduits extending therethrough, a valve body engageable with the valve cap and having a body interface provided with a recess, a diaphragm positioned between the valve cap and valve body and having a process groove for circulating fluid therein, the process groove engaging the recess, a plunger assembly provided within the valve body, the plunger assembly comprising a plurality of plungers movable between a closed position wherein the plunger engages the diaphragm, and an open position wherein the plunger is spaced from the diaphragm, and an actuating assembly comprising a gas inlet to allow the injection of actuating gas therein, the actuating assembly comprising a purging system for purging a region located between the diaphragm and the body interface, whereby the actuating gas is used for purging the region.

A valve assembly including a valve housing and a handle that is movable about an actuation axis to actuate a valve actuator within the valve housing between an open position and a closed position. The handle has a first opening and the valve housing has a second opening. When the valve actuator is in the closed position the first opening aligns with the second opening to enable receipt of a lockout member that prevents movement of the valve actuator from the closed position to the open position.

A valve assembly including a valve housing and a handle that is movable about an actuation axis to actuate a valve actuator within the valve housing between an open position and a closed position. The handle has a first opening and the valve housing has a second opening. When the valve actuator is in the closed position the first opening aligns with the second opening to enable receipt of a lockout member that prevents movement of the valve actuator from the closed position to the open position.

A valve for controlling a fluid flow, including a valve housing, which is provided with a first fluid connection, a fluid channel and a second fluid connection, further including a valve member which is pivotally mounted in the fluid channel, and a drive for introducing a movement onto the valve member, the valve member having a rigid carrier and a flexible membrane with a sealing region which is provided for a sealing abutment against a valve seat and which is fixed to the carrier and to the valve housing by a circumferentially formed fastening region, wherein a deformation region of the flexible membrane is located between the sealing region and the fastening region and is arranged between a first deformation plane and a second deformation plane, the first deformation plane and the second deformation plane each being aligned parallel to a pivot axis determined by the pivot pin and delimiting a deformation space, and wherein the pivot pin is accommodated at least partially in the deformation space.

A valve for controlling a fluid flow, including a valve housing, which is provided with a first fluid connection, a fluid channel and a second fluid connection, further including a valve member which is pivotally mounted in the fluid channel, and a drive for introducing a movement onto the valve member, the valve member having a rigid carrier and a flexible membrane with a sealing region which is provided for a sealing abutment against a valve seat and which is fixed to the carrier and to the valve housing by a circumferentially formed fastening region, wherein a deformation region of the flexible membrane is located between the sealing region and the fastening region and is arranged between a first deformation plane and a second deformation plane, the first deformation plane and the second deformation plane each being aligned parallel to a pivot axis determined by the pivot pin and delimiting a deformation space, and wherein the pivot pin is accommodated at least partially in the deformation space.

A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

A fluid control device, capable of acquiring data related to an internal operation of a device, is provided. The Fluid control device V includes a bonnet part installing sensors for detecting the internal operation of the fluid control device and a valve body containing the bonnet part inside, and the valve body has a recess for containing the bonnet part and a slit, leading a communication cable connected to the sensors to the outside, opening one end on an opposite side of a base where a flow path is formed, and penetrating from an outside to the recess.

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.

A fluid control device, capable of detecting leaks even if the leaks is slight, is provided. The fluid control device includes a valve body in which the flow path is formed, a diaphragm isolating a closed space from the flow path, a bonnet forming the closed space between the diaphragm and providing a penetration hole connected to the closed space and penetrated to be able to vertically move a diaphragm retainer, the diaphragm retainer vertically moving in the penetration hole to press the diaphragm and providing an increased diameter portion not to be removed from the penetration hole, a pressure sensor detecting a pressure inside of the closed space, and an elastic body interposing between the increased diameter portion of the diaphragm retainer and the bonnet inside of the closed space and elastically expanding and deflating between the increased diameter portion of the diaphragm retainer and the bonnet as the diaphragm retainer vertically moves.