Patent classifications
F16K31/1221
ARRANGEMENTS AND METHODS FOR CONTROLLED VALVE FLOW RATE
An actuated valve assembly includes a valve body (110) having a valve seat (112) disposed between inlet (111) and outlet (113) passages, and a fixed orifice (115) restriction provided in at least one of the inlet and outlet passages, a valve element (120) assembled with the valve body and axially movable between a closed position and an open position, and an actuator (130) assembled with the valve body and connected with the valve element for axial movement of the valve element between the closed and open positions. A ratio of the maximum seat annulus flow coefficient associated with the valve seat and valve element to an orifice flow coefficient associated with the fixed orifice restriction is between about 2:1 and about 8:1.
Flow rate controller and drive device comprising same
A main flow path that introduces high-pressure air to an air cylinder, or discharges exhaust air therefrom, includes a sub flow path provided alongside the main flow path; an exhaust flow rate adjustment unit that suppresses the operation speed of the air cylinder by adjusting the flow rate of the exhaust air flowing through the sub flow path; and a switching valve that is connected between the air cylinder, the main flow path and the sub flow path, and that connects the main flow path and the sub flow path to the air cylinder in a switching manner. The switching valve is constituted by a spool valve.
VALVE DEVICE FOR A VACUUM HANDLING DEVICE OR A VACUUM CLAMPING DEVICE
A valve device comprising a valve housing with a flow channel having a fluid outflow side and a fluid inflow side, a leaf spring having a fastening portion and a free portion. The fastening portion is connected to the valve housing such that, in a closed configuration, the free portion bears against a valve seat and that, in order to bring about an open configuration, the free portion, from the closed configuration, can be elastically bent away from the valve seat, and an actuating device which is designed to transfer the leaf spring from the closed configuration to an open configuration against an elastic reset force of the leaf spring.
Pressure compensated flow controller with only two pressures
According to an embodiment of the disclosure, an apparatus for a flow of fluid includes a first and a second element that form an exponentially changing restriction between them for a flow of a fluid. At least one of the first and second elements is configured to move in response to changing pressures to change the restriction. One of the first and second elements includes a wall with one or more cutouts that have an admittance that changes exponentially with respect to the movement of the first or second element.
Fluid distribution system with manifold assembly
A fluid distribution system includes a mass flow controller and a first manifold assembly. The mass flow controller includes first and second end ports each extending from a lower end of the mass flow controller, proximate corresponding first and second sides of the mass flow controller, for lateral flow through the mass flow controller from the first end port to the second end port. The first manifold assembly includes a first end connection coupled to the first end port of the mass flow controller. The first manifold assembly includes a first manifold body extending parallel to the first side of the mass flow controller, and a plurality of first valve subassemblies retained in the first manifold body and arranged across a plane extending substantially parallel to the first side of the mass flow controller, with valve movement perpendicular to the first side of the mass flow controller.
Valve apparatus, flow rate adjusting method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A valve device is capable of precisely adjusting a flow rate variation due to aging, aging, etc. without using an external sensor. An adjusting actuator includes a piezoelectric element for adjusting the position of the operating member positioned at the open position, and the drive circuit of the adjusting actuator includes a detecting unit for detecting an electric signal related to the amount of strain generated in the piezoelectric element, and a control unit for controlling the adjusting actuator so that the opening degree of the flow path by the valve element becomes the target opening degree based on the electric signal related to the amount of strain of the piezoelectric element.
Vacuum breaking device for vacuum generator
A vacuum breaking device for a vacuum generator, includes a main housing, wherein the main body is provided with an air supply port, a vacuum interface chamber and a vacuum generating chamber. An intake passage is arranged inside the main housing, a pilot valve controlled by an electromagnetic pilot valve assembly is arranged between the intake passage and the air supply port. The pilot valve includes a pilot valve body, a pilot valve core and a pilot valve spring. A throttle pipe is arranged axially inside the main housing. A pneumatic on-off valve is arranged between the vacuum interface chamber and the vacuum generating chamber and outside the throttle pipe. The pneumatic on-off valve includes a slide core and a slide core spring, and a control chamber mated with an end surface of the slide core is arranged inside the main housing.
Valve device, fluid control device, fluid control method, semiconductor manufacturing apparatus, and semiconductor manufacturing method
A valve device includes a valve body; a cylindrical member provided in an accommodation recess and communicating with the first flow path; a valve seat supported by the cylindrical member; a seal member interposed between the periphery of the opening of first flow path on the bottom surface of the accommodation recess and the lower end portion of the cylindrical member; an annular plate which is flexible, air-tightly or liquid-tightly fixed to an annular support portion formed on the inner peripheral surface of the accommodation recess, air-tightly or liquid-tightly fixed to an annular support portion formed on the outer peripheral surface of the cylindrical member and has a plurality of openings communicating with the second flow path; and a diaphragm that moves between an open position at which the diaphragm does not contact the valve seat and a closed position at which the diaphragm contacts the valve seat.
FLUID COMPONENT BODY WITH LEAK TEST PASSAGES
A manifold body includes at least first and second valve body segments each comprising an upper perimeter wall portion defining a valve cavity and a lower base portion defining one or more flow ports, a unified leak test port, a first branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the first valve body segment, radially outward of an outer seal surface in the valve cavity, and a second branch leak test passage extending from the unified leak test port to an outer peripheral portion of the valve cavity of the second valve body segment, radially outward of an outer seal surface in the valve cavity.
METERING VALVE WITH MID-STROKE SHUTOFF
A metering valve has a shutoff position at which it blocks flow from the metering valve outlet line from reaching an outlet to a use. A spool has a first end and a second end. The housing has a first shoulder associated with the first end and a second shoulder associated with the second end. In the shutoff position, the spool has the first end spaced from the first shoulder, and the second end spaced from the second shoulder. A fuel system for a gas turbine engine is also disclosed.