A pressure relief valve is provided. The pressure relief valve includes a hollow body having an inlet and an outlet, with the hollow body including at least one aperture extending through a surface of the hollow body. An actuator assembly is attached to the hollow body and a sleeve is slideably positioned about the hollow body, with the sleeve moveably attached to the actuator assembly. During operation, the actuator assembly moves the sleeve from a first position that covers the aperture to a second position that un-covers at least a portion of the aperture.

A valve device for liquids, especially for liquid plastic constituents of single- or multiple-constituent plastic mixtures, includes a valve housing with a liquid inlet and a metering valve, which has a discharge opening that can be closed by a closure element, a pressure control device acting on the liquid in the liquid inlet and comprising a control membrane which acts on the closure element. A shut-off diaphragm separates the pressure control device from the liquid inlet, and the pressure control device comprises a fluid-tight control chamber which is at least partially arranged in the valve housing, for storing a substantially incompressible fluid. A pressure generating device allows the control membrane to be subjected to pressure by the incompressible fluid arranged in the control chamber.

A valve device for liquids, especially for liquid plastic constituents of single- or multiple-constituent plastic mixtures, includes a valve housing with a liquid inlet and a metering valve, which has a discharge opening that can be closed by a closure element, a pressure control device acting on the liquid in the liquid inlet and comprising a control membrane which acts on the closure element. A shut-off diaphragm separates the pressure control device from the liquid inlet, and the pressure control device comprises a fluid-tight control chamber which is at least partially arranged in the valve housing, for storing a substantially incompressible fluid. A pressure generating device allows the control membrane to be subjected to pressure by the incompressible fluid arranged in the control chamber.

An on/off valve controls circulation of mediums in an upstream pipeline and a downstream pipeline of the on/off valve; a valve stem of the on/off valve is connected with an on/off actuating mechanism; the upstream pipeline of the on/off valve is connected with a pilot trigger mechanism through a communicating pipe, the pilot trigger mechanism is connected with the on/off actuating mechanism, and the pilot trigger mechanism triggers the on/off actuating mechanism. An isolation device is arranged on the communicating pipe and isolates the communicating pipe into an upstream portion and a downstream portion through a pressure sensing component. The pressure sensing component senses a medium pressure from the upstream pipeline and feed back the pressure to the pilot trigger mechanism, thereby causing an action of the pilot trigger mechanism. A non-viscous and incompressible fluid is filled between the downstream of the communicating pipe and the pilot trigger mechanism.

An on/off valve controls circulation of mediums in an upstream pipeline and a downstream pipeline of the on/off valve; a valve stem of the on/off valve is connected with an on/off actuating mechanism; the upstream pipeline of the on/off valve is connected with a pilot trigger mechanism through a communicating pipe, the pilot trigger mechanism is connected with the on/off actuating mechanism, and the pilot trigger mechanism triggers the on/off actuating mechanism. An isolation device is arranged on the communicating pipe and isolates the communicating pipe into an upstream portion and a downstream portion through a pressure sensing component. The pressure sensing component senses a medium pressure from the upstream pipeline and feed back the pressure to the pilot trigger mechanism, thereby causing an action of the pilot trigger mechanism. A non-viscous and incompressible fluid is filled between the downstream of the communicating pipe and the pilot trigger mechanism.

A valve device and semiconductor production device that can be used long-term without seizing even during high-temperature use, and which do not have contaminants in the chambers thereof. The valve device includes: a boosting mechanism that amplifies drive force; a first and second stem receive force amplified by the boosting mechanism and move; and a diaphragm capable of opening and closing fluid passages. The boosting mechanism includes: a retainer and bearings; shafts having both ends thereof supported by the bearings; and arms pivotably supported by the shafts and having an outer end portion that receives drive force and an inner end portion that amplifies and transmits drive force to the first stem. In the retainer, bearings, shafts, and arms, the bearings and both ends of the shaft constitute a swinging portion in conjunction with the swinging by the arms, and thereamong, the bearings include a carbon fiber composite material.

A valve device and semiconductor production device that can be used long-term without seizing even during high-temperature use, and which do not have contaminants in the chambers thereof. The valve device includes: a boosting mechanism that amplifies drive force; a first and second stem receive force amplified by the boosting mechanism and move; and a diaphragm capable of opening and closing fluid passages. The boosting mechanism includes: a retainer and bearings; shafts having both ends thereof supported by the bearings; and arms pivotably supported by the shafts and having an outer end portion that receives drive force and an inner end portion that amplifies and transmits drive force to the first stem. In the retainer, bearings, shafts, and arms, the bearings and both ends of the shaft constitute a swinging portion in conjunction with the swinging by the arms, and thereamong, the bearings include a carbon fiber composite material.

Actuating device for process valves (2) comprising a housing (22), comprising two housing parts (24, 26) and an actuating membrane member (20) sealingly mounted between housing parts (24, 26) and moveable in strokes which, on the one hand, forms together with the housing a pressurizeable working chamber (28) and, on the other hand, is loaded by at least one return spring (32) such that, in the unpressurized state, the actuating membrane member (20) is brought into a predefined position by means of the pre-tension of the return spring (32), wherein the actuating membrane member (20) is adapted to be connected to a valve shaft (18) connected to the valve body (16) of the process valve (2). A coupling installation (64) is provided having coupling parts (66, 68) arranged on both sides in the direction of the lifting movement of the actuating membrane member (20), which coupling parts are adapted to a connection (70) an the valve shaft (18) such that the connection of the valve shaft (18) with the actuating membrane member (20) is carried out by a one-sided mounting, wherein the valve shaft (18) is adapted to be connected to each of the coupling parts (66, 68) of the coupling installation (64). On the actuating device (2) a distance measuring system (48) is arranged, which comprises a connection (72) which is adapted to be connected to each of the coupling parts (66, 68) of the coupling installation (64) by means of a one-sided mounting, wherein the coupling parts (66, 68) are constructed in analogy to the corresponding connections (70, 72) for selectively fastening of the valve shaft (18) or the distance measuring system (48) to the coupling installation (64).

Actuating device for process valves (2) comprising a housing (22), comprising two housing parts (24, 26) and an actuating membrane member (20) sealingly mounted between housing parts (24, 26) and moveable in strokes which, on the one hand, forms together with the housing a pressurizeable working chamber (28) and, on the other hand, is loaded by at least one return spring (32) such that, in the unpressurized state, the actuating membrane member (20) is brought into a predefined position by means of the pre-tension of the return spring (32), wherein the actuating membrane member (20) is adapted to be connected to a valve shaft (18) connected to the valve body (16) of the process valve (2). A coupling installation (64) is provided having coupling parts (66, 68) arranged on both sides in the direction of the lifting movement of the actuating membrane member (20), which coupling parts are adapted to a connection (70) an the valve shaft (18) such that the connection of the valve shaft (18) with the actuating membrane member (20) is carried out by a one-sided mounting, wherein the valve shaft (18) is adapted to be connected to each of the coupling parts (66, 68) of the coupling installation (64). On the actuating device (2) a distance measuring system (48) is arranged, which comprises a connection (72) which is adapted to be connected to each of the coupling parts (66, 68) of the coupling installation (64) by means of a one-sided mounting, wherein the coupling parts (66, 68) are constructed in analogy to the corresponding connections (70, 72) for selectively fastening of the valve shaft (18) or the distance measuring system (48) to the coupling installation (64).

A pressure relief valve is provided. The pressure relief valve includes a hollow body having an inlet and an outlet, with the hollow body including at least one aperture extending through a surface of the hollow body. An actuator assembly is attached to the hollow body and a sleeve is slideably positioned about the hollow body, with the sleeve moveably attached to the actuator assembly. During operation, the actuator assembly moves the sleeve from a first position that covers the aperture to a second position that un-covers at least a portion of the aperture.