A method includes separately exposing selected portions of a first rigid substrate and a second rigid substrate to laser radiation, selectively etching the exposed portions of the first rigid substrate and the second rigid substrate using a chemical etchant and bonding the first rigid substrate to the second rigid substrate along a common interface to form a fluidic valve. The fluidic valve may be coupled to a fluidic haptics device, for example, which may be integrated into an artificial reality system.

A miniaturized hydraulic valve having a valve chamber arranged in a housing having an inlet and an outlet, wherein a wall includes a shifting member movable in the direction of the inlet and/or the outlet, and wherein a fluid-filled drive chamber is arranged on an opposite side of the wall, which is connected to a micropump in such a way that the shifting member can be actively deflected by fluid which can be pressurized by means of the micropump, so that its position can be changed relative to the inlet and/or outlet.

A fluid system includes a fluid active region, a fluid channel, a convergence chamber, a sensor and plural valves. The fluid active region includes at least one fluid-guiding unit. The fluid-guiding unit is enabled under control to transport fluid to be discharged out through an outlet aperture. The fluid channel is in communication with the outlet aperture of the fluid active region, and has plural branch channels for splitting the fluid discharged from the fluid active region. The convergence chamber is in communication with the fluid channel. The sensor is disposed in the fluid channel for measuring fluid. The valves each of which is disposed in the corresponding branch channel, wherein the fluid is discharged out through the branch channels according to opened/closed states of the valves under control. The fluid system is capable of acquiring required flow rate, pressure and amount of the fluid to be transported.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

A valve includes an orifice plate including at least one orifice surrounded by an orifice plate seal surface, a seal plate, and an actuator. The seal plate includes a seal boss having a seal boss surface that faces the orifice plate, and a pocket that overlays the at least one orifice. The pocket includes a recessed surface that is surrounded by the seal boss surface and is displaced from the seal boss surface along an axis. The actuator is configured to move the seal plate relative to the orifice plate along the axis to transition the valve between open and closed states. The seal boss surface engages the orifice plate seal surface, surrounds the at least one orifice, and blocks a flow of fluid through the at least one orifice when the valve is in the closed state.

The present invention relates to microfluidic check valves, as well as fluidic cartridges including such check valves. In particular examples, the check valve includes a pre-stressed spring formed from a planar substrate. Various characteristics of the valves, such as size, profile, opening pressure, etc., can be tuned to provide desired performance when employed within a fluidic cartridge.

A valve includes a first plate, a second plate, a spacer disposed between the first plate and the second plate, and a flap movably disposed between the first plate and the second plate. The first plate includes a plurality of first apertures extending through said first plate and the second plate includes a plurality of second apertures extending through said second plate. The second apertures are substantially offset from the first apertures. The spacer forms a cavity between the first plate and the second plate and is in fluid communication with the first apertures and the second apertures. The flap has apertures substantially offset from the first apertures and substantially aligned with the second apertures, and the flap is operable to be motivated between said first and second plates in response to a change in direction of the differential pressure of the fluid across the valve.

One aspect of the invention provides a multichamber bioreactor. The multichamber bioreactor includes multiple planar layers stacked on each other defining at least one chamber and a clamping mechanism. The clamping mechanism includes a housing and retaining means received in the housing and configured to generate a controlled and uniform pressure to secure the stacked multiple planar layers in the housing. Each chamber is implemented from a separate fluidic layer, with each fluidic layer having ports and valves independent of the other layers. The micro fluidic ports can be actuated through a micro fluidic interconnect system utilizing rotary cylinder valves.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

The present invention relates to the structure of an analysis plate applied to a high-speed polymerase chain reaction (PCR), and to a PCR analysis plate used for implementing an analysis of a real-time PCR, a real-time nested PCR and a post-PCR lateral flow hybridization reaction. The present invention is provided with: a check valve for enabling the maintaining of positive pressure when an elastic film expands into a convex form by having a solution pushed therein by the positive pressure; a lateral flow analysis module for analyzing a post-PCR follow-up PCR or lateral flow; and a shut-off valve enabling the controlling of the movement of the solution after each reaction ends. A high-speed PCR analysis plate may be provided whereby, by pressing, by means of a temperature-controllable heating block, the elastic film, which is in a convex form by the solution, of a PCR unit, a PCR solution may undergo rapid temperature circulation with minimum heat resistance, and a PCR dried material and a nucleic acid solution may be homogenized and mixed.