Disclosed is a system including a flow control assembly. The system may include a flow regulating shunt system, for various purposes. The flow control assembly may be controlled according to selected parameters and methods.

A rotary planar peristaltic micropump (RPPM) includes an actuator having a shaft engaged with a motor such that activation of the motor causes the shaft to rotate, and a bearing assembly engaged with the shaft. The bearing assembly has a bearing cage defining a plurality of spaced-apart openings thereon, and a plurality of rolling-members accommodated in the plurality of spaced-apart openings of the bearing cage, such that when the shaft rotates, the plurality of rolling-members of the bearing assembly rolls along a circular path. The RPPM also includes a fluidic path in fluidic communication with first and second ports. The fluidic path is positioned under the actuator and coincident with the circular path, such that when the shaft of the actuator rotates, the plurality of rolling-members of the bearing assembly rolls along the fluidic path to cause a fluid to transfer between the first and second ports.

A micro check valve apparatus connected to a microchannel device includes: a substrate; a chamber that is positioned inside the substrate and has an upper surface having a projection, and a tapered part positioned at a lower part of the chamber; a micro discharging channel connected to a side surface of the chamber; a micro introducing channel connected to the tapered part of the chamber; and a spherical valve positioned on the tapered part.

A normally closed valve includes a plurality of fluid channels in fluid communication with each other, defined in a flexible base such that when a fluid channel is compressed, a fluid flow through the fluid channel is occluded, otherwise, the fluid flow through the fluid channel is unoccluded; and means for selectively compressing or uncompressing a desired fluid channel.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.

In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.