A gasket includes a base extending circumferentially about a gasket axis, a central flange, a first arm, and a second arm. The first arm includes a first arm portion extending from the gasket base to a first radial axis and a second arm portion defining a first surface at a first angle and a second surface at a second angle, the second angle greater than the first angle. The second arm includes a third arm portion extending from the gasket base to a second radial axis that is perpendicular to the gasket axis and a fourth arm portion defining a third surface at a third angle and a fourth surface at a fourth angle, the fourth angle greater than the first angle, the fourth surface further from the third arm portion than the third surface.

A gasket includes a base extending circumferentially about a gasket axis, a central flange, a first arm, and a second arm. The first arm includes a first arm portion extending from the gasket base to a first radial axis and a second arm portion defining a first surface at a first angle and a second surface at a second angle, the second angle greater than the first angle. The second arm includes a third arm portion extending from the gasket base to a second radial axis that is perpendicular to the gasket axis and a fourth arm portion defining a third surface at a third angle and a fourth surface at a fourth angle, the fourth angle greater than the first angle, the fourth surface further from the third arm portion than the third surface.

A flexible pipe end portion connection structure is provided. The flexible pipe end portion connection structure includes a flexible pipe body and a joint. The joint includes a first end and a second end opposite to each other and has a channel extending through the joint in a direction from the first end to the second end. An inner sidewall of the first end of the joint has a plurality of first stepped structures, and an inner diameter of a portion of the channel corresponding to the first stepped structure gradually decreases in the direction from the first end to the second end. At least a part of an end of the flexible pipe body is inserted into the first end of the joint to fit with the first stepped structure.

Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks or active components, the seal rings having seal retention features which aid in assembly. These seal retention features may increase the retention force of the seal in a seal cavity or may reduce the force required to retain the seal. In other arrangements, the seal cavities of the substrate blocks or active components may incorporate seal retention features.

Fluid delivery systems are important component assemblies used for semiconductor fabrication. These fluid delivery systems rely on assemblies of components, requiring seals which must be installed and replaced during assembly and maintenance of the fluid delivery systems. Seals may be arranged as seal rings which engage substrate blocks or active components, the seal rings having seal retention features which aid in assembly. These seal retention features may increase the retention force of the seal in a seal cavity or may reduce the force required to retain the seal. In other arrangements, the seal cavities of the substrate blocks or active components may incorporate seal retention features.

A coupling for joining pipe elements has cast segments attached end to end surrounding a central space. The segments define a channel that receives a gasket. Side surfaces within the channel have angularly oriented capture surfaces which are engaged by bulbous rims on the gasket which prevent the gasket from being dislodged from the channel when at least one pipe element is inserted into the central space. Side surfaces may also have support surfaces between the capture surfaces. The gasket supports the segments in a preassembled state wherein the segments are in spaced relation sufficient to permit insertion of one or more pipe elements while the segments are attached end to end.

A coupling for joining pipe elements has cast segments attached end to end surrounding a central space. The segments define a channel that receives a gasket. Side surfaces within the channel have angularly oriented capture surfaces which are engaged by bulbous rims on the gasket which prevent the gasket from being dislodged from the channel when at least one pipe element is inserted into the central space. Side surfaces may also have support surfaces between the capture surfaces. The gasket supports the segments in a preassembled state wherein the segments are in spaced relation sufficient to permit insertion of one or more pipe elements while the segments are attached end to end.

A gasket 4 includes: a cylindrical body portion 10 having a communication hole 10a for providing communication between flow passage holes 2c, 2c formed in two fluid devices 2, 2, respectively; and an annular primary sealing portion 11 projecting from a radially inner side of an axially outer end portion of the body portion 10 toward an axially outer side and to be press-fitted into an annular primary sealing groove 2d formed in each fluid device 2. In a state before the primary sealing portion 11 is press-fitted into the primary sealing groove 2d, an entirety of an inner circumferential surface 10b of the body portion 10 is formed such that a diameter thereof gradually decreases from both axially outer ends thereof toward an axially inner side.

A casing constituting a housing type pipe joint is divided into an inner casing which externally fits to a sealing member to restrain a shape of a sealing member and an outer casing which is prepared outside the inner casing, engages with a pair of tubular members with their tube ends opposing each other inside the sealing member and presses the inner casing against the sealing member, these inner and outer casings being constituted by plural segments, each of which is formed as an integrated object from a metal plate, and a plate thickness of the inner casing is equal to or larger than a plate thickness of the outer casing. Thereby, a housing type pipe joint which can achieve both a function to restrain a shape of a sealing member and a function to engage tubular members at a sufficiently high level and is compact and lightweight is provided.

A casing constituting a housing type pipe joint is divided into an inner casing which externally fits to a sealing member to restrain a shape of a sealing member and an outer casing which is prepared outside the inner casing, engages with a pair of tubular members with their tube ends opposing each other inside the sealing member and presses the inner casing against the sealing member, these inner and outer casings being constituted by plural segments, each of which is formed as an integrated object from a metal plate, and a plate thickness of the inner casing is equal to or larger than a plate thickness of the outer casing. Thereby, a housing type pipe joint which can achieve both a function to restrain a shape of a sealing member and a function to engage tubular members at a sufficiently high level and is compact and lightweight is provided.