An apparatus for treatment of gaseous pollutants, the apparatus comprising a reaction portion and a passage. The reaction portion comprises a gas inlet unit, a reaction unit, a combustion unit and a cooling unit. The passage comprises a transverse section, a connection section and a straight section, the transverse section is provided with a top gas inlet in communication with the reaction portion and a lateral gas inlet, the connection section is connected between the transverse section and the straight section, the top gas inlet receives an effluent passing through the reaction portion and then flowing downwards, the lateral gas inlet receives a transverse air flow, and the effluent is driven by the transverse gas flow to form a cyclone and is discharged from an outlet of the straight section by means of the connection section.

A multi-autoclave lateral conversion module includes a central mixing process pipe having first and second terminal ends, a heating unit providing heated air at the first terminal end of the central mixing process pipe, two or more gas injection units connected to opposing sides of the central mixing process pipe at a first addition point located between the first and the second terminal ends, and each gas injection unit receiving the process discharge gas from an autoclave unit. The process discharge gas is transmitted from an autoclave unit through the gas injection unit into the central mixing process pipe where it mixes with the process discharge gas from the other autoclave unit, and then the mixed process gases are converted. Process units other than autoclaves can also utilize the module and method provided.

An abatement apparatus and method are disclosed. The abatement apparatus is for treating an effluent stream from a semiconductor processing tool and comprises: a first abatement device configured to receive the effluent stream and operable to run in an active mode to treat the effluent stream; a second abatement device operable to run in an idle mode; and control logic operable, on receipt of an indication of an alarm condition associated with the first abatement device, to run the second abatement device in the active mode. In this way, a first or primary abatement device is provided which treats the effluent stream and a second or back-up abatement device is provided, should the first abatement device malfunction. However, by only causing the second abatement device to operate in the active mode when the first abatement device malfunctions, significant energy savings can be made.

The invention relates to a process burner for combustion of a plurality of fuel gases with a gaseous auxiliary medium, wherein one of the fuel gases comprises carbon monoxide (CO). The process burner according to the invention includes a first fuel gas unit, a second fuel gas unit and an auxiliary media unit. A first fuel gas which may be natural gas for example is introduced into the process burner via a first fuel gas nozzle in the region of the combustion zone. Carbon monoxide-containing fuel gas is introduced into the process burner via the second fuel gas unit, wherein a second fuel gas nozzle for introducing the carbon monoxide-containing fuel gas is arranged in the region of the auxiliary media unit.

An abatement method is disclosed. The method comprises: supplying a combustion chamber of an abatement apparatus with an effluent stream containing a perfluoro compound, together with combustion reagents and a diluent; heating a combustion zone of said combustion chamber by reacting said combustion reagents to perform abatement of said perfluoro compound to stable by-products, said diluent being selected to remain inert during said abatement. In this way, the perfluoro or other compound is abated in the combustion chamber during the combustion of the combustion reagents, but without creating undesirable compounds such as, for example, NOx or other compounds.

A burner apparatus and process are described. The burner apparatus includes an inlet chamber in communication with a combustion chamber. The combustion chamber has a cylindrical shape defining a longitudinal axis and a radial direction orthogonal to the longitudinal axis. The combustion chamber has an upstream end and a downstream end, and an air inlet is disposed in the inlet chamber. A pilot, a fuel gas inlet, and a refractory material are disposed in the combustion chamber downstream of the air inlet. A mixed gas inlet is positioned downstream of the fuel gas inlet and the pilot in the combustion chamber. The mixed gas inlet includes a manifold having an inlet, a body, and a plurality of nozzles.

A head assembly for a radiant burner, an inlet assembly and a method are disclosed. The head assembly is for a radiant burner. The head assembly may include a housing defining a plurality of identical housing apertures extending therethrough, an insulator received by the housing and defining a corresponding plurality of identical, complimentarily-located insulator apertures extending therethrough, and at least one inlet assembly configured to be received by one of the identical housing apertures. Each inlet assembly may include a housing portion configured to be received by the one of the identical housing apertures, and an insulator portion configured to fill the complimentarily-located insulator aperture. In this way, a head assembly is provided which has a number of apertures, any of which may receive an inlet assembly. Given that each inlet assembly is configured to be received by any of the apertures, this provides flexibility for the insertion and removal of the assemblies, without needing to completely disassemble the head assembly from the radiant burner. Also, by forming the inlet assembly with a housing portion and insulation portion, the assembly can be located within the head assembly and the insulating portion prevents heat damage.

The invention relates to a method for the thermal disposal of pollutants in industrial gases, wherein, in order to generate a flame for burning the pollutants, a fuel gas and oxygen are fed into a combustion chamber (19) of a burner (1), where they are then ignited, wherein a diluent gas is fed in in order to reduce the calorific value of the gas mixture relative to the fuel gas, while the throughput of the diluent gas is regulated as a function of the composition of the industrial gas in order to adapt the gas mixture consisting of diluent gas and fuel gas. The invention also relates to a burner (1) for generating a flame (2) in a combustion chamber (19) for burning pollutants in an industrial gas, and to a waste-gas treatment device having at least one burner (1) arranged in a combustion chamber (19).

The present invention provides a device for use in a thermal oxidation system for enhancing reaction kinetics for incineration of one or more components of a waste stream, a thermal oxidation system comprising the device, and method of use thereof.

Disclosed herein are systems, apparatuses, and methods for using a sensed combustion zone temperature to continuously control combustion of a first (main) gas within an enclosed combustor. The combustor is in fluid communication with a first gas line carrying the first gas, a second gas line independent of the first gas line carrying a second (assist) gas having a higher heating value than the first gas, and air dampers providing draft or assist air. The first gas may be vapors from a production source or tank. A computer control system monitors the combustion zone temperature of the enclosed combustor as sensed by a sensor in electronic communication with the computer control system and controls the combustion zone temperature by changing a condition of a first gas line valve of the first gas line, a second gas line valve of the second gas line, and the air dampers.