Provided is an air conditioning system that maintains a room pressure in a clean room at high accuracy while having a simple configuration. An air conditioning system includes: a fan filter unit including a supply air fan to supply air to a preparation room from a chamber including space above a ceiling of the preparation room; a fan filter unit including a supply air fan to supply the air to the preparation room from the chamber; and a fan filter unit including a return air fan to return the air from the preparation room through the chamber and to exhaust the air from the preparation room, and further includes: a pressure sensor provided in the preparation room; and a control unit to control a return air fan based on a value detected by the pressure sensor.

A critical area recirculation and exhaust system for a room operates in a normal operating mode where fresh air is delivered from an air handler through a diffuser and returned to the air handler through a room return duct. In a selected isolation operating mode, a fan filter unit is activated to draw contaminated air from the room through one or more filters and to expel the filtered air through the diffuser and through an exhaust air duct to create an increased air change rate and a negative pressure in the room.

A critical area recirculation and exhaust system for a room operates in a normal operating mode where fresh air is delivered from an air handler through a diffuser and returned to the air handler through a room return duct. In a selected isolation operating mode, a fan filter unit is activated to draw contaminated air from the room through one or more filters and to expel the filtered air through the diffuser and through an exhaust air duct to create an increased air change rate and a negative pressure in the room.

Disclosed is an air conditioning device, including a telescopic main structure, a ventilation air conditioning assembly and a control assembly, the ventilation air conditioning assembly is installed on the main structure, the main structure is configured to form a hermetic space inside it, and is configured to stretch or fold the hermetic space. The ventilation air conditioning assembly is configured to form a differential pressure environment in the hermetic space, the control assembly can be used to control the main structure to stretch or fold, and control the ventilation air conditioning assembly to adjust an air pressure, a temperature and a humidity in the hermetic space.

A semiconductor manufacturing system has a turbine disposed inside a semiconductor manufacturing clean room. A controller is disposed outside the semiconductor manufacturing clean room and is coupled to the turbine through a first cable. A first computer is coupled to the controller through a second cable. The first computer has a web server configured to communicate with the controller via the second cable. A second computer is disposed in the semiconductor manufacturing clean room and is connected to the web server of the first computer. The web server hosts a web page including a reset button configured to issue a reset command to the controller. The web page also displays a status of the turbine.

A semiconductor manufacturing system has a turbine disposed inside a semiconductor manufacturing clean room. A controller is disposed outside the semiconductor manufacturing clean room and is coupled to the turbine through a first cable. A first computer is coupled to the controller through a second cable. The first computer has a web server configured to communicate with the controller via the second cable. A second computer is disposed in the semiconductor manufacturing clean room and is connected to the web server of the first computer. The web server hosts a web page including a reset button configured to issue a reset command to the controller. The web page also displays a status of the turbine.

An air delivery system for delivering a pathogen-free airflow can include an air intake manifold, a sterilizer unit with a tank and at least one ultraviolet (UV) unit, a cooling unit with at least one cooling manifold and at least one heat exchange unit, and a user output. The air intake manifold, the tank, the at least one cooling manifold, and a user output can be in fluid communication in that general order. The at least one ultraviolet (UV) unit can be mounted within the tank, with the at least one UV unit configured to generate ultraviolet light to promote killing of pathogens. The at least one heat exchange unit is configured to cool the outbound air flow to a temperature suitable for breathing by a user and to heat an incoming air flow in the air intake manifold.

An air delivery system for delivering a pathogen-free airflow can include an air intake manifold, a sterilizer unit with a tank and at least one ultraviolet (UV) unit, a cooling unit with at least one cooling manifold and at least one heat exchange unit, and a user output. The air intake manifold, the tank, the at least one cooling manifold, and a user output can be in fluid communication in that general order. The at least one ultraviolet (UV) unit can be mounted within the tank, with the at least one UV unit configured to generate ultraviolet light to promote killing of pathogens. The at least one heat exchange unit is configured to cool the outbound air flow to a temperature suitable for breathing by a user and to heat an incoming air flow in the air intake manifold.

Examples of an interface module includes a fan filter unit having a fan and a filter, a housing surrounding a space adjacent to the filter, the housing includes a door, an upper housing surrounding a space adjacent to the fan, a first port provided in the upper housing, a second port communicating to a FFU internal space, the FFU internal space is a space between the fan and the filter in the fan filter unit, and a differential pressure gauge connected to the first port and the second port to detect a differential pressure between an interior of the upper housing and the FFU internal space.

A system and method for creating a microenvironment within an ambient environment is disclosed. The first outlet is configured for expelling a gas at a first velocity sufficient for producing a gas curtain that separates the microenvironment from the ambient environment. The second outlet is configured for expelling the gas at a second velocity within the microenvironment. An inlet is spaced apart from the first outlet and the second outlet and is in fluid communication with a suction unit. The suction unit is positioned downstream of the inlet and configured for removing gas from the microenvironment through the inlet. The first velocity is greater than the second velocity.