Patent classifications
F
F27
F27D
99/00
F27D99/0001
F27D99/0006
F27D2099/0026
F27D2099/0026
HOLDER FOR HIGH-INTENSITY LAMPS FOR A RAPID THERMAL ANNEALING FURNACE
The present description concerns a holder (60) for high-intensity lamps (24) comprising a first part (62) made of a first material, intended to support the high-intensity lamps and comprising a surface (70) intended to face the high-intensity lamps, a second part (64) made of a second material different from the first material, covering the first part and attached to the first part, and a sheet (90), made of a third material different from the first material, interposed between the first part and the second part and delimiting with the second part at least one cavity (72) intended to contain a coolant.