A stave comprising an outer housing, an inner pipe circuit comprising individual pipes housed within the outer housing, wherein the individual pipes each has an inlet end and an outlet end and wherein each pipe may or may not be mechanically connected to another pipe, and a manifold, integral with or disposed on or in the housing; wherein the inlet and/or outlet ends of each individual pipe is disposed in or housed by the manifold. The manifold may be made of carbon steel while the housing may be made of copper. Each of the inlet and outlet ends of each individual pipe may be surrounded in part by cast copper within a housing of the manifold.

A stave comprising an outer housing, an inner pipe circuit comprising individual pipes housed within the outer housing, wherein the individual pipes each has an inlet end and an outlet end and wherein each pipe may or may not be mechanically connected to another pipe, and a manifold, integral with or disposed on or in the housing; wherein the inlet and/or outlet ends of each individual pipe is disposed in or housed by the manifold. The manifold may be made of carbon steel while the housing may be made of copper. Each of the inlet and outlet ends of each individual pipe may be surrounded in part by cast copper within a housing of the manifold.

A temperature homogenizing container and a refrigerator having same. The container comprises a body and an accommodating space that is enclosed by the body. The body comprises several capillary tube cavities provided therein and allowing flow of a heat exchange medium. A micro-tooth structure is provided on the inner wall of each capillary tube cavity. The heat exchange medium may flow in the capillary tube cavities along an extension direction of the capillary tube cavities. By setting the container body to comprise several capillary tube cavities therein, the temperature homogenizing effect and heat exchange efficiency of the container are improved; by providing the micro-tooth structure, the heat exchange efficiency is further improved; the temperature difference of different areas in the container is reduced, and temperature homogenization in the container is achieved.

A system for receiving a disposable bag (44) has a receiving container (10) with a container interior for receiving the disposable bag (44) and a temperature-control hollow wall (20) that at least partially surrounds the container interior of the receiving container (10). A temperature-control unit controls the temperature of the container interior by will a temperature-control medium arranged in the temperature-control hollow wall (20) at a maximum pressure of about 1 bar.

A stave comprising a housing, an inner cooling fluid circuit comprising a cooling fluid inlet, a cooling fluid outlet and one or more cooling fluid pipes housed within, or cooling fluid passageways defined by, the housing, wherein each cooling fluid pipe and/or passageway is in direct or indirect fluid communication with the cooling fluid inlet and the cooling fluid outlet; and a manifold, integral with or disposed on or in the housing, that provides support for installation of the stave on a furnace shell; wherein the manifold has one or more inlet pipes, or defines one or more inlet passageways, for providing cooling fluid to the cooling fluid inlet of the cooling fluid circuit of the housing; and wherein the manifold has one or more outlet pipes, or defines one or more outlet passageways, for receiving cooling fluid from the cooling fluid outlet of the cooling fluid circuit of the housing.

The campaign lives are extended and the risks of process gas leaks past seals are reduced by improved stave coolers that each hang together inside steel shelled furnaces by a single neck extended out through a steel jacketed collar. All the coolant circuits inside the stave cooler are collected and grouped together to pass inside through the one collar. The steel in the collar is matched to the steel used in the containment shell, and a matching steel weld seals them together. Thermal stresses are thereby prevented from accumulating over separation distances as a consequent of the steel's coefficient of expansion. A single point of penetration has no separation distance to another.

Provided is a wafer conveyance device that suppresses a temperature rise of gas in a wafer conveyance chamber. A wafer conveyance device for conveying a wafer between a FOUP (Front-Opening Unified Pod) in which the wafer is stored and a processing device for processing the wafer, the wafer conveyance device including a wafer conveyance chamber in which a conveyance robot is installed, an FFU chamber communicating with the wafer conveyance chamber, a return duct provided in a wall or a door of the wafer conveyance chamber and communicating with both the wafer conveyance chamber and the FFU room, a blowing fan that blows gas from the FFU chamber into the wafer conveyance chamber, and a heat exchanger that cools the gas circulating in an internal space including the FFU chamber, the return duct, and the wafer conveyance chamber.

Cast-iron and cast-copper stave coolers improve the campaign lives of furnaces with steel shelled vessels. Each stave cooler has a single rectangular body with one-only protruding neck on its back that includes a steel collar adaptor. All the coolant piping passes in a group through the protruding neck from two or more independent coolant circuits inside the stave body. Such stave coolers are configured to depend entirely for all their vertical mechanical support on a single hanging of the protruding neck as a through-bulkhead in a single corresponding penetration of the containment shell. Thus, a single annular welded steel-to-steel gas seal around the through-bulkhead is all that's needed inside the steel containment shell for each stave cooler. Coolant piping is laid flat in a single common layer, inside to a hot face. Cast-copper stave cooler hot faces include an abrasion resistant layer that extends campaign lives beyond ten years.

A method of cooling a liner in a plasma chamber. A recycle gas is contacted with or passed through the liner to cool the liner and pre-heat the recycle gas. The pre-heated gas is then recycled through the plasma chamber to become part of the plasma forming process. The method further comprises the liner is graphite, the recycle gas passes through at least one cooling channel present in the liner, at least one of the cooling channels are covered with at least one removable liner/channel cover, carbon deposits are formed from the presence of hydrocarbons in the recycle gas, at least one channel is formed in a spiral cooling channel pattern, at least one channel is formed in a substantially straight cooling channel pattern, and a plenum to aid in the production of an even distribution of cooling gas in the channels.

Disclosed is a reactor-exchanger or an exchanger comprising at least 3 levels, each of which includes at least one region with millimeter channels promoting heat exchange and at least one distribution region upstream and/or downstream of the region with millimeter channels, characterized in that the reactor-exchanger or exchanger is a unit that has no mounting interfaces between the various levels.