A heat exchanger includes: a header that extends in a first direction; and a plurality of heat transfer tubes that extend in a second direction crossing the first direction, each of which has one end connected to the header, and that are arranged in the first direction at intervals. The header includes: a header body having a tubular shape, a first member through which the one end of each of the heat transfer tubes extends, and a second member positioned between the header body and the first member in the second direction. The second member includes: a base portion that extends in the first direction, and a plurality of protruding portions that extend from the base portion toward the first member in the second direction.

The invention concerns a heat exchanger having an exchange body having first passages for the flow of a first fluid and second passages for the flow of a second fluid exchanging heat with the first fluid, a first inlet manifold for introducing the first fluid into the first passages, a first outlet manifold for discharging the first fluid from the first passages). The heat exchanger also includes an inlet filter arranged facing the inlet surface of the exchange body, and/or an outlet filter arranged facing the outlet surface of the exchange body, the inlet filter and/or the outlet filter having a sheet metallic material selected from a metal gauze, a non-woven fabric of metallic fibres, a sintered metallic powder or sintered metallic fibres.

A fluid flow-path device facilitates a maintenance operation to remove a foreign substance adhered to a member, to prevent passage of the foreign material. The fluid flow-path device has a distribution header including a partition member and a header body in a flow-path formation body. The partition member partitions a distribution space of the distribution header into an upstream-side space that communicates with a supply opening in the header body, and a downstream-side space that communicates with a plurality of flow paths in the flow-path formation body. The partition member includes a region that prevents a foreign substance in a fluid from flowing from the upstream-side space to the downstream-side space, while allowing the fluid to flow. The header body has an opening that allows a washing fluid to flow into the downstream-side space, and an opening that allows the washing fluid to be discharged from the upstream-side space.

A method for at least partially removing a contamination layer (24) from an optical surface (14a) of an optical element (14) that reflects EUV radiation includes: performing an atomic layer etching process for at least partially removing the contamination layer (24) from the optical surface (14a), which, in turn, includes: exposing the contamination layer (24) to a surface-modifying reactant (44) in a surface modification step, and exposing the contamination layer (24) to a material-detaching reactant (45) in a material detachment step. The optical element (14) is typically taken, before the atomic layer etching process is performed, from an optical arrangement, in particular from an EUV lithography system, in which the optical surface (14a) of the optical element (14) is exposed to EUV radiation (6), during which the contamination layer (24) is formed.

A heat exchanger includes a main pipe through which refrigerant flows, a plurality of tubes connected to the main pipe to allow refrigerant passing through the plurality of tubes to exchange heat with air, and a refrigerant distributor disposed between the main pipe and the plurality of tubes, to distribute refrigerant passing through the main pipe to the plurality of tubes. The refrigerant distributor includes an upstream structure connected to the main pipe and including a plurality of first distribution flow paths to which the refrigerant passing through the main pipe are distributed, and a downstream structure including a plurality of second distribution flow paths communicating with the plurality of first distribution flow paths, and a plurality of refrigerant outlets communicating with the plurality of second distribution flow paths so as to allow the refrigerant to be discharged to the plurality of tubes.

A liquid refrigerant distributor is used for a falling liquid film evaporator. The liquid refrigerant distributor includes a gas-liquid two-phase pipe through which a gas-liquid two-phase refrigerant flows, and a first refrigerant tub including a liquid reservoir section into which the gas-liquid two-phase refrigerant flows from the gas-liquid two-phase pipe. The first refrigerant tub further includes a droplet collector configured to collect droplets contained in a gas refrigerant separated by the liquid reservoir section.

A heat exchanger is connected to a first pipe through which a refrigerant flows. The heat exchanger includes: heat transfer tubes; and a header connected to the heat transfer tubes. The header includes: a first plate-shaped portion connected to the first pipe; a second plate-shaped portion connected to the heat transfer tubes; a third plate-shaped portion disposed between the first plate-shaped portion and the second plate-shaped portion; and a fourth plate-shaped portion that is disposed between the third plate-shaped portion and the second plate-shaped portion and that has communication openings for the heat transfer tubes. The first plate-shaped portion, the third plate-shaped portion, the fourth plate-shaped portion, and the second plate-shaped portion are stacked and overlap in a stacking direction. The third plate-shaped portion has a refrigerant flow path formation opening including: a first region through which the refrigerant flows in a first direction perpendicular to the stacking direction.

A heat exchanger includes: a gas-refrigerant pipe; a header connected to the gas-refrigerant pipe; and heat transfer tubes connected to the header. The header includes: a first plate member; and a second plate member that is stacked on the first plate member in a plate-thickness direction. The first plate member includes a first opening that constitutes an internal space of the header. The second plate member includes a second opening that, together with the first opening, constitutes the internal space of the header. The internal space of the header communicates with the heat transfer tubes. A first direction is perpendicular to both the plate-thickness direction and a direction in which the heat transfer tubes are arranged. A width of a part of the first opening in the first direction is different from a width of the second opening in the first direction.

A heat exchanger includes: a header that guides a refrigerant; and an assembly of heat transfer tubes and fins that is connected to the header and that causes heat exchange between the refrigerant and a medium. The header includes: a first member having a first surface; a second member having a second surface that faces the first surface; and third member having a third surface that intersects with the first surface and the second surface. The first surface is joined with the second surface by a first brazing material having a first thickness. The third surface is joined with the first member by a second brazing material having a second thickness. The third surface is joined with the second member by the second brazing material. The first thickness is less than the second thickness. The first thickness is 0.2 mm or less.

A heat exchanger with a housing (3) that contains a set of channels (12); an inlet collector (4) having an inlet collector chamber (9) with an inlet (5), wherein the inlet collector chamber (9) includes first flow distribution means (10) configured to distribute a flow originating from the inlet (5) evenly over the set of channels (12); and an outlet collector (6). The first flow-rate distribution means (10) consist of a single body (15) that comprises two flow-conducting surfaces (16), which are symmetrical with respect to each other according to the first plane of symmetry and the second plane of symmetry, and which two flow-conducting surfaces (16), as seen from the inlet (5), are inclined downward in a first direction perpendicular to the first plane of symmetry and/or in a second direction perpendicular to the second plane of symmetry.