A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.

A cooling system and method for using the cooling system are described. The cooling system includes a plurality of individual piezoelectric cooling elements spatially arranged in an array extending in at least two dimensions, a communications interface and driving circuitry. The communications interface is associated with the individual piezoelectric cooling elements such that selected individual piezoelectric cooling elements within the array can be activated based at least in part on heat energy generated in the vicinity of the selected individual piezoelectric cooling elements. The driving circuitry is associated with the individual piezoelectric cooling elements and is configured to drive the selected individual piezoelectric cooling elements.

A thin gas transportation device is provided and includes a shell, a check valve and a gas pump. The shell includes a shell surface, an accommodation slot and an outlet slot. The accommodation slot is recessed from the shell surface and includes an accommodation bottom surface. The outlet slot is recessed from the accommodation bottom surface. The check valve is disposed within the accommodation slot and includes a barrier plate and a valve plate. The barrier plate is disposed on the accommodation bottom surface and covers the outlet slot. The barrier plate includes a first surface, a second surface, a protruding part and a plurality of perforations. The protruding part is protruding from the second surface and located at the outlet slot. The valve plate is coupled to the second surface, and the protruding part abuts against the valve part and seals the valve hole.

A cooling system including a support structure, a cooling element, and a bottom plate is described. The cooling element has a central region and a perimeter. The cooling element is supported by the support structure at the central region. At least a portion of the perimeter is unpinned. The cooling element undergoes vibrational motion when actuated to drive a fluid toward a heat-generating structure. The bottom plate has orifices and at least one cavity therein. The at least one cavity is adjacent to and fluidically connected with the orifices. The at least one cavity and the orifices define an orifice distance between the orifices and the heat-generating structure and an orifice length within the bottom plate. The heat-generating structure and the bottom plate define a gap between a portion of the bottom plate and a portion of the heat-generating structure.

A fluid control device includes a fluid conveying element formed by a pump and a valve, and an outer housing containing the fluid conveying element. The outer housing includes a first outer wall forming an internal space closer to the pump, and a second outer wall forming an internal space closer to the valve. The second outer wall includes an outer-wall main plate having a part overlapping, in plan view, a through hole that is a discharge hole of the valve. A thermal conductivity of the part of the outer-wall main plate overlapping the discharge hole is higher than a thermal conductivity of the first outer wall.

A pressure-controlling device (10) includes a pump (21), a connection pipe (30), a first valve (41), and a second valve (42). The pump (21) has an inlet port (211) and an outlet port (212). The connection pipe (30) has a first end in communication with the outlet port (212), and a second end in communication with the inlet port (211) and that has a first space (31) that contains the first end, a second space (32) that contains the second end, and a third space (33) that is located between the first space (31) and the second space (32).

A first main plate has a first principal surface and a second principal surface. A second main plate has a third principal surface, a fourth principal surface, and an aperture. A piezoelectric element is provided on the first main plate and vibrates the first main plate. A first frame is disposed outside an outer peripheral end of the first main plate. First connecting portions connect the first main plate and the first frame to each other. Apertures are formed between the first connecting portions and connect a space adjacent to the first principal surface and a space adjacent to the second principal surface to each other. The second frame is disposed outside an outer peripheral end of the first frame. A second connecting portion connects the first frame and the second frame to each other.

A fluid driving system includes a vibration unit, a piezoelectric element, a signal transmission layer, a plane unit, and a protrusion. The piezoelectric element includes a first electrode and a second electrode electrically isolated from each other. The signal transmission layer includes a first conductive zone and a second conductive zone. The first electrode of the piezoelectric element is electrically connected to the first conductive zone of the signal transmission layer, and the second electrode of the piezoelectric element is electrically connected to the second conductive zone of the signal transmission layer. The plane unit has at least one hole. The piezoelectric element, the signal transmission layer, and the plane unit are located at one side of the vibration unit. The protrusion is located between the vibration unit and the plane unit, and the protrusion corresponds to and protrudes toward the at least one hole.

A cooling system including a support structure and a cooling element are described. The cooling element has a central region, a first cantilevered arm, a second cantilevered arm, and a piezoelectric. The cooling element is supported by the support structure at the central region. The piezoelectric extends across at least half of a length of the first cantilevered arm. The first and second cantilevered arms are configured to undergo vibrational motion when actuated to drive a fluid toward a heat-generating structure.

A liquid material ejection device in which a plunger is efficiently accelerated. The device includes a liquid chamber communicating with an ejection port and being supplied with a liquid material, a plunger including a tip portion having a smaller diameter than the liquid chamber and is moved in the liquid chamber, an elastic member urging the plunger upward, an arm disposed in a state extending in a substantially horizontal direction, an arm driver serving as a driving source to operate the arm, and a base member on which the arm driver is disposed. The device further includes a rocking mechanism unit connected to the arm driver and rockingly supporting the arm, the arm driver includes a plurality of actuators, the arm includes a pressing portion pressing the plunger downward, the plunger is pressed by the pressing portion, and the plunger is linearly reciprocated with rocking motion of the arm.